초록 ▼

A method and system for controlling the temperatures of at least one gas in a plasma processing environment prior to the at least one gas entering a process chamber. This temperature control may vary at different spatial regions of a showerhead assembly (either an individual gas species or mixed gas

A method and system for controlling the temperatures of at least one gas in a plasma processing environment prior to the at least one gas entering a process chamber. This temperature control may vary at different spatial regions of a showerhead assembly (either an individual gas species or mixed gas species). According to one embodiment, an in-line heat exchanger alters (i.e., increases or decreases) the temperature of passing gas species (either high- or low-density) prior to entering a process chamber, temperature change of the gases is measured by determining a temperature of the gas both upon entrance into the in-line heat exchanger assembly and upon exit.

대표청구항 ▼

1. An in-line heat exchanger apparatus for controlling the temperature of a gas comprising:an inlet-side gas line for receiving a gas having a temperature to be controlled;an outlet-side gas line for expelling the gas after the temperature of the gas has been controlled;at least one temperature sens

1. An in-line heat exchanger apparatus for controlling the temperature of a gas comprising:an inlet-side gas line for receiving a gas having a temperature to be controlled;an outlet-side gas line for expelling the gas after the temperature of the gas has been controlled;at least one temperature sensor for measuring the temperature of the gas;a heat conductor including at least one of a heating element for heating the gas and a cooling element for cooling the gas;an insulator surrounding an exterior of the heat conductor; andat least one gas through-channel, coupled between the inlet-side gas line and the outlet side gas line and formed by voids in the heat conductor, for changing the temperature of the gas. 2. An in-line heat exchanger apparatus according to claim 1, wherein at least one of the heating element and the cooling element are helically wound within the heat conductor. 3. An in-line heat exchanger apparatus according to claim 1, further comprising a thermal transfer membrane interposed between the insulator and the heat conductor. 4. An in-line heat exchanger according to claim 1, wherein the heat conductor comprises a plurality of concentric voids separated by at least one of a thermal transfer membrane and a membrane support, thereby forming plural gas through channels between the inlet-side and outlet side gas lines. 5. An in-line heat exchanger apparatus according to claim 4, further comprising a thermal transfer membrane interposed between the insulator and the heat conductor. 6. An in-line heat exchanger according to claim 1, wherein the at least one temperature sensor comprises an inlet side temperature sensor and an outlet side temperature sensor. 7. An in-line heat exchanger according to claim 6, further comprising a controller for monitoring the temperature of the gas at the inlet side temperature sensor and the outlet side temperature sensor, and for changing a temperature of the heat conductor to change the temperature of the gas when the temperature of the gas falls outside a target range. 8. An in-line heat exchanger according to claim 7, wherein the heat conductor comprises the heating element for increasing the temperature of the gas when the temperature of the gas falls outside a target range. 9. An in-line heat exchanger according to claim 7, wherein the heat conductor comprises the cooling element for decreasing the temperature of the gas when the temperature of the gas falls outside a target range. 10. A gas injection process chamber comprising:a plurality of gas lines;a neck at which the plurality of gas lines are joined;a process chamber; anda temperature controller located between the neck and the process chamber and configured to heat and cool said gas in order to control the temperature of said gas;wherein said temperature controller comprises a temperature sensor configured to sense the temperature of said gas. 11. A gas injection process chamber according to claim 10, further comprising:a showerhead, anda plurality of said temperature controllers disposed along a plurality of inlets from the neck to the showerhead and configured to heat and cool said gas in order to control the temperature of said gas. 12. A gas injection process chamber comprising:a process chamber;a plurality of gas lines;a plurality of temperature controllers each having and inlet side and an outlet side and configured to heat and cool said gas in order to control the temperature of said gas, a single temperature controller disposed into each gas line; anda neck for joining the outlet sides of the plurality of temperature controllers prior to connecting to the process chamber;wherein each of said plurality of temperature controllers comprises a temperature sensor configured to sense the temperature of said gas. 13. A gas injection process chamber according to claim 12, further comprising:a showerhead, anda plurality of said temperature controllers disposed along a plurality of inlets from the neck to the showerhead.