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Diaphragm valve for high-temperature precursor supply in atomic layer deposition

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-049/00
  • F16K-031/04
출원번호 US-0609136 (2003-06-26)
발명자 / 주소
  • Maula, Jarmo Ilmari
  • Leskinen, Hannu
  • Lang, Teemu
  • Kuosmanen, Pekka
  • H?rk?nen, Kari
  • Aitchison, Bradley J.
출원인 / 주소
  • Planar Systems, Inc.
대리인 / 주소
    Stoel Rives LLP
인용정보 피인용 횟수 : 12  인용 특허 : 35

초록

A diaphragm valve includes a heating body that thermally contacts a valve body of the valve and extends proximal to a diaphragm of the valve opposite a valve passage through which medium flows. The heating body forms a thermally conductive pathway between the valve body and the diaphragm that facili

대표청구항

1. A diaphragm valve comprising:a valve body defining a valve passage having an inlet and an outlet; a diaphragm having first and second sides and positioned such that the first side is proximal to the valve passage; an actuator for applying an actuation force to the diaphragm, the diaphragm operabl

이 특허에 인용된 특허 (35)

  1. Walsh John T. (Duluth GA) Hubbard Timothy M. (Canton GA) Osinaiya Taiwo T. (Stone Mountain GA), Apparatus for dispensing heated fluid materials.
  2. Van Wijck, Margreet Albertine Anne-Marie, Atomic layer deposition.
  3. Mertens Klaus (Hemsbach DEX) Sausner Andreas (Frankfurt DEX), Control valve with pressure equalization.
  4. Weingarten Zvi (Kibbutz Evron ILX), Diaphragm control valve.
  5. Butler Ronald G., Diaphragm valve.
  6. Holtermann Ludwig K. (Old Saybrook CT), Diaphragm valve.
  7. Yamaji Michio,JPX ; Yoshikawa Kazuhiro,JPX ; Itoi Shigeru,JPX, Diaphragm valve.
  8. Yoshikawa Kazuhiro (Osaka JPX) Kojima Tetsuya (Osaka JPX), Diaphragm valve.
  9. Yoshikawa Kazuhiro,JPX ; Kojima Tetsuya,JPX, Diaphragm valve.
  10. Gotch James E. ; Kitchen Dale J. ; Longo Maria T. ; Rasanow Victor N. ; Smith Philip J., Diaphragm valve seat arrangement.
  11. Otsuki Hiromi (Anjo JPX) Kondo Takashi (Toyota JPX) Kondo Yoshiaki (Kariya JPX) Obata Haruyuki (Susono JPX) Tate Takao (Susono JPX) Ishikawa Norikatu (Mishima JPX), Electromagnetic reed valve.
  12. Goossens, Andre F. L., Electromagnetic valve.
  13. Tadahiro Ohmi JP; Migaku Takahashi JP; Michio Yamaji JP; Tsuyoshi Tanikawa JP; Nobukazu Ikeda JP; Ryosuke Dohi JP; Kouji Nishino JP; Naofumi Yasumoto JP; Hiroyuki Fukuda JP; Tomio Uno JP; Y, Fluid control valve and fluid supply/exhaust system.
  14. Rothermel William F., Fluid transport circuit and valve structure therefor.
  15. Arstein Dale C. (Elk River MN) Rensberger Lee R. (Monticello MN), Gas valve.
  16. Mamyo, Mitsuru, High-temperature gas control valve.
  17. Ogawa Shuhei,JPX ; Yoshikawa Kazuhiro,JPX, Metal diaphragm type valve.
  18. Hanyu Takaomi (Yamato JPX) Tada Kouki (Yokohama JPX), Metal diaphragm valve.
  19. Kimura Miyoshi (Yabutsukahonmachi JPX), Metal diaphragm valve.
  20. Watson James L. ; Watson John M. ; White Robert L. ; Ferree William P., Metal element having a laminated coating.
  21. Nishizato, Hiroshi; Miyamoto, Hideaki, Method and an apparatus for mixing and gasifying a reactant gas-liquid mixture.
  22. Schmitt John ; Zheng Bo ; Chang Mei ; Voss Stephen, Method and apparatus for improved control of process and purge material in substrate processing system.
  23. Nishizawa Jun-ichi (Sendai JPX) Kasai Shinzo (Sendai JPX) Okada Tetsuo (Sendai JPX) Dohzono Mitsuhiko (Izumi JPX), Micro flow control valve.
  24. Nakashiba Yasutaka (Tokyo JPX), Process of fabricating solid-state image pick-up device free from crystal defects in active region.
  25. Wade Richard A. (Royal Oak MI), Solenoid operated pressure regulating valve.
  26. Taggart Thomas D. (Pacific Grove CA) Taggart Robert E. (Carmel CA), Solenoid valve for hot melt material.
  27. Moldenhauer Hermann (Dsseldorf DEX), Solenoid valve, especially an outlet valve for infusion water.
  28. Nishimura Ryutaro (Osaka JPX) Yamaji Michio (Osaka JPX) Yamamoto Kenji (Osaka JPX), Structure for sealing an inner peripheral portion of a metallic diaphragm.
  29. Fargo Richard N. (Newington CT), Three-way solenoid valve.
  30. Ellis Craig D. ; Chambers Kenith W. ; McCormick Scott ; DeRidder Steven D. ; Carruth W. Layne ; Schulte Stephen R., Valve assembly.
  31. Ollivier Louis A., Valve having metal-to metal dynamic seating for controlling the flow of gas for making semiconductors.
  32. Ono Hirofumi,JPX, Valve structure for use in a vaporizer.
  33. Turnwald Ernst (Altenmarkt DEX) Asztalos Stefan (Munich DEX) Rosenmeier Rudolf (Munich DEX), Valves and operating system for expansion machines.
  34. Suzuki Hidenao,JPX ; Horie Kuniaki,JPX ; Tsukamoto Kiwamu,JPX ; Araki Yuji,JPX, Valving device.
  35. Miyamoto Hideaki (Miyanohigashi-machi JPX) Ishikawa Kohichi (Miyanohigashi-machi JPX) Kawano Takeshi (Miyanohigashi-machi JPX), Vapor controller.

