Electro-active device using radial electric field piezo-diaphragm for sonic applications
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-041/08
H01L-041/04
출원번호
US-0392491
(2003-03-12)
발명자
/ 주소
Bryant, Robert G.
Fox, Robert L.
출원인 / 주소
The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
인용정보
피인용 횟수 :
9인용 특허 :
46
초록▼
An electro-active transducer for sonic applications includes a ferroelectric material sandwiched by first and second electrode patterns to form a piezo-diaphragm coupled to a mounting frame. When the device is used as a sonic actuator, the first and second electrode patterns are configured to introd
An electro-active transducer for sonic applications includes a ferroelectric material sandwiched by first and second electrode patterns to form a piezo-diaphragm coupled to a mounting frame. When the device is used as a sonic actuator, the first and second electrode patterns are configured to introduce an electric field into the ferroelectric material when voltage is applied to the electrode patterns. When the device is used as a sonic sensor, the first and second electrode patterns are configured to introduce an electric field into the ferroelectric material when the ferroelectric material experiences deflection in a direction substantially perpendicular thereto. In each case, the electrode patterns are designed to cause the electric field to: i) originate at a region of the ferroelectric material between the first and second electrode patterns, and ii) extend radially outward from the region of the ferroelectric material (at which the electric field originates) and substantially parallel to the plane of the ferroelectric material. The mounting frame perimetrically surrounds the peizo-diaphragm and enables attachment of the piezo-diaphragm to a housing.
대표청구항▼
1. A sonic transducer, comprising:a ferroelectric material defining a first surface and a second surface opposing said first surface, wherein said first surface and said second surface lie in substantially parallel planes; a first electrode pattern coupled to a portion of said first surface to defin
1. A sonic transducer, comprising:a ferroelectric material defining a first surface and a second surface opposing said first surface, wherein said first surface and said second surface lie in substantially parallel planes; a first electrode pattern coupled to a portion of said first surface to define a first side of a piezo-diaphragm; a second electrode pattern coupled to said second surface to define a second side of said piezo-diaphragm; and means, coupled to said piezo-diaphragm, for attaching said piezo-diaphragm about its perimeter to a housing, said means for attaching comprising a dielectric material, said means for attaching encasing said ferroelectric material with said first electrode pattern and second electrode pattern thereto, wherein said first electrode pattern and said second electrode pattern are configured to introduce an electric field into said ferroelectric material when said first electrode pattern and said second electrode pattern have voltage applied thereto, said electric field originating at a region of said ferroelectric material between said first electrode pattern and said second electrode pattern, said electric field extending radially outward from said region of said ferroelectric material and substantially parallel to said first surface and said second surface, whereby said ferroelectric material correspondingly deflects symmetrically about said region in a direction substantially perpendicular to said electric field, and wherein said first electrode pattern and said second electrode pattern are configured to produce an induced electric field in said ferroelectric material when said ferroelectric material experiences deflection in a direction substantially perpendicular to said first surface and said second surface, said induced electric field originating at said region of said ferroelectric material between said first electrode pattern and said second electrode pattern, said induced electric field extending radially outward from said region of said ferroelectric material and substantially parallel to said first surface and said second surface, whereby a current induced in each of said first electrode pattern and said second electrode pattern is indicative of said deflection. 2. A sonic transducer as in claim 1 wherein said piezo-diaphragm has a general shape selected from the group of shapes consisting of circles, triangles and polygons.3. A sonic transducer as in claim 1 wherein said first electrode pattern and said second electrode pattern are mirror images of one another.4. A sonic transducer as in claim 3 wherein each of said first electrode pattern and said second electrode pattern comprises at least two independent electrodes having opposite polarity and arranged in an alternating sequence as they extend radially outward from said region of said ferroelectric material, said alternating sequence being defined with respect to a cross-sectional view of said piezo-diaphragm.5. A sonic transducer as in claim 1 wherein said first electrode pattern and said second electrode pattern are staggered with respect to one another along a direction substantially perpendicular to said substantially parallel planes, and wherein said first electrode pattern is energized with a voltage of a first polarity and said second electrode pattern is energized with a voltage of a second polarity that is opposite that of said first polarity.6. A sonic transducer as in claim 1 further comprising a shaped electrode electrically coupled to a center portion each of said first electrode pattern and said second electrode pattern, wherein each said center portion is aligned with one another to define a common perimeter, wherein voltage applied to said center portion of said first electrode pattern is an opposite polarity with respect to voltage applied to said center portion of said second electrode pattern, and wherein said ferroelectric material aligned with said common perimeter defines said region of said ferroelectric material at which said electric field originates.7. A sonic transducer as in claim 1 wherein said ferroelectric material comprises a single sheet of ferroelectric material.8. A sonic transducer as in claim 1 wherein said means for attaching comprises:a first piece of dielectric material with said first electrode pattern coupled thereto; and a second piece of dielectric material with said second electrode pattern coupled thereto; said first piece of dielectric material joined to said second piece of dielectric material beyond the perimeter defined by said piezo-diaphragm to thereby form said means for attaching. 