IPC분류정보
국가/구분 |
United States(US) Patent
등록
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국제특허분류(IPC7판) |
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출원번호 |
US-0137195
(2002-05-02)
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발명자
/ 주소 |
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출원인 / 주소 |
- Micrometal Technologies, Inc.
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대리인 / 주소 |
Weingarten, Schurgin, Gagnebin & Lebovici LLP
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인용정보 |
피인용 횟수 :
8 인용 특허 :
18 |
초록
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A metallized substrate, such as used to make a resonant circuit tag with inductive and capacitive elements in series, has a thin inorganic or polymeric dielectric layer formed on a metal layer. The inorganic layer may be formed by anodizing a surface of the metal layer. The organic layer may be form
A metallized substrate, such as used to make a resonant circuit tag with inductive and capacitive elements in series, has a thin inorganic or polymeric dielectric layer formed on a metal layer. The inorganic layer may be formed by anodizing a surface of the metal layer. The organic layer may be formed by flexographic printing. In both cases, a via hole is formed through the dielectric layer. A second layer of very thin conductive metal is deposited on the dielectric layer and in the via hole. The substrate is subsequently patterned with an etch resist and then etched to form the inductor coil and the capacitor plates, which are interconnected via the metallized via hole.
대표청구항
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1. A method of making a metalized dielectric material, comprising:forming a dielectric layer no more than about 2.5 microns thick on a surface of a first flexible planar conductive layer having a thickness of at least 10 microns, the dielectric layer having an exposed surface facing away from the co
1. A method of making a metalized dielectric material, comprising:forming a dielectric layer no more than about 2.5 microns thick on a surface of a first flexible planar conductive layer having a thickness of at least 10 microns, the dielectric layer having an exposed surface facing away from the conductive layer; anddepositing conductive material on the exposed surface of the dielectric layer so as to form a second planar conductive layer. 2. A method according to claim 1, wherein the dielectric layer comprises an inorganic dielectric material. 3. A method according to claim 2, wherein forming the dielectric layer comprises anodizing the surface of the first conductive layer. 4. A method according to claim 3, further comprising:forming a dot of masking material on the surface of the first conductive layer prior to anodizing the surface thereof; andremoving the dot after anodizing the surface of the first conductive layer to create a via in the dielectric layer, the via providing for an electrical conduction path between the first conductive layer and the second conductive layer deposited on the dielectric layer. 5. A method according to claim 3, wherein the first conductive layer comprises aluminum. 6. A method according to claim 3, wherein the first conductive layer comprises aluminized copper foil. 7. A method according to claim 2, wherein the dielectric layer is formed by sputtering a metal in a reactive atmosphere to produce the inorganic dielectric material which is deposited on the first conductive layer during the sputtering process. 8. A method according to claim 7, wherein the metal comprises aluminum. 9. A method according to claim 8, further comprising forming at least one via hole in the sputter-deposited dielectric layer with a laser drill to form an electrically conductive path between the first conductive layer and the second conductive layer when the second conductive layer is deposited on the dielectric layer. 10. A method according to claim 2, wherein the inorganic dielectric material is selected from the group consisting of tantalum oxide, silica, zirconia, and multi-layer combinations of the aforesaid group. 11. A method according to claim 2, wherein the conductive material from which the second planar conductive layer is formed is selected from the group consisting of copper, aluminum, gold, nickel and tin. 12. A method according to claim 1, wherein forming a dielectric layer comprises depositing polymeric dielectric material on the first conductive layer. 13. A method according to claim 12, wherein depositing the polymeric dielectric material comprises applying the polymeric dielectric material using a flexographic printer. 14. A method according to claim 13, wherein the application of the polymeric dielectric material using a flexographic printer provides at least one via hole in the printed dielectric material such that an electrically conductive path is formed between the first conductive layer and the second conductive layer when the second conductive layer is deposited on the dielectric layer. 15. A method according to claim 12, wherein the polymeric dielectric material comprises polystyrene modified by a small amount of a flexibilizing agent. 16. A method according to claim 12, wherein depositing the conductive material comprises vacuum metallizing the exposed surface of the dielectric layer. 17. A method according to claim 16, wherein the conductive material comprises aluminum or copper. 18. A method according to claim 16, wherein the second planar conductive layer formed by the deposition of the conductive material is 1500-3000 Angstroms thick. 19. A method according to claim 12, wherein the first planar conductive layer comprises aluminum or copper foil. 20. A method according to claim 12, wherein depositing the polymeric dielectric material comprises extrusion coating the polymeric dielectric material. 21. A method according to claim 20, further comprising forming at least one via hole in the extrusion coating with a laser drill to form an electrically conductive path between the first conductive layer and the second conductive layer when the second conductive layer is deposited on the dielectric layer. 22. A method according to claim 12, wherein the polymeric dielectric material is selected from the group consisting of polystyrene, polyethylene, polypropylene, their co-copolymers, and a fluoropolymer. 23. A method according to claim 12, wherein depositing polymeric dielectric material on the conductive layer comprises depositing polymeric material of two different types such that the polymeric dielectric layer comprises at least two sub-layers of different polymeric materials. 24. A method according to claim 1, further comprising:printing etch resist on the first and second planar conductive layers of the metalized material to form respective circuit patterns thereon;exposing the etch-resist-printed metalized material to a first chemical etching of brief duration to completely remove selected areas of the second planar conductive layer not protected by etch resist, the first chemical etching resulting in the formation of first circuit elements on the second planar conductive layer without removing a substantial portion of the first planar conductive layer;applying a protective film to the etched planar conductive layer to encapsulate the first circuit elements;exposing the protectively encapsulated metalized material to a second chemical etching of substantially longer duration to completely remove selected areas of the first planar conductive layer not protected by etch resist, the second chemical etching resulting in the formation of second circuit elements on the planar first conductive layer; andapplying a protective support substrate to the etched planar substrate. 25. A method according to claim 24, wherein the protective support substrate comprises label stock paper. 26. A method according to claim 24, wherein the first circuit elements comprise a first capacitor plate, and wherein the second circuit elements comprise a second capacitor plate and a coil, the second capacitor plate being in registration with the first capacitor plate.
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