이 특허를 인용한 특허 (12)

  1. Kim, Bae-Jin; Kim, Sang Min, Angle valve having fixed heater block.
  2. Rightley,Michael Joseph, Apparatus and method for selectively channeling a fluid.
  3. Tabatabaie, Kamal; Hallock, Robert B., Atomic layer deposition in the formation of gate structures for III-V semiconductor.
  4. Maula,Jarmo Ilmari; Leskinen,Hannu; Lang,Teemu; Kuosmanen,Pekka; H?rk?nen,Kari; Aitchison,Bradley J., Diaphragm valve for atomic layer deposition.
  5. Gamache, Yves; Fortier, André, Diaphragm-sealed valve having a locking mechanism.
  6. Doan,Trung Tri; Breiner,Lyle D.; Ping,Er Xuan; Zheng,Lingyi A., Method of atomic layer deposition on plural semiconductor substrates simultaneously.
  7. Doan,Trung Tri; Breiner,Lyle D.; Ping,Er Xuan; Zheng,Lingyi A., Methods for treating pluralities of discrete semiconductor substrates.
  8. Doan,Trung Tri; Breiner,Lyle D.; Ping,Er Xuan; Zheng,Lingyi A., Methods for treating pluralities of discrete semiconductor substrates.
  9. Doan,Trung Tri; Breiner,Lyle D.; Ping,Er Xuan; Zheng,Lingyi A., Methods for treating semiconductor substrates.
  10. Lowery, Patrick A., Removable valve seat member for diaphragm valve.
  11. Ruddle, Clifford J.; Barker, Stephen, Syringe for a combined dental irrigator and vacuum device.
  12. Leys, John A.; Schleicher, Mike, Welded diaphragm valve.
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