초록 ▼

This invention is to provide an apparatus for separating a substrate having a porous layer at the porous layer. A bonded substrate stack (101) having a porous layer (101b) is supported by substrate holding portions (120, 150) while being rotated. High-speed, high-pressure water (jet) is ejected from

This invention is to provide an apparatus for separating a substrate having a porous layer at the porous layer. A bonded substrate stack (101) having a porous layer (101b) is supported by substrate holding portions (120, 150) while being rotated. High-speed, high-pressure water (jet) is ejected from a nozzle (102), so the jet is injected into the bonded substrate stack (101). The substrate holding portions (120, 150) hold the bonded substrate stack (101) such that the bonded substrate stack (101) can expand at its central portion due to the pressure of the injected water. This efficiently applies a force (separation force) that acts outward from the inside of the bonded substrate stack (101).

대표청구항 ▼

1. A separating apparatus for separating a plate shaped sample, comprising:a jet unit for ejecting a fluid for separating the sample to the sample; and first and second holding portions for sandwiching and holding the sample, wherein said first and second holding portions have holding surfaces with

1. A separating apparatus for separating a plate shaped sample, comprising:a jet unit for ejecting a fluid for separating the sample to the sample; and first and second holding portions for sandwiching and holding the sample, wherein said first and second holding portions have holding surfaces with different shapes. 2. The apparatus according to claim 1, wherein said first holding portion holds one surface of the sample to make a deflection amount of the one surface due to a pressure of the fluid injected into the sample relatively small, and said second holding portion holds the other surface of the sample to make a deflection amount of the other surface due to the pressure of the fluid relatively large.3. The apparatus according to claim 1, wherein said first holding portion holds one surface of the sample not to cause the one surface to deflect due to a pressure of the fluid injected into the sample, and said second holding portion holds the other surface of the sample to cause the other surface to deflect due to the pressure of the fluid.4. The apparatus according to claim 1, wherein the holding surface of said first holding portion and the holding surface of said second holding portion have different areas.5. The apparatus according to claim 1, wherein said first holding portion has a holding surface for wholly holding one surface of the sample, and said second holding portion has a holding surface for partially holding the other surface of the sample.6. The apparatus according to claim 1, wherein the holding surface of said first holding portion comprises a flat surface.7. The apparatus according to claim 1, wherein the holding surface of said first holding portion comprises a curved surface.8. The apparatus according to claim 1, wherein the holding surface of said second holding portion is annular.9. The apparatus according to claim 1, wherein said second holding portion has a plurality of projecting members, and the sample is held by tips of said plurality of projecting members.10. The apparatus according to claim 1, wherein said second holding portion has a shape allowing the sample to deflect while expanding at a central portion on a side of said second holding portion due to the pressure of the fluid injected into the sample.11. The apparatus according to claim 1, wherein said second holding portion has a shape allowing the sample to deflect and corrugate on a side of said second holding portion due to the pressure of the fluid injected into the sample.12. The apparatus according to claim 1, further comprising a rotary mechanism for rotating at least one of said first and second holding portions about a shaft perpendicular to the holding surface to rotate the sample.13. The apparatus according to claim 1, wherein the sample to be processed comprises a substrate formed by bonding first and second substrates, and the first and second substrates have different strengths.14. A separating method of separating a plate shaped sample comprising holding the sample by sandwiching the sample by a pair of holding portions having holding surfaces with different shapes, and ejecting a fluid to a predetermined position in a direction of thickness of the sample, thereby separating the sample.15. The method according to claim 14, wherein the sample to be separated has an internal fragile layer, and in separating the sample, the fluid is ejected to the fragile layer.16. The method according to claim 14, further comprising rotating the sample about a shaft perpendicular to a major surface of the sample in separating the sample by the fluid.17. The method according to claim 14, wherein the sample to be processed comprises a sample formed by bonding first and second substrates, and the first and second substrates have different strengths.18. A substrate manufacturing method comprising the step of:bonding a non-porous layer side of a first substrate, in which a porous layer and the non-porous layer are sequentially formed on one surface, to a second substrate; and separating the bonded substrates at the porous layer, wherein said separating apparatus of claim 1, is used in the separation step. 19. A substrate manufacturing method comprising:bonding a non-porous layer side of a first substrate, in which a porous layer and the non-porous layer are sequentially formed on one surface, to a second substrate; and separating the bonded substrates at the porous layer, wherein the separation step is executed using the method of claim 14.