IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0321289
(2002-12-17)
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발명자
/ 주소 |
- Kim, Sam H.
- Hosokawa, Akihiro
- Suh, Dong Choon
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출원인 / 주소 |
|
대리인 / 주소 |
Moser, Patterson & Sheridan LLP
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인용정보 |
피인용 횟수 :
15 인용 특허 :
169 |
초록
▼
Embodiments of the invention generally provides an apparatus and method for heating substrates, comprising a heater disposed within a chamber, a plurality of heated supports movably disposed within the chamber to support at least two substrates thereon and a contamination collector disposed in commu
Embodiments of the invention generally provides an apparatus and method for heating substrates, comprising a heater disposed within a chamber, a plurality of heated supports movably disposed within the chamber to support at least two substrates thereon and a contamination collector disposed in communication with the chamber.
대표청구항
▼
1. Apparatus for heating substrates, comprising:a heater disposed within a chamber;a plurality of heated supports movably disposed within the chamber to support at least two substrates thereon; anda contamination collector disposed in communication with the chamber, wherein the contamination collect
1. Apparatus for heating substrates, comprising:a heater disposed within a chamber;a plurality of heated supports movably disposed within the chamber to support at least two substrates thereon; anda contamination collector disposed in communication with the chamber, wherein the contamination collector is movably disposed between inside the chamber and outside the chamber. 2. The apparatus of claim 1, wherein the contamination collector comprises a process resistant material. 3. The apparatus of claim 2, wherein the process resistant material comprises at least one metal. 4. The apparatus of claim 3, wherein the at least one metal is selected from the group consisting of steel, stainless steel, hardened steel, nickel-plated steel, aluminum, nickel and chromium. 5. The apparatus of claim 1, wherein a cooling system is disposed in communication with the contamination collector. 6. The apparatus of claim 5, wherein the cooling system includes water, glycols, alcohols or air. 7. Apparatus for heating substrates, comprising:a heater disposed within a chamber;a plurality of heated supports movably disposed within the chamber to support at least two substrates thereon; anda contamination collector disposed in communication with the chamber, wherein the contamination collector is a second chamber. 8. The apparatus of claim 7, wherein a cooling system is disposed in communication with the contamination collector. 9. The apparatus of claim 8, wherein the cooling system includes water, glycols, alcohols or air. 10. Apparatus for heating substrates, comprising:a heater disposed within a chamber;a plurality of heated supports movably disposed within the chamber to support at least two substrates thereon; anda contamination collector disposed in communication with the chamber, wherein the contamination collector is a support member for the plurality of heated supports. 11. The apparatus of claim 10, wherein the support member is coupled to an actuator for moving the plurality of heated supports. 12. Apparatus for heating substrates, comprising:a chamber having a cavity;at least one cassette having a plurality of heated supports disposed within the cavity to support a plurality of substrates;a heating layer disposed within the cavity and positioned to provide radiant heat to the at least one cassette; anda contamination collector for accumulating contaminates from within the chamber, wherein the contamination collector is movably disposed between inside the chamber and outside the chamber. 13. The apparatus of claim 12, wherein the contamination collector comprises a process resistant material. 14. The apparatus of claim 13, wherein the process resistant material comprises at least one metal. 15. The apparatus of claim 14, wherein the at east one metal is selected from the group consisting of steel, stainless steel, hardened steel, nickel-plated steel, aluminum, nickel and chromium. 16. The apparatus of claim 12, wherein a cooling system is disposed in communication with the contamination collector. 17. The apparatus of claim 16, wherein the cooling system includes water, glycols, alcohols or air. 18. Apparatus for heating substrates, comprising:a chamber having a cavity;at least one cassette having a plurality of heated supports disposed within the cavity to support a plurality of substrates;a heating layer disposed within the cavity and positioned to provide radiant heat to the at least one cassette; anda contamination collector for accumulating contaminates from within the chamber, wherein the contamination collector is a second chamber. 19. The apparatus of claim 18, wherein a cooling system is disposed in communication with the contamination collector. 20. The apparatus of claim 19, wherein the cooling system includes water, glycols, alcohols or air. 21. Apparatus for heating substrates, comprising:a chamber having a cavity;at least one cassette having a plurality of heated supports disposed within the cavity to support a plurality of s ubstrates;a heating layer disposed within the cavity and positioned to provide radiant heat to the at least one cassette; anda contamination collector for accumulating contaminates from within the chamber, wherein the contamination collector is a support member for the plurality of heated supports. 22. The apparatus of claim 21, wherein the support member is coupled to an actuator for moving the plurality of heated supports. 23. A apparatus for heating substrates, comprising:a chamber having a cavity;at least one cassette having a plurality of heated supports disposed within the cavity to support a plurality of substrates;a heating layer disposed within the cavity and positioned to provide radiant heat to the at least one cassette; anda contamination collector for accumulating contaminates from within the chamber, wherein a chamber temperature is greater than a temperature of the contamination collector. 24. The apparatus of claim 18, wherein the contamination collector is protruding from the chamber.
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