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MEMS optical switch with thermal actuator 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G02B-006/35
출원번호 US-0401951 (2003-03-31)
발명자 / 주소
  • Cochran, Kevin
출원인 / 주소
  • The United States of America as represented by the Secretary of the Navy
인용정보 피인용 횟수 : 34  인용 특허 : 5

초록

A MEMS type optical switch includes a substrate, the substrate including at least one groove formed therein; first and second optical fibers disposed in the at least one groove, the at least one groove including a widened portion for movement of at least one of the first and second optical fibers; a

대표청구항

1. A MEMS type optical switch, comprising:a substrate, the substrate including at least one groove formed therein; first and second optical fibers disposed in the at least one groove, the at least one groove including a widened portion for movement of at least one of the first and second optical fib

이 특허에 인용된 특허 (5)

  1. James G. Couillard, MEMS optical switch and method of manufacture.
  2. Markus Duelli ; Donald M. Friedrich ; Bryant P. Hichwa, Method of actuating MEMS switches.
  3. Dautartas Mindaugas F. (Alburtis PA) Degani Yinon (Highland Park NJ) Kraetsch Richard T. (Berkeley Heights NJ) Pimpinella Richard J. (Hampton NJ) Tai King L. (Berkeley Heights NJ), Movable fiber optical switch.
  4. Lee Jerald D. (Mendenhall PA), Optical fiber switch.
  5. Field Leslie A. (Portola Valley CA) Ruby Richard C. (Menlo Park CA), Thermally actuated optical fiber switch.

이 특허를 인용한 특허 (34)

  1. He, Yi; Yin, Luzhong; Zhong, Guixiong; Yan, Jun; Zhao, Jing, Compact thermal actuated variable optical attenuator.
  2. Garcia, Ernest J.; Polosky, Marc A., Latching micro optical switch.
  3. Elliott, Robert Faye; Reiner, Philip John, Lateral-moving micromachined thermal bimorph and method for fabricating same.
  4. Yin, Luzhong; Zhong, Guixiong; Shou, Yuanxin; Ghosh, Amit; Yan, Jun; Zhao, Jing, MEMS bistable optical switch and methods for use thereof.
  5. Deeds, Michael A.; Herman, David, MEMS type flow actuated out-of-plane flap.
  6. Linn, Eric H.; Deeds, Michael A.; Herman, David, MEMS type thermally actuated out-of-plane lever.
  7. Garcia, Ernest J.; Fulcher, Clay W. G., Microelectromechanical (MEM) thermal actuator.
  8. Aoki, Tsuyoshi; Aoki, Shigenori; Muranaka, Hidenobu, Optical connector and electronic equipment using the same.
  9. Yang,Fuqian; Kubby,Joel A.; Tran,Alex T.; Ma,Jun, Optical shuttle system and method used in an optical switch.
  10. Herman, David; Deeds, Michael, Out-of-plane deflection MEMS actuator for projectile control surfaces.
  11. Cochran, Kevin; Jean, Daniel; Chen, Ezra, Racheting micromotor using bi-directional actuator.
  12. Jenkins,Arthur Anthony; Kranz,Michael Scott; Williams,Marty Ray, Resettable latching MEMS temperature sensor apparatus and method.
  13. Nodianos, Kristopher; Blachek, Laura; Nguyen, Khoa; Oyelowo, Adedayo; Tran, Tan; Sanford, Bernice; Cochran, Kevin, Self-regulating power supply for micro electronic mechanical systems thermal actuators.
  14. Boyden, Edward S.; Dacey, Jr., Ralph G.; Della Rocca, Gregory J.; Dowling, Joshua L.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Santiago, Paul; Smith, Michael A.; Stewart, Todd J.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., System, devices, and methods including actively-controllable sterilizing excitation delivery implants.
  15. Boyden, Edward S.; Dacey, Jr., Ralph G.; Della Rocca, Gregory J.; Dowling, Joshua L.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Santiago, Paul; Smith, Michael A.; Stewart, Todd J.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., System, devices, and methods including actively-controllable superoxide water generating systems.
  16. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., System, devices, and methods including catheters configured to monitor and inhibit biofilm formation.
  17. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including catheters configured to monitor biofilm formation having biofilm spectral information configured as a data structure.
  18. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including catheters having acoustically actuatable waveguide components for delivering a sterilizing stimulus to a region proximate a surface of the catheter.
  19. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including catheters having an actively controllable therapeutic agent delivery component.
  20. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including catheters having components that are actively controllable between transmissive and reflective states.
  21. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including catheters having components that are actively controllable between two or more wettability states.
  22. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including catheters having self-cleaning surfaces.
  23. Boyden, Edward S.; Diaz, Roy P.; Hyde, Roderick A.; Kare, Jordin T.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L., Systems, devices, and methods including implantable devices with anti-microbial properties.
  24. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including infection-fighting and monitoring shunts.
  25. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including infection-fighting and monitoring shunts.
  26. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including infection-fighting and monitoring shunts.
  27. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including infection-fighting and monitoring shunts.
  28. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including infection-fighting and monitoring shunts.
  29. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including infection-fighting and monitoring shunts.
  30. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including infection-fighting and monitoring shunts.
  31. Dacey, Jr., Ralph G.; Hyde, Roderick A.; Ishikawa, Muriel Y.; Kare, Jordin T.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Rivet, Dennis J.; Smith, Michael A.; Sweeney, Elizabeth A.; Tegreene, Clarence T.; Wood, Jr., Lowell L.; Wood, Victoria Y. H., Systems, devices, and methods including infection-fighting and monitoring shunts.
  32. Kubby,Joel A.; Ma,Jun; German,Kristine A.; Gulvin,Peter M.; Lin,Pinyen, Thermal actuator and an optical waveguide switch including the same.
  33. Ma,Jun; Kubby,Joel A.; German,Kristine A.; Gulvin,Peter M.; Lin,Pinyen, Thermal actuator and an optical waveguide switch including the same.
  34. Ma,Jun; Kubby,Joel A.; German,Kristine A.; Gulvin,Peter M.; Lin,Pinyen, Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same.
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