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A silicon production process which improves the production efficiency of trichlorosilane while an industrially advantageous output is ensured and the amount of the by-produced tetrachlorosilane is suppressed. This process does not require a bulky reduction apparatus for the by-produced tetrachlorosi

A silicon production process which improves the production efficiency of trichlorosilane while an industrially advantageous output is ensured and the amount of the by-produced tetrachlorosilane is suppressed. This process does not require a bulky reduction apparatus for the by-produced tetrachlorosilane, can construct a closed system, which is a self-supporting silicon production process, can easily control the amount of the by-produced tetrachlorosilane and therefore can adjust the amount of tetrachlorosilane to be supplied to a tetrachlorosilane treating system when the tetrachlorosilane treating system is used.This process comprises a silicon deposition step for forming silicon by reacting trichlorosilane with hydrogen at a temperature of 1,300° C. or higher, a trichlorosilane forming step for forming trichlorosilane by contacting the exhausted gas in the above silicon deposition step to raw material silicon to react hydrogen chloride contained in the exhausted gas with silicon, and a trichlorosilane first recycling step for separating trichlorosilane from the exhausted gas in the trichlorosilane forming step and recycling it to the silicon deposition step.

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1. A silicon production process comprising:a silicon deposition step for forming silicon by reacting trichlorosilane with hydrogen at a temperature of 1,3000° C. or higher; a trichlorosilane forming step for forming trichlorosilane by contacting the exhausted gas in the silicon deposition step to ra

1. A silicon production process comprising:a silicon deposition step for forming silicon by reacting trichlorosilane with hydrogen at a temperature of 1,3000° C. or higher; a trichlorosilane forming step for forming trichlorosilane by contacting the exhausted gas in the silicon deposition step to raw material silicon to react hydrogen chloride contained in said exhausted gas with silicon; and a trichlorosilane first recycling step for separating trichlorosilane from the exhausted gas in the trichlorosilane forming step and recycling it to the silicon deposition step. 2. The process of claim 1, wherein the molar ratio of hydrogen to trichlorosilane is 10 or more in the silicon deposition step.3. A silicon production process comprising:a silicon deposition step for forming silicon by reacting trichlorosilane with hydrogen in a hydrogen/trichlorosilane molar ratio of 10 or more at a temperature of 1,3000° C. or higher; a trichlorosilane forming step for forming trichlorosilane by contacting the exhausted gas in the silicon deposition step to raw material silicon to react hydrogen chloride contained in said exhausted gas with silicon; a trichlorosilane first recycling step for separating trichlorosilane from the exhausted gas in the trichlorosilane forming step and recycling it to the silicon deposition step; a tetrachlorosilane reducing step for obtaining trichlorosilane by reducing tetrachlorosilane contained in the residue after the separation of trichlorosilane in the trichlorosilane first recycling step with hydrogen; and a trichlorosilane second recycling step for recycling the exhausted gas in the tetrachlorosilane reducing step to the trichlorosilane forming step. 4. A silicon production process comprising:a silicon deposition step for forming silicon by reacting trichlorosilane with hydrogen at a temperature of 1,3000° C. or higher; a trichlorosilane forming step for forming trichlorosilane by contacting the exhausted gas in the silicon deposition step to raw material silicon to react hydrogen chloride contained in said exhausted gas with silicon; a trichlorosilane first recycling step for separating trichlorosilane from the exhausted gas in the trichlorosilane forming step and recycling it to the silicon deposition step; a tetrachlorosilane reducing step for obtaining trichlorosilane by reducing part of tetrachlorosilane contained in the residue after the separation of trichlorosilane in the trichlorosilane first recycling step with hydrogen; and a trichlorosilane second recycling step for recycling the exhausted gas in the tetrachlorosilane reducing step to the trichlorosilane forming step; and a tetrachlorosilane supply step for supplying the balance of tetrachlorosilane supplied to the tetrachlorosilane reducing step to a tetrachlorosilane treating system, wherein the amount of tetrachlorosilane to be supplied to the tetrachlorosilane treating system is changed in the tetrachlorosilane supply step by changing the molar ratio of hydrogen to trichlorosilane to be supplied to the silicon deposition step. 5. The process of claim 3 or 4, wherein the reaction temperature in the tetrachlorosilane reducing step is 1,3000° C. or higher.6. The process of any one of claims 1, 3 and 4, wherein the exhausted gas which is contacted with the raw material silicon in the trichlorosilane forming step contains hydrogen chloride and tetrachlorosilane as main components.