IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0418067
(2003-04-18)
|
우선권정보 |
JP-0116582 (2002-04-18) |
발명자
/ 주소 |
|
출원인 / 주소 |
|
인용정보 |
피인용 횟수 :
6 인용 특허 :
6 |
초록
▼
A chamber port to which a vacuum chamber is connected and a pump port to which a vacuum pump is connected are formed on a valve body of a vacuum regulating valve. A valve plug includes a plate and a nose which is connected to the plate by screw members, and closes the chamber port by a pressure flui
A chamber port to which a vacuum chamber is connected and a pump port to which a vacuum pump is connected are formed on a valve body of a vacuum regulating valve. A valve plug includes a plate and a nose which is connected to the plate by screw members, and closes the chamber port by a pressure fluid. The maximum outer diameter of the nose is smaller than the inner circumferential diameter of the chamber port. The nose is detached through the chamber port.
대표청구항
▼
1. A vacuum regulating valve comprising:a valve body which has a first port and a second port connected to an upstream side and a downstream side of a fluid passage, respectively, and which has a communication passage between said first port and said second port; a valve plug which opens/closes said
1. A vacuum regulating valve comprising:a valve body which has a first port and a second port connected to an upstream side and a downstream side of a fluid passage, respectively, and which has a communication passage between said first port and said second port; a valve plug which opens/closes said communication passage by being displaced in an axial direction of said valve body by a pressure fluid; and a nose provided on said valve plug and having a circumferential surface facing an inner wall surface of said first port, wherein said nose has an outer circumferential diameter which is smaller than an inner circumferential diameter of said inner wall surface, so that said nose is detachable from said valve plug through said first port connected to a vacuum chamber, and wherein said circumferential surface of said nose is provided with a straight section and a plurality of tapered sections having diameters gradually reduced in a displacement direction in which said valve plug is seated on a valve seat. 2. The vacuum regulating valve according to claim 1, wherein said nose has an engaging projection protruding by a predetermined length formed on an end surface facing a plate of said valve plug, said plate being connected to a shaft, wherein an engaging groove recessed by a predetermined depth is formed on an end surface of said plate facing said engaging projection.3. The vacuum regulating valve according to claim 2, wherein said engaging projection is positioned by being engaged with said engaging groove when said nose is connected to said plate.4. The vacuum regulating valve according to claim 1, wherein said plurality of tapered sections includes a first tapered section adjacent to said straight section, a second tapered section adjacent to said first tapered section, and a third tapered section adjacent to said second tapered section.5. The vacuum regulating valve according to claim 4, wherein said second tapered section has an angle of inclination which is larger than an angle of inclination of said first tapered section, and which is smaller than an angle of inclination of said third tapered section (C<D<E).6. The vacuum regulating valve according to claim 1, wherein a distance between said circumferential surface of said nose and said inner wall surface of said first port is increased stepwise while said valve plug is displaced from a position in a valve-closed state to a position in a valve-opening state.7. The vacuum regulating valve according to claim 1, wherein an annular recess is formed on said inner wall surface and is expanded radially outwardly, and said straight section is formed at a position facing said annular recess when said valve plug is seated on a valve seat.8. The vacuum regulating valve according to claim 4, wherein an annular recess is formed on said inner wall surface and is expanded radially outwardly, and clearances between said annular recess and said first tapered section, said second tapered section, and said third tapered section, respectively, are enlarged stepwise.9. A vacuum regulating valve comprising:a valve body which has a first port and a second port connected to an upstream side and a downstream side of a fluid passage, respectively, and which has a communication passage between said first port and said second port; a valve plug which opens/closes said communication passage by being displaced in an axial direction of said valve body by a pressure fluid; and a nose provided on said valve plug and having a circumferential surface facing an inner wall surface of said first port, wherein said nose has an outer circumferential diameter which is smaller than an inner circumferential diameter of said inner wall surface, so that said nose is detachable from said valve plug through said first port connected to a vacuum chamber, wherein a distance between said circumferential surface of said nose and said inner wall surface of said first port is increased stepwise while said valve plug is displaced from a position in a valve-closed state to a position in a valve-opening state. 10. The vacuum regulating valve according to claim a, wherein said nose has an engaging projection protruding by a predetermined length formed on an end surface facing a plate of said valve plug, said plate being connected to a shaft, wherein an engaging groove recessed by a predetermined depth is formed on an end surface of said plate facing said engaging projection.11. The vacuum regulating valve according to claim 10, wherein said engaging projection is positioned by being engaged with said engaging groove when said nose is connected to said plate.12. The vacuum regulating valve according to claim 9, wherein said circumferential surface of said nose is provided with a straight section and a plurality of tapered sections having diameters gradually reduced in a displacement direction in which said valve plug is seated on a valve seat.13. The vacuum regulating valve according to claim 12, wherein said plurality of tapered sections includes a first tapered section adjacent to said straight section, a second tapered section adjacent to said first tapered section, and a third tapered section adjacent to said second tapered section.14. The vacuum regulating valve according to claim 13, wherein said second tapered section has an angle of inclination which is larger than an angle of inclination or said first tapered section, and which is smaller than an angle of inclination of said third tapered section (C<D<E).15. The vacuum regulating valve according to claim 12, wherein an annular recess is formed on said inner wall surface and is expanded radially outwardly, and said straight section is formed at a position facing said annular recess when said valve plug is seated on a valve seat.16. The vacuum regulating valve according to claim 13, wherein an annular recess is formed on said inner wall surface and is expanded radially outwardly, and clearances between said annular recess and said first tapered section, said second tapered section, and said third tapered section, respectively, are enlarged stepwise.
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