초록 ▼

A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and va

A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.

대표청구항 ▼

1. A vacuum system comprising:a turbomolecular vacuum pump with a drive motor; a pressure sensor coupled to the turbomolecular vacuum pump; an electronic control module having a programmed processor which controls the turbomolecular pump drive motor including controlling speed of the drive motor in

1. A vacuum system comprising:a turbomolecular vacuum pump with a drive motor; a pressure sensor coupled to the turbomolecular vacuum pump; an electronic control module having a programmed processor which controls the turbomolecular pump drive motor including controlling speed of the drive motor in response to sensed pressure, the electronic control module being integral with the turbomolecular vacuum pump; a heater that heats the turbomolecular pump; and a sensor that senses temperature of the turbomolecular pump, the electronic control module responding to the temperature sensor and driving the heater to control the temperature of the turbomolecular pump. 2. A vacuum system as claimed in claim 1 further comprising a roughing valve for opening a foreline of the turbomolecular pump to a roughing pump.3. A vacuum system as claimed in claim 2 further comprising a pressure sensor between the roughing valve and roughing pump, the programmed processor responding to pressure sensed by the sensor.4. A vacuum system as claimed in claim 3 wherein the processor checks the sensed pressure before starting the drive motor.5. A vacuum system as claimed in claim 1 further comprising a vent valve for introducing gas into the turbomolecular pump for slowing the pump.6. A vacuum system as claimed in claim 1 further comprising a sensor which senses purge gas being introduced into the turbomolecular pump.7. A vacuum system as claimed in claim 6 wherein the sensor determines load on the turbomolecular pump.8. A vacuum system as claimed in claim 7 wherein the load on the turbomolecular pump is determined by sensing currents in the turbomolecular pump drive motor.9. A vacuum system as claimed in claim 6 wherein the sensor senses purge gas by sensing foreline pressure.10. A vacuum system as claimed in claim 6 wherein the sensor senses purge gas by sensing system response as a purge valve is closed and opened.11. A vacuum system as claim in claim 1 wherein the electronic control module responds to return of power after a power failure by sensing speed of the turbomolecular pump and continuing normal drive of the turbomolecular pump only if the speed of the turbomolecular pump is above a threshold value.12. A vacuum system as claimed in claim 1 further comprising a vibrational sensor which provides vibrational information to the electronic control module.13. A vacuum system as claimed in claim 1 further comprising a cryopump positioned in line with the turbomolecular pump, the electronic control module controlling the turbomolecular pump and cryopump.14. A vacuum system as claimed in claim 1 further comprising a cryopump positioned in line with the turbomolecular pump, the cryopump having a cryopump electronic control module which controls the cryopump and which is integral with the cryopump, the electronic control module and the cryopump electronic control module being connected through communications ports in a communication network.