초록 ▼

A pressure sensor includes a silicon diaphragm having bottom and topside surfaces. The bottom surface has been formed using methods known to those skilled in the art. A first layer is formed and patterned on the topside surface of the diaphragm having an area larger than the diaphragm. A second laye

A pressure sensor includes a silicon diaphragm having bottom and topside surfaces. The bottom surface has been formed using methods known to those skilled in the art. A first layer is formed and patterned on the topside surface of the diaphragm having an area larger than the diaphragm. A second layer is formed and patterned over the first layer, the second layer being larger in area than the first layer. Holes formed in the second layer are used to remove the first layer using methods known to those skilled in the art. A third layer is formed and patterned over the second layer. The third layer seals the holes in the second layer creating a sealed cavity with a reference pressure on the topside surface of the diaphragm. During operation, media is applied to the bottom surface of the diaphragm wherein the media pressure can be sensed by the pressure sensor in relation to the reference pressure sealed on the topside of the diaphragm.

대표청구항 ▼

1. A pressure sensor comprising:a silicon substrate with a backside etched diaphragm having a top and bottom surface and an outer perimeter;a first layer is formed on the topside surface of the diaphragm, said first layer having an area that is larger than the diaphragm;a second layer is formed over

1. A pressure sensor comprising:a silicon substrate with a backside etched diaphragm having a top and bottom surface and an outer perimeter;a first layer is formed on the topside surface of the diaphragm, said first layer having an area that is larger than the diaphragm;a second layer is formed over the first layer and on the topside surface, said second layer having an area larger than the first layer, wherein holes are formed in the second layer;the first layer is then removed from under the second layer through the holes leaving a cavity between the second layer and the topside of the diaphragm;a third layer is formed over the second layer at the desired reference pressure and on the topside surface;wherein said third layer seals the holes in the second layer creating a sealed cavity providing the reference pressure on the topside of the diaphragm.2. The pressure sensor of claim 1 wherein holes are formed in the second layer, using a laser or other methods well known to those skilled in the art to create the openings in a precise location and dimension.3. The pressure sensor of claim 1 wherein the first layer is removed through the holes leaving the second layer intact and a cavity between the second layer and the topside of the diaphragm.4. The pressure sensor of claim 1, wherein the third layer seals the holes in the second layer at a reference pressure creating the sealed cavity and providing the reference pressure on the topside of the diaphragm.5. The pressure sensor of claim 1, wherein media can be applied to the bottom surface of the diaphragm thereby eliminating exposure of the topside of the sensor to the media.6. The pressure sensor of claim 1, further comprising an electronic circuit connected in signal communication with the diaphragm.7. A method for fabricating a pressure sensor comprising the steps of:providing a silicon substrate with a backside etched diaphragm having bottom and top surfaces and an outer perimeter;disposing a first layer on the topside surface of the silicon diaphragm, said first layer having a larger patterned area than the silicon diaphragm;disposing a second layer of different material than the first layer over the first layer and the topside surface, said second layer having a larger patterned area than the first layer;forming holes within the second layer;removing the first layer thereby creating a cavity on the topside of the diaphragm under the second layer;disposing a third layer over the second layer and the topside surface at a reference pressure sealing the holes in the second layer thereby creating a sealed cavity at the reference pressure on the topside of the diaphragm.8. The method of claim 7, wherein said holes through the second layer are formed using a laser or other methods well know to those skilled in the art to create the openings in a precise location and dimension.9. The method of claim 7 wherein the first layer is removed through the holes leaving the second layer intact and a cavity between the second layer and the topside of the diaphragm.10. The method of claim 7, wherein the third layer seals the holes in the second layer at a reference pressure creating the sealed cavity and providing the reference pressure on the topside of the diaphragm.11. The method of claim 7, wherein media can be applied to the bottom surface of the diaphragm thereby eliminating exposure of the topside of the sensor to the media.12. The method of claim 7, further comprising an electronic circuit connected in signal communication with the diaphragm.13. A method for using an improved pressure sensor comprising a silicon diaphragm having bottom and topside surfaces and an outer perimeter, wherein the bottom surface has been etched from the backside, a first layer formed and patterned on the topside surface over the diaphragm, said first layer having a larger area than the diaphragm; a second layer formed and patterned over the first layer and on the topside surface, said second layer having a larger area than the first layer, holes formed in the second layer, the first layer removed from under the second layer through the holes forming a cavity between the second layer and the top of the diaphragm, and a third layer formed and patterned over the second layer and the topside surface at the reference pressure and sealing the holes in the second layer creating a sealed cavity with the reference pressure on the topside of the diaphragm, said method comprising the steps of:exposing the backside of the diaphragm to a media, wherein the pressure of the media can be measured with respect to the reference pressure sealed on the topside of the diaphragm; andelectronically obtaining a pressure reading from the pressure sensor.