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A coupling or barrel connector is disclosed for interconnecting an anode leg of an anode assembly with an anode feedthru mounted on a processing chamber. One end of the barrel connector is threaded onto the anode feedthru. The opposite end of the barrel connector receives an end portion of an anode

A coupling or barrel connector is disclosed for interconnecting an anode leg of an anode assembly with an anode feedthru mounted on a processing chamber. One end of the barrel connector is threaded onto the anode feedthru. The opposite end of the barrel connector receives an end portion of an anode leg. A removable retention pin in effect locks the anode leg onto the barrel connector.

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1. A processing chamber, comprising:a chamber wall; a first anode feedthru mounted on said chamber wall; a first coupling threaded onto an end of said first anode feedthru and comprising a first retention pin hole; an anode assembly comprising a first anode leg, wherein said first anode leg comprise

1. A processing chamber, comprising:a chamber wall; a first anode feedthru mounted on said chamber wall; a first coupling threaded onto an end of said first anode feedthru and comprising a first retention pin hole; an anode assembly comprising a first anode leg, wherein said first anode leg comprises a first retention pin recess formed on an exterior surface of said first anode leg, wherein an end of said first anode leg is disposed within said first coupling; and a first retention pin disposed within said first retention pin hole in said first coupling and disposed within said first retention pin recess of said first anode leg. 2. A processing chamber, as claimed in claim 1, wherein:said first coupling comprises first and second ends, a first bore extending from said first end toward but not to said second end and comprising a first closed end within said first coupling, and a second bore extending from said second end toward but not to said first end and comprising a second closed end within said first coupling, wherein said first anode feedthru is disposed in said first bore and engages said first closed end, and wherein said first anode leg is disposed in said second bore and engages said second closed end. 3. A processing chamber, as claimed in claim 2, wherein:said first and second bores are axially aligned. 4. A processing chamber, as claimed in claim 2, wherein:an outer perimeter of at least a portion of said first anode leg that is disposed within said second bore matches a perimeter of at least a portion of an inner wall of said first coupling that defines said second bore. 5. A processing chamber, as claimed in claim 1, wherein:said first coupling comprises a bore that receives a portion of said first anode leg, wherein said first retention pin hole intersects with said bore. 6. A processing chamber, as claimed in claim 5, wherein:said first retention pin extends into said bore. 7. A processing chamber, as claimed in claim 1, wherein:said first coupling comprises a second retention pin hole, wherein said first retention pin comprises first and second retention pin legs disposed within said first and second retention pin holes, respectively, and disposed within said first retention pin recess at displaced locations. 8. A processing chamber, as claimed in claim 7, wherein:said first retention pin further comprises a cross member, wherein said first and second retention pin legs extend from displaced locations on said cross member, wherein said first retention pin is at least generally U-shaped. 9. A processing chamber, as claimed in claim 7, wherein:said first retention pin recess on said first anode leg is annular. 10. A processing chamber, as claimed in claim 7, wherein:said first and second retention pin legs engage opposite sides of said first anode leg. 11. A processing chamber, as claimed in claim 7, wherein:said first and second retention pin legs extend at least generally toward each other. 12. A processing chamber, as claimed in claim 7, wherein:said first and second retention pin legs are disposed in non-parallel relation. 13. A feed-through assembly, as claimed in claim 7, wherein:said first and second retention pin holes are disposed in non-parallel relation. 14. A processing chamber, as claimed in claim 1, wherein:said first coupling comprises first and second coupling ends, wherein first anode feedthru extends through said first coupling end, wherein said first anode leg extends through said second coupling end,wherein said second coupling end comprises a slot engageable by an installation tool to thread said first coupling onto said first anode feedthru when said first and with feedthru is mounted on said chamber wall. 15. A processing chamber, as claimed in claim 1, further comprising:first and third anode feedthrus mounted on said chamber wall, wherein said first, second, and third anode feedthrus are disposed on a common circle; a second coupling threaded onto said second anode feed-through and comprising a second retention pin hole, wherein said anode assembly further comprises a second anode leg, wherein said second anode leg comprises a second retention pin recess formed on an exterior surface of said second anode leg, and wherein an end of said second anode leg is disposed within said second coupling; a second retention pin disposed within said second retention pin hole in said second coupling and disposed within said second retention pin recess of said second anode leg; a third coupling threaded onto said third anode feed-through and comprising a third retention pin hole, wherein said anode assembly further comprises a third anode leg, wherein said third anode leg comprises a third retention pin recess formed on an exterior surface of said third anode leg, and wherein an end of said third anode leg is disposed within said third coupling; and a third retention pin disposed within said third retention pin hole in said third coupling and disposed within said third retention pin recess of said third anode leg. 16. A processing chamber, as claimed in claim 1, further comprising:a first filament feedthru mounted on said chamber wall; a second coupling threaded onto said first filament feedthru and comprising a second retention pin hole; a first filament post, wherein said first filament post comprises a second retention pin recess formed on an exterior surface of said filament post, wherein an end of said first filament post is disposed within said second coupling; a second retention pin disposed within said second retention pin hole in said second coupling and disposed within said second retention pin recess; a second filament feedthru mounted on said chamber wall; a third coupling threaded onto said second filament feedthru and comprising a third retention pin hole; a second filament post, wherein said second filament post comprises a third retention pin recess formed on an exterior surface of said second filament post, wherein an end of said second filament post is disposed within said third coupling; a third retention pin disposed within said third retention pin hole in said third feedthru and disposed within said third retention pin recess; and a filament extending between said first and second filament posts. 