[특허]Method of continuous processing of thin-film batteries and like devices

Cymbet Corporation

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Method of continuous processing of thin-film batteries and like devices

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01L-021/00
미국특허분류(USC)	438/048; 438/057; 438/237; 029/623.1
출원번호	US-0813321 (2004-03-29)
§371/§102 date	19981021 (19981021)
발명자 / 주소	Jenson, Mark Lynn
출원인 / 주소	Cymbet Corporation
대리인 / 주소	Lemaire Patent Law Firm, P.L.L.C.
인용정보	피인용 횟수 : 75 인용 특허 : 128

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A method of making a thin-film device including a substrate-supply station that supplies a substrate. The substrate has a first layer on the substrate. Also described is a method and device for depositing a second layer onto the first layer, wherein energy supplied to the second layer aids in layer formation without substantially heating the substrate. Some embodiments include depositing a photovoltaic cell. In some embodiments, the substrate is a flexible material supplied from a roll. Some embodiments include attaching an integrated circuit to the subs...

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1. A method of making a thin-film device, the method comprising:providing a substrate having a major surface area, the substrate having a first layer on a first surface area of the substrate's major surface area; depositing a second layer onto the first layer, wherein the first and second layers form part of a battery, wherein the depositing of the second layer further includes supplying an amount of ion-assist energy to the second layer to aid in crystalline layer formation while controlling a stoichiometry of the crystalline layer without substantially heating the substrate, and wherein the battery is a thin-film lithium battery; depositing one or more other layers to form a photovoltaic cell connected to the battery; attaching an integrated circuit to the substrate; and operatively coupling the integrated circuit to charge the battery using current from the photovoltaic cell, wherein either the first or the second layer forms a cathode layer of the battery, wherein the battery includes the cathode layer, an anode layer, and an electrolyte layer located between and electrically isolating the anode layer from the cathode layer.2. The method according to claim 1, wherein at least some of the layers are deposited on the substrate while the substrate moves in a continuous motion.3. The method according to claim 1, wherein the substrate is a flexible material supplied from a roll, and at least some of the layers are deposited on the substrate while the substrate moves in a continuous motion.4. The method according to claim 1, further comprising depositing an electrical circuit on the battery.5. The method according to claim 1, wherein the substrate is a rigid material supplied from a cassette, and at least some of the layers are deposited on the substrate while the substrate moves in a continuous motion.6. The method according to claim 1, wherein the substrate is a polymer material having a melting point below about 700 degrees Celsius.7. The method according to claim 1, wherein the depositing of the second layer includes supplying ion-assist energy to the second layer using ions of at least 5 eV.8. The method of claim 1, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 50 eV.9. The method of claim 1, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 30 eV.10. The method of claim 1, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 20 eV.11. The method of claim 1, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 10 eV to about 50 eV.12. The method of claim 1, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 10 eV to about 20 eV.13. The method of claim 1, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 20 eV to about 50 eV.14. The method of claim 1, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 20 eV to about 30 eV.15. The method of claim 1, wherein the supplying of ion-assist energy includes supplying ions having an energy of about 20 eV.16. The method according to claim 1, wherein the depositing of the second layer further includes supplying an amount of ion-assist energy to the second layer to aid in crystalline formation of a layer that includes lithium while controlling a stoichiometry of the crystalline second layer.17. The method according to claim 1, wherein the depositing of the second layer further includes supplying an amount of ion-assist energy to the second layer to aid in crystalline layer formation while controlling a stoichiometry of the crystalline second layer without substantially heating the substrate, and wherein the battery formed is a thin-film battery.18. The method according to claim 1, wherein the second layer is a LiCoO2 intercalation material, and the supplying of ion-assist energy includes supplying ionized oxygen that combines with LiCo to form the LiCoO2 intercalation material.19. The method according to claim 1, wherein the providing of the substrate comprises:supplying a substrate base; and depositing the first layer onto the substrate base to form the substrate, wherein depositing of the first layer includes supplying ion-assist energy to the first layer to aid in crystalline layer formation while controlling a stoichiometry of the crystalline first layer without substantially heating the substrate base. 20. The method according to claim 1, wherein the providing of the substrate includes supplying a flexible material supplied from a roll, and the depositing of the second layer on the substrate is performed while the substrate moves in a continuous motion, wherein the second layer forms an electrolyte layer of a battery, wherein the battery includes a cathode layer, an anode layer, and the electrolyte layer located between and electrically isolating the anode layer from the cathode layer, wherein the anode or the cathode or both include an intercalation material.21. The method of claim 1, wherein the supplying of energy to the first layer includes supplying energized particles from a second source simultaneously with supplying electrolyte material from a first source.22. The method of claim 1, wherein the supplying of energy to the first layer includes supplying laser energy to the surface.23. The method of claim 1, wherein the depositing of the second layer includes depositing adatoms to form the second layer as a film.24. A method of making