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A piezoelectrically driven fluid pump includes a chamber having two opposite sidewalls formed by flexible membranes, and an inlet and an outlet each regulated by a valve. Separate piezo elements are fixed to each of the membranes, to flex the membranes and increase or reduce the chamber volume and t

A piezoelectrically driven fluid pump includes a chamber having two opposite sidewalls formed by flexible membranes, and an inlet and an outlet each regulated by a valve. Separate piezo elements are fixed to each of the membranes, to flex the membranes and increase or reduce the chamber volume and thereby draw fluid into the chamber or expel fluid from the chamber. The valves are each formed by two adjacent piezo elements that are supported or flexibly joined together at two opposite ends. When actuated, the valve piezo elements flex outward between the two opposite ends, opening the valve to form an aperture between the two piezo elements. In another embodiment, a fluid pump includes a chamber having one flexible membrane sidewall. A valve-regulated inlet or outlet aperture through the membrane communicates with the pump chamber. A ring-shaped piezo centered around the aperture, on the membrane, flexes the membrane.

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1. A fluid pump, comprising:a fluid reservoir; a first membrane forming a first side of the reservoir; a first piezoelectric element attached to the first membrane; a fluid inlet into the reservoir; a fluid outlet from the reservoir; a first piezoelectric valve arranged to regulate fluid flow throug

1. A fluid pump, comprising:a fluid reservoir; a first membrane forming a first side of the reservoir; a first piezoelectric element attached to the first membrane; a fluid inlet into the reservoir; a fluid outlet from the reservoir; a first piezoelectric valve arranged to regulate fluid flow through the fluid inlet; and a second piezoelectric valve arranged to regulate fluid flow through the fluid outlet; wherein each of the first and second piezoelectric valves comprises two adjacent piezoelectric valve elements that are supported at first and second opposite ends and wherein opposing inner surfaces of the two adjacent piezoelectric valve elements are in continuous contact with each other from the first opposite end to the second opposite end when the piezoelectric valve is closed. 2. The fluid pump of claim 1, wherein the two adjacent piezoelectric valve elements are supported by a first support element at the first end and a second support element at the second end.3. The fluid pump of claim 2, wherein each of the two adjacent piezoelectric valve elements is a bimorph piezoelectric element.4. The fluid pump of claim 2, wherein the first and second opposite ends of the two adjacent piezoelectric valve elements are jointly supported by the first and second support elements.5. The fluid pump of claim 2, wherein when actuated, the two adjacent piezoelectric valve elements flex away from each other between the first and second opposite ends.6. The fluid pump of claim 2, wherein when actuated, the two adjacent piezoelectric valve elements flex toward each other between the first and second opposite ends.7. The fluid pump of claim 2, wherein the first and second support elements restrict movement of the first and second opposite ends of the two adjacent piezoelectric valve elements.8. The fluid pump of claim 7, wherein when the two adjacent piezoelectric valve elements are flexed away from each other between the first and second opposite ends, the valve is open; and when the two adjacent piezoelectric valve elements are flexed toward each other between the first and second opposite ends, the valve is closed.9. The fluid pump of claim 1, comprising at least two separate piezoelectric elements attached to the first membrane.10. The fluid pump of claim 9, wherein when actuated with a first voltage polarity, the at least two separate piezoelectric elements flex the first membrane toward a center of the fluid reservoir.11. The fluid pump of claim 10, wherein when actuated with a second voltage polarity, the at least two separate piezoelectric elements flex the first membrane away from a center of the fluid reservoir.12. The fluid pump of claim 9, comprising:a second membrane forming a second side of the reservoir; and at least two separate piezoelectric elements attached to the second membrane. 13. The fluid pump of claim 12, wherein when actuated, the at least two separate piezoelectric elements attached to the second membrane flex the second membrane toward a center of the fluid reservoir.14. The fluid pump of claim 12, wherein when actuated, the at least two separate piezoelectric elements attached to the second membrane flex the second membrane away from a center of the fluid reservoir.15. A fluid pump, comprising:a fluid reservoir; a first membrane forming a first side of the reservoir; a first piezoelectric element attached to the first membrane; a fluid inlet into the reservoir; a fluid outlet from the reservoir; a first piezoelectric valve arranged to regulate fluid flow through the fluid inlet; and a second piezoelectric valve arranged to regulate fluid flow through the fluid outlet; wherein each of the first and second piezoelectric valves comprises two adjacent piezoelectric valve elements that are supported at first and second opposite ends, and wherein the fluid outlet forms a passage through the first membrane. 16. The fluid pump of claim 15, wherein the second piezoelectric valve is arranged on the first membrane.17. A fluid pump, comprising:a fluid reservoir; a first membrane forming a first side of the reservoir; a first piezoelectric element attached to the first membrane; a fluid inlet into the reservoir; a fluid outlet from the reservoir; a first piezoelectric valve arranged to regulate fluid flow through the fluid inlet; and a second piezoelectric valve arranged to regulate fluid flow through the fluid outlet; wherein the first and second piezoelectric valves each comprise two adjacent piezoelectric valve elements that are supported at first and second opposite ends, and wherein the first piezoelectric element has a ring shape. 18. The fluid pump of claim 1, further comprising a second piezoelectric element attached to the first membrane, wherein the first and second piezoelectric elements are separate.19. A piezoelectric valve arranged to regulate fluid flow through the valve, comprising:two adjacent piezoelectric elements that are supported at first and second opposite ends, wherein opposing inner surfaces of the two adjacent piezoelectric valve elements are in continuous contact from the first opposite end to the second opposite end when the piezoelectric valve is closed. 20. The piezoelectric valve of claim 19, wherein the two adjacent piezoelectric elements are supported by a first support element at the first end and a second support element at the second end.21. The piezoelectric valve of claim 20, wherein each of the two adjacent piezoelectric elements is a bimorph piezoelectric element.22. The piezoelectric valve of claim 20, wherein the first and second opposite ends of the two adjacent piezoelectric elements are jointly supported by the first and second support elements.23. The piezoelectric valve of claim 20, wherein when actuated, the two adjacent piezoelectric elements flex away from each other between the first and second opposite ends.24. The piezoelectric valve of claim 20, wherein when actuated, the two adjacent piezoelectric elements flex toward each other between the first and second opposite ends.25. The piezoelectric valve of claim 20, wherein the first and second support elements restrict movement of the first and second opposite ends of the two adjacent piezoelectric elements.26. The piezoelectric valve of claim 25, wherein when the two adjacent piezoelectric elements are flexed away from each other between the first and second opposite ends, the valve is open; and when the two adjacent piezoelectric are flexed toward each other between the first and second opposite ends, the valve is closed.27. The piezoelectric valve of claim 1, wherein the opposing inner surfaces of the two adjacent piezoelectric elements comprise membranes that seal the valve when the valve is in the closed position.28. The piezoelectric valve of claim 19, wherein the opposing inner surfaces of the two adjacent piezoelectric elements comprise membranes that seal the valve when the valve is in the closed position.