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Method of laser milling using constant tool path algorithm 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B23K-026/02
출원번호 US-0266934 (2002-10-08)
발명자 / 주소
  • Cheng, Chen-Hsiung
  • Liu, Xinbing
출원인 / 주소
  • Matsushita Electric Industrial Co., Ltd.
대리인 / 주소
    Harness, Dickey &
인용정보 피인용 횟수 : 38  인용 특허 : 6

초록

A method of creating a milled structure in a fixed material using a moving laser beam is disclosed, where a picosecond laser provides short pulses of light energy to produce required exposure steps, where a variable rate of laser beam movement conducts the milling upon the material, where the laser

대표청구항

1. A method of performing laser milling comprising:determining a tool path for ablating a layer of material from an exposed surface of a workpiece with a laser; and ablating a layer of material from an exposed surface of the workpiece with a laser according to the tool path, wherein the tool path de

이 특허에 인용된 특허 (6)

  1. Cutler Donald R. ; Pailthorp Robert M., Apparatus and method for coordinating the movements of stages in a multi-stage multi-rate positioner system.
  2. Robinson Samuel C. (Clinton TN) Gerth Howard L. (Knoxville TN), Apparatus for correcting precision errors in slide straightness in machine tools.
  3. L\Esperance ; Jr. Francis A. (Englewood NJ), Apparatus for ophthalmological surgery.
  4. Schmall Karl-Heinz (Moncalieristr. 5 757 Baden-Baden DEX), Arrangement for measuring the distance between a metallic workpiece and a processing tool.
  5. Nakajima Tatsuya (Fujisawa JPX) Miura Yasushi (Yokohama JPX), Circular path control apparatus and method for multi-axis servomechanisms.
  6. Lai Ming, Method for scanning a pulsed laser beam for surface ablation.

이 특허를 인용한 특허 (38)

  1. Stoltz,Richard; Delfyett,Peter J., Ablative material removal with a preset removal rate or volume or depth.
  2. Brennan, III, James Francis; Vaissié, Laurent; Mielke, Michael Marshall, Active tuning of temporal dispersion in an ultrashort pulse laser system.
  3. Stadler, Andrew D.; Goldman, David; Farley, Mark; Mielke, Michael M., Automated laser tuning.
  4. Stadler, Andrew D.; Mielke, Michael Marshall; Vaissié, Laurent; Yilmaz, Ismail Tolga; Saunders, Thomas, Automated polarization correction.
  5. Brennan, III,James F.; Vaissie,Laurent; Mielke,Michael, Bragg fibers in systems for the generation of high peak power light.
  6. Vaissi��,Laurent; Brennan, III,James Francis, Combination optical isolator and pulse compressor.
  7. Greenberg, Michael; Chang, Kok Wai, Compact monolithic dispersion compensator.
  8. Stoltz,Richard; Delfyett,Peter J., Controlling pulse energy of an optical amplifier by controlling pump diode current.
  9. Vaissié, Laurent; Brennan, III, James Francis, Dispersion compensation in a chirped pulse amplification system.
  10. Noel, Michael Shane; SeCoy, Todd C., Drilling holes with minimal taper in cured silicone.
  11. Stadler, Andrew D.; Goldman, David; Farley, Mark; Mielke, Michael, Intelligent laser interlock system.
  12. Stadler, Andrew D.; Goldman, David; Farley, Mark; Mielke, Michael, Intelligent laser interlock system.
  13. Delfyett, Peter; Stoltz, Richard, Laser ablation method and apparatus having a feedback loop and control unit.
  14. Srinivas, Ramanujapuram A.; Greenberg, Michael; Gaudiosi, David; Mielke, Michael; Booth, Tim, Laser based processing of layered materials.
  15. Tanaka, Koichiro; Oishi, Hirotada, Laser irradiation apparatus, method of laser irradiation, and method for manufacturing semiconductor device.
  16. Stoltz,Richard; Bullington,Jeff, Man-portable optical ablation system.
  17. Tanaka, Koichiro; Oishi, Hirotada, Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method.
  18. Booth,Timothy J.; Yilmaz,Ismail T.; Brennan, III,James F., Method and apparatus for optical isolation in high power fiber-optic systems.
  19. Hurley, Neil Francis; Zhang, Tuanfeng, Method for characterizing a geological formation traversed by a borehole.
  20. Alpay, Mehmet E.; Howerton, Jeffrey; Nashner, Michael; Wen, Ling, Method for machining tapered micro holes.
  21. Tanaka, Koichiro; Oishi, Hirotada, Method for manufacturing semiconductor device.
  22. Zhang, Tuanfeng; Hurley, Neil Francis; Zhao, Weishu, Method to generate numerical pseudocores using borehole images, digital rock samples, and multi-point statistics.
  23. Hurley, Neil Francis; Zhang, Tuanfeng; Xu, Guangping; Xu, Lili; Slim, Mirna, Method to quantify discrete pore shapes, volumes, and surface areas using confocal profilometry.
  24. Gaudiosi, David; Vaissie, Laurent, Methods and systems for trimming circuits.
  25. Vaissié, Laurent, Methods and systems for trimming circuits.
  26. Gaudiosi, David; Greenberg, Michael; Mielke, Michael; Booth, Tim; Masor, Gordon, Polymer tubing laser micromachining.
  27. Stoltz, Richard; Bullington, Jeff, Portable optical ablation system.
  28. Vaissi?,Laurent; Brennan, III,James Francis, Post amplification optical isolator.
  29. Stoltz,Richard, Semiconductor manufacturing using optical ablation.
  30. Bullington,Jeff; Stoltz,Richard, Semiconductor-type processing for solid-state lasers.
  31. Gaudiosi, David M.; Akbulut, Mehmetcan, Static phase mask for high-order spectral phase control in a hybrid chirped pulse amplifier system.
  32. Bille, Josef, System and method for photoablation using multiple focal points with rotating beam splitter.
  33. Stadler, Andrew D.; Goldman, David; Farley, Mark; Mielke, Michael M.; Kim, Kyungbum; Vaissié, Laurent; Waarts, Robert G.; Cumbo, Michael J., Systems and methods for control of ultra short pulse amplification.
  34. Mielke, Michael M.; Waarts, Robert G.; Tong, Sha; Chang, Kok Wai, Systems and methods for controlling a pulsed laser by combining laser signals.
  35. Lu, Guang; Alpay, Mehmet E.; Tyler, Mike; Xu, Qian; Kleinert, Jan; Lin, Zhibin; Brookhyser, James D.; Lo, Ho Wai; Eaton, Kurt M., Systems and methods for enabling automated motion control of a tool in a multi-axis machine tool.
  36. Mielke, Michael; Srinivas, Ramanujapuram A.; Booth, Tim; Wilbanks, Thor, Systems and processes that singulate materials.
  37. Brennan, III,James Francis; Booth,Timothy J., Wavelength-stabilized pump diodes for pumping gain media in an ultrashort pulsed laser system.
  38. Hert, Thomas, Workpiece cutting.
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