IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0131292
(2002-04-25)
|
우선권정보 |
KR-0009614 (2002-02-22) |
발명자
/ 주소 |
- Lee, Sang Seok
- Park, Sang Ho
|
출원인 / 주소 |
- LG. Philips LCD Co., Ltd.
|
대리인 / 주소 |
Morgan, Lewis & Bockius LLP
|
인용정보 |
피인용 횟수 :
4 인용 특허 :
37 |
초록
▼
An apparatus for manufacturing a liquid crystal display device includes a unitary vacuum processing chamber, upper and lower stages confronting each other at upper and lower spaces inside the vacuum processing chamber to bond a first and second substrates, and a first substrate lifting system formed
An apparatus for manufacturing a liquid crystal display device includes a unitary vacuum processing chamber, upper and lower stages confronting each other at upper and lower spaces inside the vacuum processing chamber to bond a first and second substrates, and a first substrate lifting system formed in the lower stage for lifting the second substrate.
대표청구항
▼
1. An apparatus for manufacturing a liquid crystal display device, comprising:a unitary vacuum processing chamber;upper and lower stages confronting each other at upper and lower spaces inside the vacuum processing chamber to bond a first and second substrates;a first substrate lifting system formed
1. An apparatus for manufacturing a liquid crystal display device, comprising:a unitary vacuum processing chamber;upper and lower stages confronting each other at upper and lower spaces inside the vacuum processing chamber to bond a first and second substrates;a first substrate lifting system formed in the lower stage for lifting the second substrate. 2. The apparatus according to claim 1, wherein the first substrate lifting system comprising:a first support part to support the substrate; anda first receiving part to receive the first support part formed in the lower stage. 3. The apparatus according to claim 2, wherein the at least one first receiving part is formed along a longest side of the lower stage, and the first support part is aligned with the first receiving part. 4. The apparatus according to claim 2, wherein the at least one first receiving part is formed along a shortest side of the lower stage, and the first support part is aligned to the first receiving part. 5. The apparatus according to claim 2, wherein the at least one first receiving part is formed along longest and shortest sides of the lower stage, and the first support part is aligned with the first receiving part. 6. The apparatus according to claim 2, further comprising:a first elevating axis provided in the first support part and penetrating the first receiving part from a bottom portion of the lower stage to move the first support part along the up and down direction; anda first driving part connected to the first elevating axis to operate the first elevating axis to move along the up and down direction. 7. The apparatus according to claim 6, wherein the first elevating axis is coupled with the first support part and the first driving part that moves the first elevating axis are formed at each support part to confront each other at a length of the first support part formed to have a displacement between a central portion and both ends of the first support part to reach a predetermined height. 8. The apparatus according to claim 2, wherein the first support part is shaped like one of bar, round pin, and a polygonal hollow pipe. 9. The apparatus according to claim 2, further comprising:at least one first receiving part at an upper surface of the lower stage, the first receiving part having one of a concave recess and a penetrating part. 10. The apparatus according to claim 2, further comprising:at least one second receiving part arranged at circumferential edges of the lower stage perpendicular to a loading/unloading direction of the substrate to have one of a concave recess and a penetrating part. 11. The apparatus according to claim 10, wherein the second receiving part is formed to have a predetermined length at the circumferential edges of the lower stage corresponding to a portion of the substrate and the second support part is formed to have a length aligned with the second receiving part to lift the substrate. 12. The apparatus according to claim 1, further comprising:a second substrate lifting system, one end of the second substrate lifting system received inside the second receiving part to move along the upward direction to a predetermined height from the circumferential edges of the lower stage, and an other end of the second substrate lifting system to move along the upward and downward directions. 13. The apparatus according to claim 12, wherein the second substrate lifting system includes at least one second support part received inside a second receiving part and positioned initially at both sides of the lower stage to support both side bottoms of the substrate. 14. The apparatus according to claim 13, further comprising:a second elevating axis to move the second support part along the upward and downward directions, and a second driving part connected to the second elevating axis to operate the second elevating axis along the upward and downward direction. 15. The apparatus according to claim 14, wherein one end of the second support p arts and at least one of the second elevating axis is provided between the second support parts. 16. The apparatus according to claim 13, wherein at least faces of the first and second support parts to be contacted with the substrate are coated with a coating material to prevent damage of the substrate caused by contact with the substrate. 17. The apparatus according to claim 16, wherein the coating material includes at least one of polytetrafluoroethylene, polyetheretherketone, and electro-conductive materials. 18. The apparatus according to claim 13, wherein the second receiving part is formed to have a predetermined length at the circumferential edges of the lower stage corresponding to a portion of the substrate and the second support part is formed to have a length aligned with the second receiving part to lift the substrate. 19. The apparatus according to claim 18, wherein the second support is bent to have a face supporting a bottom of the substrate and another face supporting a side of the substrate. 20. The apparatus according to claim 13, wherein the second support parts contact the first substrate in at least one of a face contact, a line contact, and a point contact. 21. The apparatus according to claim 1, further comprising:a loader part driven to load and unload the substrates into and out of the vacuum processing chamber. 22. A method for manufacturing a liquid crystal display device, comprising the steps of:placing a substrate on a first substrate lifting system by moving the first substrate lifting system along an upward direction; andplacing the substrate on an upper surface of a lower stage by moving the first substrate lifting system along a downward direction. 23. The method according to claim 22, wherein a contact portion between the first substrate lifting system and the substrate is within a dummy area between cell areas of the substrate when the substrate is placed on the first substrate lifting system. 24. The method according to claim 22, further comprising the step of:moving a second substrate lifting system along the upward direction to support the substrate together with the first substrate lifting system,wherein the substrate is placed on an upper surface of a lower stage by moving the first and second substrate lifting systems along a downward direction. 25. The method according to claim 24, wherein a contact portion between the first and second substrate lifting system and the substrate is within a dummy area between cell areas of the substrate when the substrate is placed upon one of the first and second lifting system. 26. A method for manufacturing a liquid crystal display device, comprising the steps of:placing a substrate on one of a first and second substrate lifting system by moving the one of the first and second substrate lifting systems along an upward and direction; andplacing the substrate on an upper surface of a lower stage by moving the one of the first and second substrate lifting systems along a downward direction. 27. The method according to claim 26, wherein a contact portion between the first and second substrate lifting systems and the substrate within a dummy area between cell areas of the substrate when the substrate is placed upon one of the first and second lifting systems. 28. A method for manufacturing a liquid crystal display device, comprising the steps of:placing a substrate on a first substrate lifting system by moving the first substrate lifting system along an upward direction;moving a second substrate lifting system along the upward direction to support the substrate together with the first substrate lifting system; andplacing the substrate on an upper surface of a lower stage by moving the first and second substrate lifting systems along a downward direction. 29. The method according to claim 28, wherein a contact portion between the first and second substrate lifting systems and the substrate is within a dummy area between cell areas of the substrate when the substrate is placed up one of the first and second lifting systems.
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