Sufficient dielectric strength needs to be ensured for the high voltage connection ( 13 - 11 ) of the high voltage electrical equipment such as a pattern generation system for focused ion beam processing and observation ( 1 ), without enlarging the equipment.The present invention seals an insulating
Sufficient dielectric strength needs to be ensured for the high voltage connection ( 13 - 11 ) of the high voltage electrical equipment such as a pattern generation system for focused ion beam processing and observation ( 1 ), without enlarging the equipment.The present invention seals an insulating liquid ( 13 - 113 a ) or gas ( 13 - 113 b ) in the space ( 13 - 113 ) between the connection bushing on the power supply side ( 13 - 111 ) and the flange on the power receiving side ( 13 - 112 ), and applies the water repellent treatment ( 13 - 111 c ) to a surface of the connection bushing or flange on the power receiving side, which the surface faces the space ( 13 - 113 ).Such a configuration provides compact electrical equipment with high dielectric strength, which can prevent the condensation or moisture absorption on the insulation surface in the space of the high voltage connection and can prevent the leakage current increase even under high humidity environment.
대표청구항▼
1. High voltage electrical equipment including a bushing terminal which connects to an electric wire for supplying high voltage electricity, a connection bushing which holds the bushing terminal, a flange on a power receiving side in which the connection bushing is detachably fitted and which has a
1. High voltage electrical equipment including a bushing terminal which connects to an electric wire for supplying high voltage electricity, a connection bushing which holds the bushing terminal, a flange on a power receiving side in which the connection bushing is detachably fitted and which has a flange terminal to be connected to the bushing terminal, and an insulating liquid sealed in a space between the connection bushing and the flange on the power receiving side, the space being formed when said connection bushing is attached to said flange on a power receiving side, wherein,an insulating liquid has dissolved water of 50 ppm or less at 40° C. 2. The high voltage electrical equipment of claim 1, wherein said insulating liquid is a fluorine-based insulating liquid. 3. High voltage electrical equipment including a bushing terminal which connects to an electric wire for supplying high voltage electricity, a connection bushing which holds the bushing terminal, and a flange on a power receiving side in which the connection bushing is detachably fitted and which has a flange terminal to be connected to the bushing terminal, comprising,an insulating gas which has a water content of 300 ppm or less with a dew point of −40° C., and insulation equal to or higher than that of air, and which is sealed in a space between the connection bushing and the flange on the power receiving side, the space being formed when said connection bushing is attached to said flange on a power receiving side. 4. High voltage electrical equipment including a bushing terminal which connects to an electric wire for supplying high voltage electricity, a connection bushing which holds the bushing terminal, and a flange on a power receiving side in which the connection bushing is detachably fitted and which has a flange terminal to be connected to the bushing terminal, comprising,an insulating gas which has a breakdown voltage of 2 kV/mm or more, and which is sealed in a space between the connection bushing and the flange on the power receiving side, the space being formed when said connection bushing is attached to said flange on a power receiving side. 5. The high voltage electrical equipment of claim 4, wherein said insulating gas has a water content of 300 ppm or less with a dew point of −40° C. 6. High voltage electrical equipment including a bushing terminal which connects to an electric wire for supplying high voltage electricity, a connection bushing which holds the bushing terminal, and a flange on a power receiving side in which the connection bushing is detachably fitted and which has a flange terminal to be connected to the bushing terminal, comprising,dry nitrogen, dry air, or dry carbon dioxide gas which is sealed in a space between the connection bushing and the flange on the power receiving side, the space being formed when said connection bushing is attached to said flange on a power receiving side. 7. The high voltage electrical equipment of any one of claims 1 and 3 to 6 , wherein a water repellent treatment is applied to a surface of the connection bushing, which the surface faces the space. 8. The high voltage electrical equipment of claim 7, wherein said water repellent treatment material includes a fluorine-based resin material. 9. The high voltage electrical equipment of any one of claims 1 and 3 to 6 , wherein said high voltage electrical equipment comprises an electronic device including an electron source such as an electron microscope, or an ion source. 10. The high voltage electrical equipment of any one of claims 1 and 3 to 6 , wherein said high voltage electrical equipment comprises an electronic device that processes and observes samples with accelerated ion beams.
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이 특허에 인용된 특허 (2)
Britz Lothar (Hauset BEX) Krug Wolfgang (Jlich DEX) Seferiadis Johann (Jlich DEX), Container having a hot wall with a high-temperature-tolerant current pass-through.
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