초록 ▼

The present invention relates to a process for depositing a calcium getter thin film inside a system operating under vacuum. The process comprises the steps of introducing into the system under vacuum at least one evaporable getter device with an air-stable calcium compound. The system is evacuated

The present invention relates to a process for depositing a calcium getter thin film inside a system operating under vacuum. The process comprises the steps of introducing into the system under vacuum at least one evaporable getter device with an air-stable calcium compound. The system is evacuated until a pressure value P1 is reached. The system is then heated up to the calcium evaporation temperature of the stable compound. The system evacuation continues until a pressure value P2, which is lower than P1, is reached and the system is sealed. In a preferred embodiment, the heating step separates the two evacuation steps.

대표청구항 ▼

1. A method for depositing a calcium getter thin film, comprising:introducing into a system, a getter device containing an air-stable calcium metal-alloy compound, evacuating said system until a first pressure value is reached wherein said first pressure value is between about 10?4 and 10?5 hPa; hea

1. A method for depositing a calcium getter thin film, comprising:introducing into a system, a getter device containing an air-stable calcium metal-alloy compound, evacuating said system until a first pressure value is reached wherein said first pressure value is between about 10?4 and 10?5 hPa; heating the evaporable getter device in said system to a temperature at which calcium is displaced from said stable calcium-metal alloy compound; evacuating said system until a second pressure value is reached, said second pressure value being lower than said first pressure value; and sealing said system after said second pressure value is reached. 2. The method as recited in claim 1, wherein said evacuation step includes two separate substeps: a first substep until said first pressure value is reached and a second substep until said second pressure value is reached, said two evacuation substeps being separated by said heating step.3. The method as recited in claim 2, wherein said system is isolated from vacuum pumping before said heating step is performed.4. The process recited in claim 2, wherein said stable calcium-alloy compound is CaAl2 or a ternary alloy Ca?Ba?Al containing between 53% and 56.8% by weight of aluminum, between 36% and 41.7% by weight of calcium and between 1.5% and 11% by weight of barium.5. A process according to claim 4, wherein said stable calcium-alloy compound is in mixture with nickel or titanium.6. The process recited in claim 1, wherein said stable calcium-alloy compound is CaAl2 or a ternary alloy Ca?Ba?Al containing between 53% and 56.8% by weight of aluminum, between 36% and 41.7% by weight of calcium and between 1.5% and 11% by weight of barium.7. The process according to claim 6, wherein said stable calcium-alloy compound is in mixture with nickel or titanium.8. The process recited in claim 1, wherein said system is a CRT.