초록 ▼

A leak control valve preventing the damage of the vacuum pump and/or the neighboring instruments even in the case of fluid leak at the vessel.The side wall of the valve poppet closes the channel to the outlet through restoring forces of the springs installed at both sides of the poppet in case when

A leak control valve preventing the damage of the vacuum pump and/or the neighboring instruments even in the case of fluid leak at the vessel.The side wall of the valve poppet closes the channel to the outlet through restoring forces of the springs installed at both sides of the poppet in case when the abrupt pressure change happens by accident.

대표청구항 ▼

1. A leak control valve, comprising:a valve chamber through which a fluid flows from an inlet connected to a vessel, and to an outlet connected to a vacuum pump;a blocking panel that moves in a floated manner between a first position and a second position, and further moves back and forth in respons

1. A leak control valve, comprising:a valve chamber through which a fluid flows from an inlet connected to a vessel, and to an outlet connected to a vacuum pump;a blocking panel that moves in a floated manner between a first position and a second position, and further moves back and forth in response to a pressure difference between the fluid flow from the inlet and pumping power of the vacuum pump;a seal O-ring functioning as a support of the blocking panel installed at the side wall of said blocking panel, and as a seal for blocking a leak;a sub-pumping unit, implemented in an inner wall of said valve chamber for bypassing said fluid flow from the inlet to the outlet;a first spring having a first end connected to a first side wall of said blocking panel and a second end connected to the outlet, exerting a restoring force at the blocking panel toward the direction to the inlet such that a channel to the outlet is open during a normal operation of vacuum pumping, while the channel to the outlet is closed by the side wall of said blocking panel when the pressure at the side of the inlet becomes high enough to overcome the restoring power due to the leak; anda second spring having a first end connected to a second side wall of said blocking panel and a second end connected to the inlet, exerting a restoring force at the blocking panel toward the direction to the outlet such that the channel to the outlet is open during the normal operation of vacuum pumping and said blocking panel moves back and forth between a first position and a second position in a floated manner,wherein said sub-pumping unit comprises a plurality of conductance tubes and has a U-shape for promoting storage of pressure for a rapid operation of the blocking panel. 2. A leak control valve, comprising:a valve chamber through which a fluid flows from an inlet connected to a vessel, and to an outlet connected to a vacuum pump;a valve poppet that moves in a floated manner between a first position and a second position, and further moves back and forth in response to a pressure difference between the fluid flow from the inlet and pumping power of the vacuum pump;a first spring having one end connected to a first side wall of said valve poppet and a second end connected to the outlet, exerting a restoring force at the valve poppet toward the direction to the inlet such that a channel to the outlet is open during a normal operation of vacuum pumping, while the channel to the outlet is closed by the first side wall of said valve poppet when the pressure at the side of the inlet becomes high enough to overcome the restoring power due to a leak;a second spring having a first end connected to a second side wall of said valve poppet and a second end connected to the inlet, exerting a restoring force at the valve poppet toward the direction to the outlet such that the channel to the outlet is open during the normal operation of vacuum pumping and said valve poppet moves back and forth between a first position and a second position in a floated manner anda sub-pumping unit, implemented in an inner wall of said valve chamber for bypassing said fluid flow from the inlet to the outlet, wherein said sub-pumping unit comprises a plurality of conductance tubes and has a U-shape for promoting storage of pressure for a rapid operation of the valve-poppet.