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Variable pressure regulated flow controllers

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G05D-007/00
출원번호 US-0429450 (2003-05-05)
발명자 / 주소
  • Thordarson, Petur
  • Lowery, Patrick A.
출원인 / 주소
  • FlowMatrix, Inc.
대리인 / 주소
    Gray Law Firm
인용정보 피인용 횟수 : 20  인용 특허 : 28

초록

The present invention is an intrinsically safe pneumatically actuated flow controller. A preferred embodiment for the flow controller has a housing assembly defining an inlet port, an outlet port, a pressure signal inlet port, and a main flow path extending between the inlet port and the outlet port

대표청구항

1. A flow controller comprising:a housing assembly defining an inlet port, an outlet port, a pressure signal inlet port, and a main flow path extending between the inlet port and the outlet port;a restriction member arranged in the main flow path;a first valve assembly arranged to control fluid flow

이 특허에 인용된 특허 (28)

  1. Day James L. (Victor NY), Air flow metering terminal and control system.
  2. Ollivier Louis A., Apparatus for delivering process gas for making semiconductors and method of using same.
  3. Hinkle Luke D. (Townsend MA), Apparatus for mass flow measurement of a gas.
  4. Forbes Gregory Russell, Apparatus to check calibration of mass flow controllers.
  5. Rikuta Sotokazu (24-7 ; 2-chome ; Koun-cho Maebasni-she ; Gunma-ken JPX 371), Automatic controlling valve for maintaining the rate of fluid flow at a constant value.
  6. Thordarson Petur (Seattle WA), Constant flow valve for low flow rates.
  7. Philbin Brian (150 E. Wagon Wheel Dr. Phoenix AZ 85020), Control apparatus and method for controlling fluid flows and pressures.
  8. Danre Jean (La Varenne St Hilaire FRX), Device for piloting a safety valve.
  9. Wilmer Michael E., Dynamic gas flow controller.
  10. Louis A. Ollivier, Flow control of process gas in semiconductor manufacturing.
  11. Wilson ; Francis P. ; Purcell ; John E., Flow controller-flow sensor assembly for gas chromatographs and the like.
  12. Bellows James C. (Maitland FL) Twerdochlib Michael (Oviedo FL), Flow measurement device.
  13. Balazy Richard D. ; Cowan Cathy L. ; Eisenmann Mark R. ; Frink Kenneth E. ; Kulha Edward, Fluid flow controlling.
  14. Fenimore David C. (Sierra Madre CA) McHenry Walter H. (Covina CA) Blumberg James L. (Sylmar CA), Gas flow controller.
  15. Thordarson Petur, High pressure regulated flow controller.
  16. Statler William O. (Scotia NY), High turndown mass flow control system for regulating gas flow to a variable pressure system.
  17. Shirato Kozo (Omiya JPX) Hiraizumi Kazuo (Narashino JPX) Kaneko Akio (Omiya JPX) Nagai Akihiko (Kawaguchi JPX), Liquid chromatograph with flow controller.
  18. Waldbusser Edwin, Mass flow controller having automatic pressure compensator.
  19. Shimomura Mitsuzo (Miyanohigashi JPX) Yamaguchi Masao (Miyanohigashi JPX), Mass flow controller with supplemental condition sensors.
  20. Lowery, Patrick A.; Thordarson, Petur; Laragione, Robert, Mass flow meter systems and methods.
  21. Lowery, Patrick A.; Thordarson, Petur; Laragione, Robert, Mass flow meter systems and methods.
  22. Lowery, Patrick A.; Thordarson, Petur; Laragione, Robert, Mass flow meter systems and methods.
  23. Locke Alan W. (Solihull GB2) Fitzpatrick Peter (Redditch GB2), Measurement of air mass flow into an internal combustion engine.
  24. Laragione Robert ; LeMay Dan B. ; Redemann Eric J. ; Upchurch Michael D., Method and apparatus for determining a rate of flow of gas by a rate of change of pressure.
  25. Hermann-Josef Conrads DE; Erwin Laurer DE; Jurgen Model DE, Pilot device for a safety valve.
  26. Jones Leon (15081 Moran St. Westminster CA 92683), Pressure regulator.
  27. Nishino Koji,JPX ; Ikeda Nobukazu,JPX ; Morimoto Akihiro,JPX ; Minami Yukio,JPX ; Kawada Koji,JPX ; Dohi Ryosuke,JPX ; Fukuda Hiroyuki,JPX, Pressure type flow rate control apparatus.
  28. Ginn LeRoy D. (15247 Laverne Ct. San Leandro CA 94579) Ginn LeRoyce S. (1749 Kappa Ave. San Leandro CA 94579) Schneider Karen B. (Berkeley CA), Variable gas volume flow measuring and control methods and apparatus.

이 특허를 인용한 특허 (20)

  1. Deng, David, Dual fuel heater with selector valve.
  2. Deng, David, Dual fuel heater with selector valve.
  3. Deng, David, Dual fuel heater with selector valve.
  4. Deng, David, Dual fuel heater with selector valve.
  5. Mudd, Daniel T.; Mudd, Patti J., Flow control system, method, and apparatus.
  6. Mudd, Daniel T.; Mudd, Patti J., Flow node to deliver process gas using a remote pressure measurement device.
  7. Sugata, Kazuhiro; Kato, Takashi, Flow rate control device.
  8. Igarashi, Hiroki, Fluid apparatus unit structure.
  9. Vrolijk, Enno Jan; Keber, Roland; Klink, Hans-Joachim, Gas control unit of modular design and modular gas control valve.
  10. Deng, David, Heating system.
  11. Deng, David, Heating system.
  12. Jorgensen, Alfred Douglas, High pressure actuator regulating valve.
  13. Askew, Andy R., High pressure transducer.
  14. Lee, Hyun Joon; Noh, Yong Gyu, Integrated pressure control actuator assembly of hydrogen supply system.
  15. Gotoh, Takao; Hayashi, Akifumi; Matsuoka, Tohru; Suzuki, Shigehiro; Furukawa, Yoshiyuki; Tanaka, Makoto, Mass flow rate control apparatus, its calibration method and semiconductor-producing apparatus.
  16. Deville, Chad; Deville, Wayne, Pipeline-waste-gas reducer apparatus.
  17. Deville, Chad; Deville, Wayne, Pipeline-waste-gas reduction method.
  18. Mudd, Daniel T.; Mudd, Patti J, Pressure based mass flow controller.
  19. Teliszczuk, Roman; Delaney, Francois, Pressure controller device.
  20. Brown,Edmund W., Tugger cart with tiltable platform.
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