초록 ▼

A method for replicating a high resolution three-dimensional imprint pattern on a compliant media is disclosed. The compliant media carries an imprint stamp that includes three-dimensional features that can be used as an imprint stamp in a roll-to-roll transfer printing process. The compliant media

A method for replicating a high resolution three-dimensional imprint pattern on a compliant media is disclosed. The compliant media carries an imprint stamp that includes three-dimensional features that can be used as an imprint stamp in a roll-to-roll transfer printing process. The compliant media can be made to any size and can be connected with a belt or a cylinder. The compliant media can be optically transparent and the belt or cylinder can be optically transparent so that a light source positioned inside or outside the belt or the cylinder can irradiate another media that is urged into contact with the compliant media.

대표청구항 ▼

1. A method of replicating a high resolution three-dimensional imprint pattern on a compliant media, comprising:forming an imprint stamp on a master substrate by patterning and then etching the master substrate to define an imprint pattern in the substrate;depositing a release layer over the imprint

1. A method of replicating a high resolution three-dimensional imprint pattern on a compliant media, comprising:forming an imprint stamp on a master substrate by patterning and then etching the master substrate to define an imprint pattern in the substrate;depositing a release layer over the imprint pattern, the release layer including a first thickness operative to conformally coat the imprint pattern;depositing a silicone-based elastomer layer over the release layer to a first depth operative to completely cover the imprint pattern;curing the silicone-based elastomer layer by heating the master substrate;releasing the silicone-based elastomer layer from the release layer;separating the imprint stamp from an excess portion of the silicone-based elastomer layer that surrounds the imprint stamp;repeating the above steps, as necessary, to form additional imprint stamps from the master substrate;placing a flat and thin plastic film having a third thickness on a flat and compliant silicone rubber backing having a fourth thickness;coating a surface of the thin plastic film with a photopolymer solution;spreading the photopolymer solution over the surface of the plastic film to form a photopolymer layer having a fifth thickness;placing a patterned surface of the imprint stamp on the photopolymer layer;curing the photopolymer layer to fix a position of the imprint stamp on the photopolymer layer and to transfer an image of the imprint pattern on the patterned surface of the imprint stamp to the photopolymer layer by irradiating the photopolymer layer with an ultraviolet light of a predetermined intensity for a first time period;separating the imprint stamp from the photopolymer layer so that the image of the imprint pattern defines a photopolymer shim;post-curing the photopolymer shim by heating the photopolymer shim;depositing a coating of a fluorocarbon material having a sixth thickness on the photopolymer shim;separating the thin plastic film from the silicone rubber backing;attaching the photopolymer shim to a support substrate;attaching a shim stock having a first height to the support substrate, the shim stock is positioned adjacent to the photopolymer shim and is spaced apart from the photopolymer shim by a first distance;coating the photopolymer shim and the shim stock with a compliant material selected from the group consisting of a silicone-based elastomer material and an amorphous fluoropolymer material;spreading the compliant material over the photopolymer shim and the shim stock to form a compliant media that covers the photopolymer shim and the shim stock and to transfer the imprint pattern in the photopolymer shim to the compliant media;heating the support substrate;cooling the support substrate;separating the shim stock from the compliant media;applying a first adhesive surface of a transfer adhesive layer to a surface of the compliant media so that the transfer adhesive layer adheres to the compliant media, the transfer adhesive layer includes a seventh thickness and a second adhesive surface; andseparating the compliant media from a selected one of the support substrate or the photopolymer shim by peeling back the transfer adhesive layer. 2. The method as set forth in claim 1, wherein the master substrate is a material selected from the group consisting of a silicon substrate and a silicone wafer. 3. The method as set forth in claim 1, wherein the release layer comprises a fluorocarbon material. 4. The method as set forth in claim 1, wherein the first thickness of the release layer is from about 50.0 nanometers to about 150.0 nanometers. 5. The method as set forth in claim 1, wherein the silicone-based elastomer layer is a Polydimethyl Siloxane material. 6. The method as set forth in claim 1, wherein the first depth of the silicone-based elastomer layer is from about 0.5 millimeters to about 1.5 millimeters. 7. The method as set forth in claim 1, wherein curing the silicone-based elastomer layer comprises heating th e master substrate for about 4.0 hours at about 100.0 degrees centigrade. 8. The method as set forth in claim 1, wherein the step of separating the silicone-based elastomer layer from the release layer comprises lifting off the silicone-based elastomer layer from the release layer by grabbing an edge portion of the silicone-based elastomer layer and peeling off the silicone-based elastomer layer from the release layer. 9. The method as set forth in claim 1, wherein the step of separating the imprint stamp further comprises:placing the silicone-based elastomer layer on a substantially flat substrate;cutting around a perimeter of the imprint stamp to release the excess portions of the silicone-based elastomer layer from the imprint stamp; andpeeling off the excess portions of the silicone-based elastomer layer from the substrate so that the imprint stamp is not connected with the excess portions of the silicone-based elastomer layer. 10. The method as set forth in claim 9, wherein the substantially flat substrate is a material selected from the group consisting of a glass, a metal, a plastic, and quartz. 