17. A processing chamber, comprising:a chamber wall; a first feedthru mounted on said chamber wall and extending through said chamber wall; a first coupling comprising first and second oppositely disposed ends, a first bore extending within said first coupling from said first end, a second bore extending within said first coupling from said second end, and a first retention pin hole extending from an exterior of said first coupling to said second bore, wherein said first bore is threaded, and wherein a portion of said first feedthru is disposed within said first bore; an electrode assembly comprising a first electrode leg, wherein said first electrode leg comprises a first retention pin recess formed on an exterior surface of said first electrode leg, and wherein a portion said first electrode leg is disposed within said second bore of said first coupling; and a first retention pin disposed within said first retention pin hole in said first coupling and disposed within said first retention pin recess of said first electrode leg. 18. A processing chamber feedthru assembly, comprising:a first feedthru comprising a first threaded section that terminates at a first end; and a first coupling comprising a first threaded bore that in turn comprises a first open end and a first closed end, wherein said first end of said first feedthru is directed through said first open end of said first threaded bore and engages said first closed end of said first threaded bore. 19. A feedthru assembly, as claimed in claim 18, wherein:said first coupling further comprises a second bore that comprises a second open end and a second closed end, wherein said first and second open ends of said first and second bores, respectively, are disposed on opposite ends of said first coupling. 20. A feedthru assembly, as claimed in claim 19, wherein:said second bore is unthreaded. 21. A feedthru assembly, as claimed in claim 20, wherein:said first threaded bore and said second bore are axially aligned. 22. A feedthru assembly, as claimed in claim 19, wherein:said first barrel connector comprises a first retention pin hole extending from an exterior surface of said first coupling to said second bore. 23. A feedthru assembly, as claimed in claim 19, wherein:said first coupling comprises a first retention pin hole extending from an exterior surface of said first barrel connector to said second bore and a second retention pin hole extending from an exterior surface of said first coupling to said second bore. 24. A feedthru assembly, as claimed in claim 23, wherein:said first and second retention pin holes are disposed on opposite sides of said second bore. 25.A feedthru assembly, as claimed in claim 23, wherein:said first and second retention pin holes are disposed in non-parallel relation. 26. A coupling, comprising:a body comprising first and second ends and an outer side wall extending from said first end to said second end; a first bore extending within said body and comprising a first open end and a first closed end, wherein said first open end of said first bore is disposed on said first end of said body, and wherein at least a portion of said first bore is threaded; a second bore extending within said body and comprising a second open end and a second closed end, wherein said second open end of said second bore is disposed on said second end of said body, wherein an entirety of said second bore is unthreaded; and a first retention pin hole extending from said outer side wall to said second bore. 27. A coupling, as claimed in claim 26, wherein:said first bore and said second bore are axially aligned. 28. A coupling, as claimed in claim 26, wherein:said first and second bores are not interconnected. 29. A coupling, as claimed in claim 26, further comprising:a partition disposed between said first and second bores, wherein said first and second bores are isolated from each other. 30. A coupling, as claimed in claim 26, further comprising:a second retention pin hole extending from said outer side wall to said second bore. 31. A coupling, as claimed in claim 30, wherein:said first and second retention pin holes are disposed on opposite sides of said second bore. 32. A coupling, as claimed in claim 30, wherein:said first and second retention pin holes are disposed in non-parallel relation. 33. A coupling, as claimed in claim 30, wherein:a reference plane extends between said first and second ends of said body and bisects said coupling into first and second halves, wherein said first and second retention pin holes are disposed on said first and second halves, and wherein said first and second retention pin holes are the mirror image of each other. 34. A method for maintaining an electrode assembly of a processing chamber, comprising the steps of:accessing an interior of said processing chamber; removing said electrode assembly from a first coupling, wherein said first coupling is mounted on a first electrode feedthru, wherein said first electrode feedthru is mounted to said processing chamber; and detaching said first coupling from said first electrode feedthru, and wherein said detaching step is executed while said first electrode feedthru remains mounted to said processing chamber. 35. A method, as claimed in claim 34, wherein:said removing step comprises removing a first retention pin from each of said first coupling and said first electrode assembly, and then sliding said electrode assembly out of said first coupling. 36. A method, as claimed in claim 34, wherein:said removing step comprises unlocking said electrode assembly from said first coupling and thereafter sliding said electrode assembly out of said first coupling. 37. A method, as claimed in claim 34, wherein:said detaching step comprises rotating said first coupling relative to said first electrode feedthru. 38. A method, as claimed in claim 34, wherein:said detaching step comprises threading said first coupling off of said first electrode feedthru. 39. A method of mounting an electrode assembly within a processing chamber, comprising the steps of:mounting a first electrode feedthru to said processing chamber; threading a first coupling onto said first electrode feedthru after said mounting step; disposing a portion of a first electrode assembly within said first coupling after said threading step; and locking said first electrode assembly to said first coupling after said disposing step. 40. A method, as claimed in claim 39, wherein:said locking step using a first retention pin. 41. A method, as claimed in claim 39, further comprising the steps of:running a first plasma process after said mounting, threading, disposing, and locking steps; accessing an interior of said processing chamber after said running step; removing said electrode assembly from said first coupling after said accessing step; and detaching said first coupling from said first electrode feedthru after said removing step, wherein said detaching step is executed while said first electrode feedthru remains mounted to said processing chamber. 42. A method, as claimed in claim 41, wherein:said removing step comprises removing a first retention pin from each of said coupling and said first electrode assembly, and then sliding said electrode assembly out of said first coupling. 43. A method, as claimed in claim 41, wherein:said removing step comprises unlocking said electrode assembly from said first coupling and thereafter sliding said electrode assembly out of said first coupling. 44. A method, as claimed in claim 41, wherein:said detaching step comprises rotating said first coupling relative to said first electrode feedthru. 45. A method, as claimed in claim 41, wherein:said detaching step comprises threading said first coupling off of said first electrode feedthru.