Coaxial type impedance matching device and impedance detecting method for plasma generation
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01J-007/24
H03H-007/38
출원번호
US-0441899
(2003-05-20)
우선권정보
JP-0158721 (2002-05-31); JP-0313818 (2002-10-29)
발명자
/ 주소
Kitamura, Toshiaki
Rokuyama, Koichi
Kasai, Shigeru
Ogino, Takashi
Osada, Yuki
출원인 / 주소
Nagano Japan Radio Co., Ltd., Tokyo Electron Limited
대리인 / 주소
Osha & May L.L.P.
인용정보
피인용 횟수 :
7인용 특허 :
6
초록▼
For plasma generation, an impedance matching device and a process of controlling and detecting the impedance matching device are provided to satisfy a preset matching condition. The impedance matching device includes a tubular external conductor and an internal conductor disposed therein, a matching
For plasma generation, an impedance matching device and a process of controlling and detecting the impedance matching device are provided to satisfy a preset matching condition. The impedance matching device includes a tubular external conductor and an internal conductor disposed therein, a matching device body including a plurality of dielectrics, a moving mechanism, a storing unit for storing a data table, a measuring device, and a calculation control unit. The impedance detecting process includes inputting a progressive wave and a reflected wave outputted by a directional coupler connected to an object to be matched, generating different signals, and mixing the signals to determine relative phase differences and amplitude ratios of the signals, and detecting an input impedance of the object to be matched on a basis of the detected amplitude ratios and that of a true phase difference between the progressive wave and the reflected wave that is detected by referring to a relationship prepared in advance.
대표청구항▼
1. An impedance detecting method comprising:inputting a progressive wave and a reflected wave output by a directional coupler connected to an object to be connected, as a first input signal and a second input signal, which are identical in frequency to each other and are different in phase from each
1. An impedance detecting method comprising:inputting a progressive wave and a reflected wave output by a directional coupler connected to an object to be connected, as a first input signal and a second input signal, which are identical in frequency to each other and are different in phase from each other;generating a first generated signal and a second generated signal, which are identical in frequency to and different by a first reference phase difference from the first input signal, on a basis of the first input signal;a third generated signal and a fourth generated signal, which are identical in frequency to and different by a second reference phase difference from the second input signal, on a basis of the second input signal;mixing the first generated signal and the third generated signal to detect relative phase difference between the first generated signal and the third generated signal, as a first relative phase difference;mixing the second generated signal and the fourth generated signal to detect relative phase difference between the second generated signal and the fourth generated signal, as a second relative phase difference;referring to a relationship prepared in advance among the first relative phase difference, the second relative phase difference, and a true phase difference between the first input signal and the second input signal, to detect a true phase difference between the progressive wave and the reflected wave;mixing the first generated signal and the third generated signal to detect an amplitude ratio of the third generated signal to the first generated signal;mixing the second generated signal and the fourth generated signal to detect an amplitude ratio of the fourth generated signal to the second generated signal; anddetecting an input impedance of the object to be connected on a basis of the detected true phase difference between the progressive wave and the reflected wave, and the detected amplitude ratios. 2. A coaxial type impedance matching device comprising:a tubular external conductor;an internal conductor disposed in the external conductor;a matching device body including a plurality of dielectrics being movable and disposed in clearance between an inner face of the external conductor and an outer face of the internal conductor, the matching device body disposed between a directional coupler and an object to be matched;a moving mechanism for moving the dielectrics;a storing unit for storing a data table in which an intrinsic impedance of the matching device body and a position of each of dielectrics are made to correspond;a measuring device; anda calculation control unit, for controlling the moving mechanism, including a control unit and a calculation unit, wherein:the intrinsic impedance of the matching device body is controlled to a value corresponding to positions of the dielectrics in the external conductor;the measuring device includes:a first signal distributor for generating and distributing a first generated signal and a second generated signal, which are identical to each other in frequency and are different by a first reference phase difference from a first input signal inputted, on a basis of the first input signal;a second signal distributor to which a second input signal having a frequency identical to the first input signal and being different in phase from the first input signal is input, the second signal distributor for generating and distributing a third generated signal and a fourth generated signal, which are identical to each other in frequency and are different by a second reference phase difference, on a basis of the second input signal;a first mixing unit for mixing the first generated signal and the third generated signal to detect a relative phase difference between the first generated signal and the third generated signal as a first relative phase difference;a second mixing unit for mixing the second generated signal and the fourth generated signal to detect a rel ative phase difference between the second generated signal and the fourth generated signal as a second relative phase difference; anda detecting unit for detecting a true phase difference between the first input signal and the second input signal on the basis of the first relative phase difference and the second relative phase difference detected by the first mixing unit and the second mixing unit, the first reference phase difference, and the second reference phase difference;the directional coupler connected to the matching device body, the first signal distributor, and the second signal distributor; andthe calculation unit for calculating an input impedance of the object to be matched;wherein the first input signal and the second input signal, which are output by the directional coupler, are input to the first signal distributor and the second signal distributor, respectively;one of the first mixing unit and the second mixing unit mixes both first and second generated signals to detect an amplitude ratio of the first and third generated signals and the other mixed both second and fourth generated signals to detect an amplitude ratio of the second and fourth generated signals;the calculation unit calculates the input impedance of the object to be matched on the basis of the true phase difference between the first input signal and the second input signal, which is detected by the detecting unit, and the detected amplitude ratios; andthe control unit:calculates the input impedance of the object to be matched on a basis of the intrinsic impedance of the matching device body, which is obtained from the positions of the dielectrics in the matching device body and the data table, at a time of starting a matching operation, and the input impedance of the matching device body being as the object to be matched, which is calculated by the calculating unit of the measuring device, at the time of starting the matching operation,refers to the data table to calculate, as target positions, the positions of the dielectrics so that a conjugate impedance to the calculated input impedance of the matching device body and the intrinsic impedance are identical, andcontrols the moving mechanism to locate the dielectrics at the target positions, respectively.
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이 특허에 인용된 특허 (6)
Mavretic Anton (Marlton NJ) Ciszek Andrew (Maple Shade NJ) Stach Joseph (Medford NJ), Apparatus for matching a variable load impedance with an RF power generator impedance.
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