11. The method as set forth in claim 1, wherein the thin plastic film is a material selected from the group consisting of a Polymide and a Polyester. 12. The method as set forth in claim 1, wherein the third thickness of the thin plastic film is from about 40.0 micrometers to about 100.0 micrometers. 13. The method as set forth in claim 1, wherein the fourth thickness of the silicone rubber backing is from about 0.125 inches to about 0.25 inches. 14. The method as set forth in claim 1, wherein the spreading of the photopolymer solution comprises sliding a Mayer bar including a wire of a first diameter across the surface of the plastic film. 15. The method as set forth in claim 14, wherein the first diameter of the wire on the Mayer bar is from about 50.0 micrometers to about 100.0 micrometers. 16. The method as set forth in claim 1, wherein the photopolymer solution comprises a mixture of about 50% of a photopolymer material and about 50% acetone. 17. The method as set forth in claim 1, wherein the fifth thickness of the photopolymer layer is from about 5.0 micrometers to about 10.0 micrometers. 18. The method as set forth in claim 1, wherein the placing the imprint stamp on the photopolymer layer further comprises:placing an edge portion of the imprint stamp in contact with the photopolymer layer and holding the edge portion down; andprogressively lowering a remainder of the patterned surface into contact with the photopolymer layer. 19. The method as set forth in claim 18 and further comprising:floating the imprint stamp on a surface of the photopolymer layer to position the imprint stamp at a predetermined location on the photopolymer layer. 20. The method as set forth in claim 1, wherein the placing the imprint stamp on the photopolymer layer further comprises:floating the imprint stamp on the photopolymer layer to position the imprint stamp at a predetermined location on the photopolymer layer. 21. The method as set forth in claim 1, wherein the ultraviolet light for the curing of the photopolymer layer comprises a wavelength from about 300.0 nanometers to about 400.0 nanometers. 22. The method as set forth in claim 1, wherein the ultraviolet light is generated by a UVA ultraviolet light source. 23. The method as set forth in claim 1, wherein the predetermined intensity of the ultraviolet light is about 150 milliwatts per centimeter squared. 24. The method as set forth in claim 1, wherein the first time period for the curing of the photopolymer layer is from about 5.0 seconds to about 60.0 seconds. 25. The method as set forth in claim 1, wherein the post-curing of the photopolymer shim comprises heating the photopolymer shim for about 1.0 hour at about 100.0 degrees centigrade. 26. The method as set forth in claim 1 and further comprising rinsing the photopolymer shim with acetone after the post-curing step. 27. The method as set forth in claim 1, wherein the attaching the photopolymer shim to the support substrate comprises laying the photopolymer shim on the support substrate and fastening an end of the photopolymer shim to the support substrate using a high temperature adhesive tape. 28. The method as set forth in claim 1, wherein the support substrate for the photopolymer shim is a material selected from the group consisting of a glass, and quartz. 29. The method as set forth in claim 1, wherein the shim stock is attached to the support substrate using a high temperature adhesive tape. 30. The method as set forth in claim 1, wherein the first height of the shim stock is from about 0.5 millimeters to about 1.5 millimeters. 31. The method as set forth in claim 1, wherein the first distance between the shim stock and the photopolymer shim is from about 1.0 millimeters to about 3.0 millimeters. 32. The method as set forth in claim 1, wherein the silicone-based elastomer material for coating the photopolymer shim and the shim stock is a Polydimethyl Siloxane material. 33. The method as set forth in claim 1, wherein the support substrate is pre-heated to a temperature of about 100 degrees centigrade. 34. The method as set forth in claim 1, wherein the heating the support substrate comprises heating the support substrate for about 1.0 hour at about 100.0 degrees centigrade. 35. The method as set forth in claim 1, wherein the second diameter of the wire on the Mayer bar is from about 1.0 millimeters to about 2.0 millimeters. 36. The method as set forth in claim 1, wherein the cooling of the support substrate comprises allowing the support substrate to cool down to about a room temperature. 37. The method as set forth in claim 1, wherein the separating the shim stock comprises cutting the compliant media along an edge of the shim stock that is adjacent to the photopolymer shim. 38. The method as set forth in claim 1, wherein the sixth thickness of the fluorocarbon material is from about 50.0 nanometers to about 150.0 nanometers. 39. The method as set forth in claim 1, wherein the seventh thickness of the transfer adhesive layer is from about 20.0 micrometers to about 100.0 micrometers. 40. The method as set forth in claim 1, wherein the transfer adhesive layer is an optically transparent material. 41. The method as set forth in claim 40, wherein the optically transparent material is an optically clear silicone adhesive. 42. The method as set forth in claim 1 and further comprising laminating the compliant media to a belt material by applying the second adhesive surface of the transfer adhesive layer to a surface of the belt material. 43. The method as set forth in claim 42, wherein the belt material is an optically transparent material. 44. The method as set forth in claim 43, wherein the optically transparent material is a Polyester film. 45. The method as set forth in claim 1 and further comprising laminating the compliant media to a cylinder by applying the second adhesive surface of the transfer adhesive layer to an outer surface of the cylinder. 46. The method as set forth in claim 45, wherein the cylinder is made from an optically transparent material selected from the group consisting of a glass, quartz, and a plastic. 47. The method as set forth in claim 1 and further comprising:preheating the support substrate prior to the coating of the photopolymer shim and the shim stock with the compliant material to prepare the support substrate for the coating with the silicone-based elastomer material.