9. A sonic transducer as in claim 1 wherein said ferroelectric material comprises a ceramic piezoelectric material.10. A sonic actuator comprising:a ferroelectric material defining a first surface and a second surface opposing said first surface, wherein said first surface and said second surface lie in substantially parallel planes; a first electrode pattern coupled to a portion of said first surface to define a first side of a piezo-diaphragm; a second electrode pattern coupled to a portion of said second surface to define a second side of said piezo-diaphragm, wherein said first electrode pattern and said second electrode pattern are configured to introduce an electric field into said ferroelectric material when said first electrode pattern and said second electrode pattern have voltage applied thereto, said electric field originating at a region of said ferroelectric material between said first electrode pattern and said second electrode pattern, said electric field extending radially outward from said region of said ferroelectric material and substantially parallel to said first surface and said second surface, whereby said piezo-diaphragm correspondingly deflects symmetrically about said region in a direction substantially perpendicular to said electric field; and means, coupled to said piezo-diaphragm, for attaching said piezo-diaphragm about its perimeter to a housing, said means for attaching comprising a dielectric material, said means for attaching encasing said ferroelectric material with said first electrode pattern and second electrode pattern thereto. 11. A sonic actuator as in claim 10 wherein said piezo-diaphragm has a general shape selected from the group of shapes consisting of circles, triangles, and polygons.12. A sonic actuator as in claim 10 wherein said first electrode pattern and said second electrode pattern are mirror images of one another.13. A sonic actuator as in claim 12 wherein each of said first electrode pattern and said second electrode pattern comprises at least two independent electrodes having opposite polarity and arranged in an alternating sequence as they extend radially outward from said region of said ferroelectric material, said alternating sequence being defined with respect to a cross-sectional view of said piezo-diaphragm.14. A sonic actuator as in claim 10 wherein said first electrode pattern and said second electrode pattern are staggered with respect to one another along a direction substantially perpendicular to said substantially parallel planes, and wherein said first electrode pattern is energized with a voltage of a first polarity and said second electrode pattern is energized with a voltage of a second polarity that is opposite that of said first polarity.15. A sonic actuator as in claim 10 further comprising a shaped electrode electrically coupled to a center portion each of said first electrode pattern and said second electrode pattern, wherein each said center portion is aligned with one another to define a common perimeter, wherein voltage applied to said center portion of said first electrode pattern is an opposite polarity with respect to voltage applied to said center portion of said second electrode pattern, and wherein said ferroelectric material aligned with said common perimeter defines said region of said ferroelectric material at which said electric field originates.16. A sonic actuator as in claim 10 wherein said ferroelectric material comprises a single sheet of ferroelectric material.17. A sonic actuator as in claim 10 wherein said means for attaching comprises:a first piece of dielectric material with said first electrode pattern coupled thereto; and a second piece of dielectric material with said second electrode pattern coupled thereto; said first piece of dielectric material joined to said second piece of dielectric material beyond the perimeter defined by said piezo-diaphragm to thereby form said means for attaching. 18. A sonic actuator as in claim 10 wherein said ferroelectric material comprises a ceramic piezoelectric material.19. A sonic sensor, comprising:a ferroelectric material defining a first surface and a second surface opposing said first surface, wherein said first surface and said second surface lie in substantially parallel planes; a first electrode pattern coupled to a portion of said first surface to define a first side of a piezo-diaphragm; a second electrode pattern coupled to a portion of said second surface to define a second side of said piezo-diaphragm, wherein said first electrode pattern and said second electrode pattern are configured to produce an electric field into said ferroelectric material when said ferroelectric material experiences deflection in a direction substantially perpendicular to said first surface and said second surface, said electric field originating at a region of said ferroelectric material between said first electrode pattern and said second electrode pattern, said electric field extending radially outward from said region of said ferroelectric material and substantially parallel to said first surface and said second surface, whereby a current induced in each of said first electrode pattern and said second electrode pattern is indicative of said deflection; and means, coupled to said piezo-diaphragm, for attaching said piezo-diaphragm about its perimeter to a housing, said means for attaching comprising a dielectric material, said means for attaching encasing said ferroelectric material with said first electrode pattern and second electrode pattern thereto. 20. A sonic sensor as in claim 19 wherein said piezo-diaphragm has a general shape selected from the group of shapes consisting of circles, triangles and polygons.21. A sonic sensor as in claim 19 wherein said first electrode pattern and said second electrode pattern are mirror images of one another.22. A sonic sensor as in claim 21 wherein each of said first electrode pattern and said second electrode pattern comprises at least two independent electrodes having opposite polarity and arranged in an alternating sequence as they extend radially outward from said region of said ferroelectric material, said alternating sequence being defined with respect to a cross-sectional view of said piezo-diaphragm.23. A sonic sensor as in claim 19 wherein said first electrode pattern and said second electrode pattern are staggered with respect to one another along a direction substantially perpendicular to said substantially parallel planes, and wherein said first electrode pattern is energized with a voltage of a first polarity and said second electrode pattern is energized with a voltage of a second polarity that is opposite that of said first polarity.24. A sonic sensor as in claim 19 further comprising a shaped electrode electrically coupled to a center portion each of said first electrode pattern and said second electrode pattern, wherein each said center portion is aligned with one another to define a common perimeter, wherein voltage applied to said center portion of said first electrode pattern is an opposite polarity with respect to voltage applied to said center portion of said second electrode pattern, and wherein said ferroelectric material aligned with said common perimeter defines said region of said ferroelectric material at which said electric field originates.25. A sonic sensor as in claim 19 wherein said ferroelectric material comprises a single sheet of ferroelectric material.26. A sonic sensor as in claim 19 wherein said means for attaching comprises:a first piece of dielectric material with said first electrode pattern coupled thereto; and a second piece of dielectric material with said second electrode pattern coupled thereto; said first piece of dielectric material joined to said second piece of dielectric material beyond the perimeter defined by said piezo-diaphragm to thereby form said means for attaching. 27. A sonic sensor as in claim 19 wherein said ferroelectric material comprises a ceramic piezoelectric material.
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