초록 ▼

A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances extending into the interior of the eac

A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances extending into the interior of the each stacked container thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers.

대표청구항 ▼

1. A vapor delivery system for vaporization and delivery of a source material, comprising:a) an ampoule comprising an ampoule bottom, sidewall and removable top to form an internal ampoule compartment; b) a gas inlet and gas outlet communicatively connected to the ampoule; c) at least one source mat

1. A vapor delivery system for vaporization and delivery of a source material, comprising:a) an ampoule comprising an ampoule bottom, sidewall and removable top to form an internal ampoule compartment; b) a gas inlet and gas outlet communicatively connected to the ampoule; c) at least one source material container positioned within the internal ampoule compartment, wherein the container comprises a container bottom and side wall to form a container cavity; and d) a plurality of channeled protuberances positioned in the container bottom to provide channels therethrough, wherein the channeled protuberances extend into the container cavity; and e) an internal gas carrying member positioned within the internal compartment, extending through the container bottom and communicatively connected to the gas inlet. 2. The vapor delivery system according to claim 1, wherein the internal gas carrying member extends through the center of the container bottom.3. The vapor delivery system according to claim 1, wherein the container sidewall is of sufficient height to retain a solid precursor therein.4. The vapor delivery system according to claim 1, wherein the plurality of channeled protuberances are positioned on the container bottom.5. The vapor delivery system according to claim 1, wherein the container bottom, sidewall and plurality of channeled protuberances have a surface area approximately equal to the surface area of the internal compartment of the ampoule.6. The vapor delivery system according to claim 4, comprising a plurality of vertically stacked containers positioned in the internal compartment.7. The vapor delivery system according to claim 6, wherein each container side wall is of sufficient height to contact an overlying vertically adjacent container to form a gas holding space therebetween.8. The vapor delivery system according to claim 7, wherein the height of the channeled protuberances is lower than the height of the container side wall.9. The vapor delivery system according to claim 8 wherein the internal gas carrying member extends through the plurality of vertically stacked containers.10. The vapor delivery system according to claim 9, wherein the container sidewall of each of the plurality of vertically stacked containers contacts the ampoule sidewall.11. The vapor delivery system according to claim 10 further comprising a sealing o-ring positioned between the internal gas carrying member and the point of extending through each of the plurality of vertically stacked containers.12. The vapor delivery system according to claim 11, wherein the gas inlet and gas outlet are positioned on the ampoule top.13. The vapor delivery system according to claim 12, wherein the gas inlet is positioned approximately in the center of the ampoule top.14. The vapor delivery system according to claim 13, wherein the internal gas carrying member is a carrier gas dip tube.15. The vapor delivery system according to claim 14, wherein the carrier gas dip tube extends through the plurality of vertically stacked containers to the bottom of the internal compartment.16. The vapor delivery system according to claim 14, wherein the channeled protuberances are funnel shaped having a first end with a smaller diameter than a second end.17. The vapor delivery system according to claim 16, wherein the first end with the smaller diameter extends into the container cavity thereby directing carrier gas to the gas outlet and reducing backflow of carrier gas.18. The vapor delivery system according to claim 14, wherein the ampoule and plurality of vertically stacked containers are fabricated of a beat conducting material.19. The vapor delivery system according to claim 1, further comprising means for heating the ampoule.20. A vaporizer comprising:a) an ampoule comprising an ampoule bottom and an ampoule sidewall to form an internal compartment; b) an ampoule top to enclose the internal compartment; c) a gas inlet and gas outlet communicatively connected to the ampoule top; d) a plurality of vertically stacked contacting containers positioned within the internal compartment, wherein each container comprises a container bottom and a container sidewall to form a container cavity for holding of a solid precursor material, and wherein each container sidewall contacts the ampoule sidewall; e) a plurality of channeled protuberances positioned on each container bottom to provide channels between adjacent vertically stacked contacting containers, wherein the channeled protuberances extend into the container cavity; f) a carrier gas dip tube positioned within the internal compartment and communicatively connected to the gas inlet for directing a carrier gas to below the vertically stacked contacting containers; and g) means for heating the ampoule. 21. A vaporizer unit, comprising:a) a plurality of vertically stacked containers wherein each container has a cavity for holding a vaporizable source material; b) a plurality of channeled protuberances positioned in each of the vertically stacked containers and extending into each respective cavity, wherein the channeled vented protuberances form channels for passage of a carrier gas and vaporized source material between adjacent vertically stacked containers; and c) a carrier gas tube positioned to pass through the bottom of the container contacting the plurality of vertically stacked containers and extending through the cavity of each vertically stacked container. 22. The vaporizer unit of claims 21, wherein each of the vertically stacked containers is contacting at least one adjacent container.23. The vaporizer unit of claim 21, wherein the channeled protuberances are funnel-shaped and narrowing as extending into container cavity.24. The vaporizer unit of claim 21, wherein the vaporizable source material is a solid precursor.25. The vaporizer unit of claim 24, wherein the channeled protuberances have sidewalls comprising vents therein for transmission of carrier gas through the solid precursor for fluidizing of same.26. A vaporizing unit comprising:a) multiple vertically stacked containers therein, wherein each container has a bottom and sides for holding a vaporizable source material; b) a plurality of channeled protuberances positioned on the bottom of the container, wherein the channeled protuberances provide channels for passage of at least vaporized source material; and c) a carrier gas tube positioned to pass through the bottom of the container to introduce a stream of the carrier gas for passage through the channeled protuberances. 27. A method for delivering a vaporized source material to a downstream process chamber, the method comprising:a) providing a plurality of interconnected, vertically stacked containers having a vaporizable source material contained therein, wherein each of interconnected, vertically stacked containers comprise a plurality of channeled protuberances; b) positioning the interconnected, vertically stacked containers within a sealable ampoule; c) applying heat to the sealable ampoule in a sufficient amount to vaporize the source material therein; and d) introducing a carrier gas into the sealable ampoule for moving the vaporized source material through the sealable ampoule to the process chamber, wherein the direction of the carrier gas is directed to the bottom of the stacked containers and concurrent to the direction of the vaporized source material moving through the plurality of channeled protuberances. 28. The method of claim 27, wherein the vertically stacked containers comprise a plurality of channeled protuberances to form a channel between adjacent vertically stacked containers.29. The method of claim 27, wherein each of the vertically stacked containers is contacting at least one adjacent container.30. The method of claim 27, wherein the vaporizable source material is a solid precursor.31. A vaporizer comprising:a) an ampoule comprising an ampoule bottom and an ampoule sidewall to form an internal compartment; b) an ampoule top to enclose the internal compartment; c) a gas inlet and gas outlet communicatively connected to the ampoule top; d) a plurality of vertically stacked contacting containers positioned within the internal compartment, wherein each container comprises a container bottom and a container sidewall to form a container cavity for holding of a solid precursor material, and wherein each container sidewall contacts the ampoule sidewall; e) a plurality of vents positioned on each container bottom to provide channels between adjacent vertically stacked contacting containers; f) a carrier gas dip tube positioned within the internal compartment and communicatively connected to the gas inlet for directing a carrier gas to below the vertically stacked contacting containers; and g) means for heating the ampoule. 32. The vapor delivery system according to claim 14, wherein the channeled protuberances are cylindrically shaped having a first end with about the same diameter as a second end.33. The vaporizer unit of claim 21, wherein the channeled protuberances are cylindrically-shaped.