a thin-film device, the method comprising:supplying a substrate having a major surface area; and depositing a plurality of layers onto the substrate including supplying ion-assist energy while depositing a first layer to aid in crystalline layer formation while controlling a stoichiometry of the crystalline first layer without substantially heating the substrate, wherein the supplying of energy to the first layer includes supplying energized particles from a second source simultaneously with supplying electrolyte material from a first source; depositing a second layer having a different composition than the first layer, wherein the first layer and second layer form at least part of a thin-film lithium battery; and depositing one or more other layers in order to form a photovoltaic cell; and attaching an integrated circuit to the battery and the photovoltaic cell for charging the battery using current from the photovoltaic cell. 25. The method of claim 24, wherein the supplying of energy to the first layer includes supplying ion-assist energy with ions of a first energy, and the supplying of energy to the second layer includes supplying ion-assist energy with ions of a second energy different than the first energy.26. The method of claim 24, wherein the supplying of the substrate includes supplying a continuous set of wafers.27. The method of claim 24, wherein the first and second layers form parts of a capacitor.28. The method of claim 24, wherein the first and second layers, respectively, form parts of a thin-film battery and a device powered by the thin-film battery, respectively.29. The method of claim 24, wherein the first and second layers, respectively, form parts of a thin-film battery and a device powered by the thin-film battery, respectively, wherein the device is deposited onto the thin-film battery.30. The method of claim 24, further comprising depositing a set of traces for electrically connecting a device to the thin-film battery.31. The method of claim 30, further comprising placing one or more components onto the traces.32. The method of claim 24, further comprising depositing an energy-conversion device on the thin-film device.33. The method of claim 24, wherein the substrate is a polymer material having a melting point below about 700 degrees Celsius.34. The method of claim 24, wherein the energizing of the second layer includes supplying ions of at least 5 eV.35. The method of claim 24, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 50 eV.36. The method of claim 24, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 20 eV.37. The method of claim 24, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 10 eV to about 20 eV.38. The method of claim 24, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 20 eV to about 30 eV.39. The method of claim 24, wherein the supplying of ion-assist energy includes supplying ions having an energy of about 20 eV.40. The method of claim 35, wherein the substrate is a polymer material having a melting point below about 700 degrees Celsius, and wherein the energizing of the second layer includes supplying ions of at least 5 eV.41. A method of making a thin-film device, the method comprising:providing a substrate base; depositing a first layer onto the substrate base, wherein the depositing of the first layer further includes supplying an amount of ion-assist energy to the first layer to aid in crystalline layer formation without substantially heating the substrate; depositing a second layer onto the first layer, wherein the first and second layers form part of a a thin-film lithium battery; and depositing one or more other layers to form a photovoltaic cell, attaching an integrated circuit to the substrate; and operatively coupling the integrated circuit to charge the battery using current from the photovoltaic cell. 42. The method of claim 41, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 50 eV.43. The method of claim 41, wherein the substrate is a flexible material supplied from a roll, and at least some of the layers are deposited on the substrate while the substrate moves in a continuous motion.44. The method of claim 41, wherein the substrate includes a polymer material having a melting point below about 700 degrees Celsius.45. The method of claim 41, wherein either the first or the second layer forms a cathode layer of the battery, wherein the battery includes the cathode layer, an anode layer, and an electrolyte layer located between and electrically isolating the anode layer from the cathode layer.46. The method of claim 45, wherein the cathode includes an intercalation material.47. The method of claim 45, wherein the anode includes an intercalation material.48. The method of claim 45, wherein both the anode and the cathode include an intercalation material.49. The method of claim 45, wherein the depositing of the second layer further includes supplying an amount of ion-assist energy to the second layer to aid in crystalline layer formation without substantially heating the substrate.50. The method of claim 45, wherein the depositing of the one or more other layers of the photovoltaic cell includes depositing the layers that form the photocell on the layers that form the battery.51. The method of claim 24, wherein the depositing of the one or more other layers of the photovoltaic cell includes depositing the layers that form the photocell on the layers that form the battery.52. The method of claim 24, wherein the providing of the substrate includes supplying a flexible material supplied from a roll, and the depositing of the first layer on the substrate is performed while the substrate moves in a continuous motion.53. The method of claim 1, wherein the depositing of the one or more other layers of the photovoltaic cell includes depositing the layers that from the photocell on the layers that form the battery.54. The method of claim 1, wherein the providing of the substrate includes supplying a flexible material supplied from a roll, and the depositing of the second layer on the substrate is performed while the substrate moves in a continuous motion.55. The method of claim 1, wherein the cathode includes an intercalation material.56. The method of claim 1, wherein both the anode and the cathode include an intercalation material.

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Method of continuous processing of thin-film batteries and like devices

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