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Adsorption methods

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/04
출원번호 US-0387707 (2003-03-13)
발명자 / 주소
  • Seguin, Kevin J.
  • Peterson, Paul
  • Graham, Kristine M.
출원인 / 주소
  • Donaldson Company, Inc.
대리인 / 주소
    Merchant &
인용정보 피인용 횟수 : 44  인용 특허 : 12

초록

An adsorption bed arrangement includes a plurality of adsorption elements, a housing, and a gasket member. Each of the adsorption elements has a first adsorptive media and a second adsorptive media, which remove different contaminants from an incoming air stream. For example, the first adsorptive me

대표청구항

1. A method of filtering air for lithography processing, the method comprising:(a) passing an incoming air stream through an adsorption bed, (i) the incoming air stream comprising acidic contaminants, basic contaminants, and non-polar organic contaminants; (ii) the adsorption bed comprising a first

이 특허에 인용된 특허 (12)

  1. Redner Carl R. (Walled Lake MI), Activated carbon air purifier.
  2. Graham Kristine M. ; Peterson Paul ; Monson Donald R. ; Mills Jarren B. ; Grafe Timothy H., Adsorption apparatus.
  3. Graham Kristine M. ; Peterson Paul ; Monson Donald R. ; Mills Jarren B. ; Grafe Timothy H., Adsorption apparatus and methods.
  4. Soichiro Sakata JP; Katsumi Sato JP; Hideto Takahashi JP; Takao Okada JP, Air cleaning filter, process for preparing the same, and high-level cleaner.
  5. Andrew James Dallas ; Mark Alan Gogins ; Kristine Marie Graham ; Daniel Adamek ; Robert Skuster, Air filter assembly for low temperature catalytic processes.
  6. Kovach Julius L. (2948 Brookdown Dr. Worthington OH 43085), By-pass proof adsorber cell.
  7. Kinkead Devon A. (10 Hector Ave. Cumberland RI 02864) Rezuke Robert W. (127 Worcester Rd. North Grafton MA 01536) Higley John K. (14 Saddlebrook Rd. Sherborn MA 01770), Clean room air filtering.
  8. Oleg Kishkovich ; Robert W. Rezuke ; Devon Kinkhead, Filters employing porous strongly acidic polymers.
  9. Mizuno Ayako,JPX ; Katano Makiko,JPX ; Okumura Katsuya,JPX, Method of maintaining cleanliness of substrates and box for accommodating substrates.
  10. Muraoka Hisashi,JPX, Multifunctional air filter and air-circulating clean unit with the same incorporated therein.
  11. Osendorf Richard J. (West St. Paul MN) Peterson Paul C. (New Prague MN) Monson Donald R. (West St. Paul MN), Refillable gas adsorption bed assembly and counterflow adsorber module.
  12. Kinkead Devon A. ; Joffe Michael A., Storing substrates between process steps within a processing facility.

이 특허를 인용한 특허 (44)

