초록 ▼

A method of making a coated article (e.g., window unit), and corresponding coated article are provided. A layer of or including diamond-like carbon (DLC) is formed on a glass substrate. Then, a protective layer is formed on the substrate over the DLC inclusive layer. During heat treatment (HT), the

A method of making a coated article (e.g., window unit), and corresponding coated article are provided. A layer of or including diamond-like carbon (DLC) is formed on a glass substrate. Then, a protective layer is formed on the substrate over the DLC inclusive layer. During heat treatment (HT), the protective layer prevents the DLC inclusive layer from significantly burning off. Thereafter, the resulting coated glass substrate may be used as desired, it having been HT and including the protective DLC inclusive layer.

대표청구항 ▼

1. A method of making a coated article, the method comprising:providing a glass substrate;forming a layer comprising diamond-like carbon (DLC) on the glass substrate;forming a protective layer on the glass substrate over the layer comprising DLC;sputtering a solar control multi-layer coating includi

1. A method of making a coated article, the method comprising:providing a glass substrate;forming a layer comprising diamond-like carbon (DLC) on the glass substrate;forming a protective layer on the glass substrate over the layer comprising DLC;sputtering a solar control multi-layer coating including at least one layer comprising silver (Ag) and/or nickel chrome (NiCr) onto a surface of the glass substrate so that the solar control multi-layer coating and the layer comprising DLC are formed on opposite sides of the glass substrate,heat treating the glass substrate with each of the solar control multi-layer coating, the layer comprising DLC and the protective layer thereon, andwherein the heat treating comprises heating the glass substrate using at least temperature(s) of at least 580 degrees C., in an atmosphere including oxygen, for a time period sufficient for at least one of bending and thermally tempering the glass substrate. 2. The method of claim 1, wherein the layer comprising DLC is formed on the glass substrate via an ion beam, and wherein carbon atoms thereof are subimplanted into the glass substrate. 3. The method of claim 1, wherein the protective layer is at least partially formed on the glass substrate via sputtering. 4. The method of claim 1, wherein the coated article comprises either a vehicle window or an IG window unit. 5. The method of claim 1, further comprising removing at least part of the protective layer from the glass substrate after the heat treating. 6. The method of claim 1, wherein the protective layer comprises at least one carbide. 7. The method of claim 1, wherein the protective layer comprises at least one of: a-Si, silicon nitride, silicon oxide, silicon oxynitride, boron carbide, titanium carbide, hafnium carbide, titanium hafnium carbide, tantalum carbide, zirconium carbide, chromium, an alloy of nickel-chrome, an oxide of nickel-chrome, a nitride of nickel-chrome, titanium, and an oxide of titanium. 8. The method of claim 1, wherein the protective layer comprises at least one of: BC x (boron carbide) where x is from 0.75 to 1.5, TiC x (titanium carbide) where x is from 0.47 to 0.99, HfC x (hafnium carbide) where x is from 0.47 to 0.99, titanium hafnium carbide, TaC x (tantalum carbide) where x is from 0.47 to 0.99, and ZrC x (zirconium carbide) where x is from 0.47 to 0.99. 9. The method of claim 1, wherein the layer comprising DLC comprises amorphous DLC and has more sp 3 carbon-carbon bonds than sp 2 carbon-carbon bonds. 10. The method of claim 1, wherein the layer comprising DLC has an average hardness of at least 10 GPa. 11. The method of claim 1, wherein the protective layer comprises at least some Zr. 12. The method of claim 11, wherein the protective layer comprises a carbide of Zr. 13. A method of making an insulating glass (IG) window unit, the method comprising:providing a glass substrate;forming a layer comprising diamond-like carbon (DLC) on the glass substrate;forming a protective layer on the glass substrate over the layer comprising DLC;sputtering a solar control multi-layer coating onto another surface of the glass substrate so that the solar control coating and the layer comprising DLC are formed on opposite sides of the glass substrateheat treating the glass substrate with each of the solar control multi-layer coating, the layer comprising DLC and the protective layer thereon so that during the heat treating the protective layer prevents significant burnoff of the layer comprising DLC, wherein the heat treating comprises heating the glass substrate to temperature(s) sufficient for thermal tempering; andafter the heat treating, coupling the glass substrate with at least the layer comprising DLC thereon to another substrate in making the IG window unit. 14. The method of claim 13, wherein the solar control coating comprises at least first and second dielectric layers, and an infrared (IR) reflecting layer comprising one of Ag and NiCr provided between the dielectri c layers. 15. The method of claim 15, further comprising removing at least part of the protective layer from the glass substrate after the heat treating but before the coupling of the glass substrate to the another substrate. 16. The method of claim 13, wherein the heat treating is part of a thermal tempering process in which the glass substrate is thermally tempered. 17. The method of claim 13, wherein the protective layer comprises amorphous silicon (a-Si). 18. The method of claim 13, wherein the protective layer comprises at least one carbide. 19. The method of claim 13, wherein the protective layer comprises at least one of: a-Si, silicon nitride, silicon oxide, silicon oxynitride, boron carbide, titanium carbide, hafnium carbide, titanium hafnium carbide, tantalum carbide, zirconium carbide, chromium, an alloy of nickel-chrome, an oxide of nickel-chrome, a nitride of nickel-chrome, titanium, and an oxide of titanium. 20. The method of claim 13, wherein the protective layer comprises at least one of: BC x (boron carbide) where x is from 0.75 to 1.5, TiC x (titanium carbide) where x is from 0.47 to 0.99, HfC x (hafnium carbide) where x is from 0.47 to 0.99, titanium hafnium carbide, TaC x (tantalum carbide) where x is from 0.47 to 0.99, and ZrC x (zirconium carbide) where x is from 0.47 to 0.99. 21. The method of claim 13, wherein the heat treating comprises heating the glass substrate with the layer comprising DLC and the protective layer thereon using at least temperature(s) of at least 550 degrees C. 22. The method of claim 13, wherein the heat treating comprises heating the glass substrate with the layer comprising DLC and the protective layer thereon using at least temperature(s) of at least 580 degrees C. 23. The method of claim 13, wherein the layer comprising DLC has a density of at least about 2.7 gm/cm 3 , and wherein the layer comprising DLC is hydrogenated. 24. The method of claim 13, wherein the layer comprising DLC comprises hydrogenated highly tetrahedral amorphous carbon (ta-C:H). 25. The method of claim 13, wherein the layer comprising DLC is formed on the glass substrate via an ion beam. 26. The method of claim 25, wherein the protective layer is at least partially formed on the glass substrate via sputtering. 27. The method of claim 13, wherein the protective layer comprises at least some Zr. 28. The method of claim 27, wherein the protective layer comprises a carbide of Zr. 29. The method of claim 13, wherein the layer comprising DLC comprises amorphous DLC and has more sp 3 carbon-carbon bonds than sp 2 carbon-carbon bonds. 30. The method of claim 29, wherein the layer comprising DLC has an average hardness of at least 10 GPa. 31. The method of claim 30, wherein the layer comprising DLC has an average hardness of at least 20 GPa.