An exemplary device and method for microfluidic transport is disclosed as providing inter alia a passive check valve (100), a fluid inlet channel (210), a fluid outlet channel (220) and a pumping cavity (240). The fluid inlet channel (210) is generally configured to flow a fluid through the check va
An exemplary device and method for microfluidic transport is disclosed as providing inter alia a passive check valve (100), a fluid inlet channel (210), a fluid outlet channel (220) and a pumping cavity (240). The fluid inlet channel (210) is generally configured to flow a fluid through the check valve (100). The check valve (100) generally provides substantially passive means for preventing or otherwise decreasing the incidence of purged outlet fluid re-entering either the pumping cavity (240) or the fluid inlet channel (210). Accordingly, the reduction of backflow generally tends to enhance overall pumping performance and efficiency. Disclosed features and specifications may be variously controlled, adapted or otherwise optionally modified to improve micropump operation in any microfluidic application. Exemplary embodiments of the present invention representatively provide for substantially self-priming micropumps that may be readily integrated with, for example, existing portable ceramic technologies for the improvement of device package form factors, weights and other manufacturing and/or device performance metrics.
대표청구항▼
1. A microfluidic pumping system, comprising:a plurality of ceramic substrate layers comprised of green sheets formed of a ceramic material dispersed in an organic binder; a pumping cavity, a fluid inlet channel, a fluid outlet channel, and at least one of a pump actuator and a piezoelectric actuato
1. A microfluidic pumping system, comprising:a plurality of ceramic substrate layers comprised of green sheets formed of a ceramic material dispersed in an organic binder; a pumping cavity, a fluid inlet channel, a fluid outlet channel, and at least one of a pump actuator and a piezoelectric actuator formed in the plurality of ceramic substrate layers; and a passive check valve placed in fluidic communication with the fluid inlet channel and the fluid outlet channel, the passive check valve comprising a valve housing, including an inlet opening and an outlet opening, said inlet opening suitably adapted to receive inlet fluid for transport through said valve housing, said valve housing effectively confining transport of inlet fluid from said inlet opening to said outlet opening where outlet fluid is purged, said outlet opening comprising passive means for substantially restricting backflow of purged outlet fluid back into the valve housing and a means for retaining the passive check valve within the plurality of ceramic substrate layers. 2. The microfluidic pumping system of claim 1, wherein said means for restricting the backflow of purged outlet fluid comprises:means for effectively dilating said outlet opening when the direction of fluid pressure tends to flow fluid in a direction away from said inlet opening through said valve housing toward said outlet opening; and means for effectively constricting said outlet opening when the direction of fluid pressure tends to flow fluid in a direction away from said outlet opening through said valve housing toward said inlet opening. 3. The microfluidic pumping system of claim 1, wherein said means for restricting the backflow of purged outlet fluid comprises a duck-bill valve.4. The microfluidic pumping system of claim 1, wherein said retaining means comprises a substantially annular retaining ring.5. The microfluidic pumping system of claim 1, further comprising an substantially flexible umbrella flap distally located from said outlet opening and annularly peripheral to said inlet opening.6. The microfluidic pumping system of claim 1, wherein said pump actuator comprises at least one of a unimorphic piezoelectric element and a bimorphic piezoelectric element.7. The microfluidic pumping system of claim 1, further comprising a plurality of microfluidic pumps in fluidic communication with each other.8. The microfluidic pumping system of claim 7, wherein said fluidic communication of said microfluidic pumps comprises at least one of a series configuration and a parallel configuration.9. A method of fabricating a multilayer micropump device comprising:providing a plurality of ceramic substrate layers comprised of green sheets formed of a ceramic material dispersed in an organic binder; forming into said plurality of ceramic substrate layers a channel and a cavity, said channel and said cavity in microfluidic communication to define a fluid channel and a pumping cavity; placing within said fluid channel a passive check valve comprising: a valve housing, including an inlet opening and an outlet opening; said inlet opening suitably adapted to receive inlet fluid for transport through said valve housing; said valve housing effectively confining transport of inlet fluid from said inlet opening to said outlet opening where outlet fluid is purged; said outlet opening comprising passive means for substantially restricting backflow of purged outlet fluid back into the valve housing; and a means for retaining the passive check valve within a microfluidic channel; and laminating each of the plurality of ceramic substrate layers to form a substantially monolithic micropump device. 10. The method of claim 9, wherein the step of forming said channel and said cavity in said plurality of ceramic layers comprises at feast one of mechanically punching and laser drilling into each ceramic layer.11. The method of claim 10, further comprising the step of sintering said ceramic layers to form said monolithic package.12. The method of claim 11, further comprising the step of providing a pumping actuator element on a surface of said monolithic package, said pumping actuator suitably adapted to exert a pumping force as a result of application of a voltage to the monolithic micropump package.13. The method claim 11, further comprising the step of providing a pumping actuator element embedded in said monolithic package, said pumping actuator suitably adapted to exert a pumping force as a result of application of a voltage to the monolithic micropump package.
Cherukuri Satyam C. ; Ladd Judith Ann ; McBride Sterling E. ; York Pamela K., Final print medium having target regions corresponding to the nozzle of print array.
Tani Michihiko,JPX ; Masaki Yasufumi,JPX, Method of measuring a pressure of a pressurized fluid fed through a diaphragm pump and accumulated in a vessel, and miniature pump system effecting the measurement.
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