  1. Widerski, Robert; Engelland, Randall; Olson, Thomas; Gillingham, Gary; Suydam, Richard, Air cleaner arrangement; serviceable filter cartridge; and, methods.
  2. Nepsund, Larry R.; Kuempel, Bradley A.; Engel, Donald F.; Boehrs, Bruce Allen; Anderson, Sheldon; Bucholtz, Richard L.; Lundgren, Thomas John, Air filter having fluted filter media.
  3. Nepsund, Larry R.; Kuempel, Bradley A.; Engel, Donald F.; Boehrs, Bruce Allen; Anderson, Sheldon; Bucholtz, Richard L.; Lundgren, Thomas John, Air filter having fluted filter media.
  4. Nepsund, Larry R.; Kuempel, Bradley A.; Engel, Donald F.; Boehrs, Bruce Allen; Anderson, Sheldon; Bucholtz, Richard L.; Lundgren, Thomas John, Air filter having fluted filter media.
  5. Nepsund, Larry R.; Kuempel, Bradley A.; Engel, Donald F.; Boehrs, Bruce Allen; Anderson, Sheldon; Bucholtz, Richard L.; Lundgren, Thomas John, Air filter having fluted filter media.
  6. Nepsund, Larry; Kuempel, Bradley; Engel, Donald P.; Boehrs, Bruce Allen; Anderson, Sheldon; Bucholtz, Richard L.; Lundgren, Thomas John, Air filter having fluted filter media.
  7. Osborne, Michael W.; Rahmathullah, M. Aflal; Ng, Cheah Wei, Air handling filtration equipment with adjustable media bed and method of use.
  8. Osborne, Michael W.; Rahmathullah, M. Aflal; Ng, Cheah Wei, Air handling filtration equipment with adjustable media bed and method of use.
  9. Meirav, Udi; Biran, Israel, Air handling system with integrated air treatment.
  10. Coulonvaux, Paul; DeWit, Johan; Olson, Cary Donald; Miller, Thomas; Barris, Marty; Bishop, Wayne; Engel, Donald; Campbell, Steven; Fobe, Johan, Filter arrangements; housings; assemblies; and, methods.
  11. Coulonvaux, Paul; Dewit, Johan; Olson, Cary Donald; Miller, Thomas; Barris, Marty; Bishop, Wayne; Engel, Donald; Campbell, Steven; Fobe, Johan, Filter arrangements; housings; assemblies; and, methods.
  12. Nepsund, Larry R.; Kuempel, Bradley A.; Engel, Donald F.; Boehrs, Bruce Allen; Anderson, Sheldon; Bucholtz, Richard; Campbell, Steve; Lundgren, Thomas John, Filter arrangements; side-entry housings; and methods.
  13. Belcher, Mark; Kalis, Matthew A., Filter cartridge with centerboard, dust collectors, and methods.
  14. Belcher, Mark; Kalis, Matthew A., Filter cartridge with centerboard, dust collectors, and methods.
  15. Belcher, Mark; Kalis, Matthew A., Filter cartridge with centerboard, dust collectors, and methods.
  16. Xu, Jian; Kuhn, John David; Kreitinger, Edward J.; Bishop, Wayne R. W.; Gieseke, Steven Scott, Filter element having sealing members and methods.
  17. Xu, Jian; Kuhn, John David; Kreitinger, Edward J.; Bishop, Wayne R. W.; Gieseke, Steven Scott, Filter element having sealing members and methods.
  18. Xu, Jian; Kuhn, John David; Kreitinger, Edward J.; Bishop, Wayne R. W.; Gieseke, Steven Scott, Filter element having sealing members and methods.
  19. Xu, Jian; Kuhn, John David; Kreitinger, Edward J.; Bishop, Wayne R. W.; Gieseke, Steven Scott, Filter element having sealing members and methods.
  20. Gieseke, Steven Scott; Juliar, William M.; Steinbrueck, Edward A.; Bishop, Wayne R. W.; Golden, Patrick; Musselman, Wayne C., Filter element, air cleaner, and methods.
  21. Gieseke, Steven Scott; Juliar, William M.; Steinbrueck, Edward A.; Bishop, Wayne R. W.; Golden, Patrick; Musselman, Wayne C., Filter element, air cleaner, and methods.
  22. Gieseke, Steven Scott; Juliar, William M.; Steinbrueck, Edward A.; Bishop, Wayne R. W.; Golden, Patrick; Musselman, Wayne C., Filter element, air cleaner, and methods.
  23. Krisko, Joseph William; Bishop, Wayne R. W.; Gieseke, Steven Scott; Finnerty, Carolyn J.; Nelson, David W., Filter elements; air cleaner; assembly; and, methods.
  24. Krisko, William J.; Bishop, Wayne R. W.; Gieseke, Steven S.; Nelson, Benny, Filter elements; air cleaner; assembly; and, methods.
  25. Krisko, William J.; Bishop, Wayne R. W.; Gieseke, Steven S.; Nelson, Benny, Filter elements; air cleaner; assembly; and, methods.
  26. Krisko, William J.; Bishop, Wayne R. W.; Gieseke, Steven S.; Nelson, Benny K, Filter elements; air cleaner; assembly; and, methods.
  27. Krisko, William J.; Bishop, Wayne R. W.; Gieseke, Steven Scott; Finnerty, Carolyn J.; Nelson, David W., Filter elements; air cleaner; assembly; and, methods.
  28. Krisko, William Joseph; Bishop, Wayne R. W.; Gieseke, Steven Scott; Finnerty, Carolyn J.; Nelson, David W., Filter elements; air cleaner; assembly; and, methods.
  29. Krisko, William; Bishop, Wayne R. W.; Gieseke, Steven Scott; Finnerty, Carolyn J.; Nelson, David W., Filter elements; air cleaner; assembly; and, methods.
  30. Roseberry, Jeffrey L.; Darling, Robert A., Media holding module.
  31. Meirav, Udi; Biran, Israel; Bechar, Abraham; Meruham, Asael, Method and system for conditioning air in an enclosed environment with distributed air circulation systems.
  32. Meirav, Udi; Biran, Israel; Bechar, Abraham; Meruham, Asael, Method and system for conditioning air in an enclosed environment with distributed air circulation systems.
  33. Meirav, Udi, Method and system for improve-efficiency air-conditioning.
  34. Meirav, Udi; Biran, Israel; Meruham, Asael, Methods and systems for managing air quality and energy use in air-conditioning systems.
  35. Celik, Cem E.; Ackley, Mark William; Smolarek, James, Modular compact adsorption bed.
  36. Desai, Ashwin; Celik, Cem E.; Ackley, Mark William; Smolarek, James, Modular compact adsorption bed.
  37. Desai, Ashwin; Celik, Cem E.; Ackley, Mark William; Smolarek, James, Modular compact adsorption bed.
  38. Meirav, Udi; Biran, Israel, Modular, high-throughput air treatment system.
  39. Meirav, Udi; Biran, Israel, Modular, high-throughput air treatment system.
  40. Meirav, Udi; Biran, Israel, Sorbents for carbon dioxide reduction from indoor air.
  41. Meirav, Udi; Biran, Israel, Sorbents for carbon dioxide reduction from indoor air.
  42. Meirav, Udi; Biran, Israel; Meruham, Asael, Systems and methods for air-conditioning systems with scrubbing systems including a scrubbing bypass mode.
  43. Meirav, Udi; Biran, Israel, Systems and methods for efficient heating of sorbents in an indoor air scrubber.
  44. Galbraith, Stephen Douglas, Ultra rapid cycle portable oxygen concentrator.
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