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특허 상세정보

Bio electron microscope and observation method of specimen

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) H01J-049/44   
미국특허분류(USC) 250/311; 250/305
출원번호 US-0621444 (2003-07-18)
우선권정보 JP-0002724 (2003-01-09)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Antonelli, Terry, Stout &
인용정보 피인용 횟수 : 51  인용 특허 : 3
초록

A bio electron microscope and an observation method which can observe a bio specimen by low damage and high contrast to perform high-accuracy image analysis, and conduct high-throughput specimen preparation. 1) A specimen is observed at an accelerating voltage 1.2 to 4.2 times a critical electron accelerating voltage possible to transmit a specimen obtained under predetermined conditions. 2) An electron energy filter of small and simplified construction is provided between the specimen and an electron detector for imaging by the electron beam in a specif...

대표
청구항

1. A bio electron microscope wherein in an electron microscope having an electron illumination system converging or collimating an accelerated elctron beam to irradiate it onto a specimen and an imaging system detecting an electron transmitting the specimen or a secondary electron and a reflected electron emitted from the surface of the specimen to obtain a magnified image, an electron energy filter is provided between an electron detector of the imaging system which detects an electron beam transmitting the specimen and the specimen, and wherein in an i...

이 특허를 인용한 특허 피인용횟수: 51

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