초록 ▼

A method and system for cleaning conditioning devices used in chemical mechanical polishing (CMP) systems is disclosed. The system includes a robotic arm for holding and transporting the conditioning device between the polish pad area of the machine and the conditioning device cleaning area. The cle

A method and system for cleaning conditioning devices used in chemical mechanical polishing (CMP) systems is disclosed. The system includes a robotic arm for holding and transporting the conditioning device between the polish pad area of the machine and the conditioning device cleaning area. The cleaning area consists of an ultrasonic tank containing a liquid for the purpose of removing particles, residues and contaminants from the conditioning device and its mounting hardware. Removal of contaminants from the conditioning device leads to reduced defect levels in the CMP process.

대표청구항 ▼

1. A method comprising:polishing an object with a polishing pad of a chemical mechanical polishing system; conditioning the polishing pad while the object is being polished; removing the conditioning device from the polishing pad; transporting the conditioning device to a conditioning tank containin

1. A method comprising:polishing an object with a polishing pad of a chemical mechanical polishing system; conditioning the polishing pad while the object is being polished; removing the conditioning device from the polishing pad; transporting the conditioning device to a conditioning tank containing a conditioning liquid; submerging the conditioning device in the conditioning liquid; and, applying ultrasonic energy to the submerged conditioning device. 2. The method of claim 1 wherein the removing and transporting are carried out with a robotic arm.3. The method of claim 1 further comprising:removing the conditioning device from the conditioning tank; and, returning the conditioning device to the polishing pad so as to condition the polishing pad while the object or a new object is being polished. 4. The method of claim 1 wherein the conditioning tank is disposed adjacent to the polishing pad.5. The method of claim 1 wherein the conditioning tank is disposed remotely from the polishing pad.6. The method of claim 1 wherein the polishing pad has first and second opposing sides, wherein the polishing pad comprises a polishing surface that engages the object being polished, wherein the polishing surface is on the first side of the polishing pad, and wherein the method further comprises dispensing a polishing fluid from the first side onto the polishing surface.7. The method of claim 6 wherein the arm is further characterized as being a robotic arm.8. The method of claim 6 wherein the conditioning tank is disposed adjacent to the polishing pad.9. The method of claim 6 wherein the conditioning tank is disposed remotely from the polishing pad.10. A method comprising:polishing an object with a polishing pad of a chemical mechanical polishing system, wherein the polishing pad has first and second opposing sides, wherein the polishing pad comprises a polishing surface that engages the object being polished, and wherein the polishing surface is on the first side of the polishing pad; dispensing a polishing fluid onto the polishing surface from a nozzle located farther away from the second side than from the first side; conditioning the polishing pad; removing the conditioning device from the polishing pad; transporting the conditioning device to a conditioning tank containing a conditioning liquid; submerging the conditioning device in the conditioning liquid; and, applying ultrasonic energy to the submerged conditioning device. 11. The method of claim 10 wherein the removing and transporting are carried out with a robotic arm.12. The method of claim 10 further comprising:removing the conditioning device from the conditioning tank; and, returning the conditioning device to the polishing pad. 13. The method of claim 10 wherein the conditioning tank is disposed adjacent to the polishing pad.14. The method of claim 10 wherein the conditioning tank is disposed remotely from the polishing pad.