A valve assembly for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool comprising a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexpo
A valve assembly for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool comprising a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and provides a diffusional path for transfer of all flowing fluid when the valve poppet is in an open position. The permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.
대표청구항▼
1. A permeable fluid valve assembly for delivery of a fluid from a fluid source to a downstream processing tool comprising:an inlet port for communication with an outlet of a fluid source for flowing fluid from the fluid source; and a permeable valve device positioned downstream from the fluid sourc
1. A permeable fluid valve assembly for delivery of a fluid from a fluid source to a downstream processing tool comprising:an inlet port for communication with an outlet of a fluid source for flowing fluid from the fluid source; and a permeable valve device positioned downstream from the fluid source comprising a valve member and a permeable valve seat member, wherein the valve device is adapted for movement between a sealing position that blocks fluid flow through the inlet port and an open position that permits fluid flow through the inlet port and valve device, wherein the valve member has a first end and a second end and the first end is positioned in the inlet port, wherein the valve seat member has an abutting first end having an outflow bore therethrough for acceptance of an extension attached to at least a section of the second end of the valve member, and wherein the abutting first end of the valve seat member comprises an insert that is conformingly configured for engagement with the second end of the valve member and fabricated of a fluid permeable material for transference of the fluid from the fluid source through the inlet port and the permeable section of the valve seat member to the downstream processing tool when the valve device is in the open position. 2. The permeable fluid valve assembly according to claim 1, wherein the fluid source is a pressurized tank.3. The permeable fluid valve assembly according to claim 2, wherein the valve member is an elongated structure comprising a first end extension having a reduced cross-section relative to the inlet port to provide sufficient area for passing fluid through the inlet port around the valve member to pass through the permeable section of the valve seat member.4. The permeable fluid valve assembly according to claim 3, wherein the valve seat member further comprises an outflow bore through the section fabricated of the fluid permeable material in the valve seat member for receiving a pin extension attached to the second end of the valve member, wherein the pin sealingly fits within the bore to allow movement in the bore but substantially reduces fluid passage through the bore from the fluid source.5. The permeable fluid valve assembly according to claim 4, further comprising a chamber surrounding a diaphragm that defines an interior volume isolated from pressure conditions upstream of the valve element and engaged with the pin of the valve member to control the movement of the valve member in a manner that retains the valve member in the sealing position until a pressure differential between the interior volume of the diaphragm and the interior of the chamber moves the valve member to the open position.6. The permeable fluid valve assembly according to claim 5, further comprising resilient means positioned near the first end of the valve member and holding the valve member in the sealing position.7. The permeable fluid valve assembly according to claim 4, wherein the pin extension has a reduced cross-section tip to provide sufficient space in the outflow bore for filling of the fluid source when the valve member is moved to the filly open position.8. The permeable fluid valve assembly according to claim 1, wherein the permeable section is an insert surrounding the outflow bore that traverses through the valve seating member.9. A method for discharging fluid from a fluid source container to a downstream processing tool while reducing uncontrolled discharge of fluid from the container, the method comprising:connecting an outlet port of a fluid source container to an inlet port of a valve assembly device comprising a valve member and a permeable valve seat member, wherein the valve device is adapted for movement between a sealing position that blocks fluid flow through the inlet port and an open position that permits fluid flow through the inlet port and valve device, wherein the valve member has a first end and a second end and the first end is positioned in the inlet port, wherein the valve seat member has an abutting first end having an outflow bore therethrough for acceptance of an extension attached to at least a section of the second end of the valve member, and wherein the abutting first end of the valve seat member comprises an insert that is conformingly configured for engagement with the second end of the valve member and fabricated of a fluid permeable material for transference of the fluid from the fluid source through the inlet port and the permeable section of the valve seat member to the downstream processing tool when the valve device is in the open position; and flowing fluid from the fluid source container through the inlet port, permeable valve seat member, outflow port to a downstream processing tool.10. A permeable valve assembly for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool comprising:an inlet port for communication with an outlet of the fluid source for flowing fluid from the fluid source; a valve poppet movingly engageable with a valve seating member, wherein the valve poppet has a first end and a second end and the first end is positioned in the inlet port; and a fluid permeable insert positioned between the second end of the valve poppet and the valve seating member, wherein the fluid permeable insert is isolated from flowing fluid when the valve poppet is sealingly engaged with the valve seating member thereby preventing fluid flow through the valve assembly, wherein the fluid permeable insert provides a diffusional path for transfer of all flowing fluid from the higher pressure fluid source when the valve poppet is not sealingly engaged with the valve seating member, and wherein the permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the second end of the valve poppet. 11. A permeable fluid valve assembly for delivery of a fluid from a fluid source to a downstream processing tool comprising;an inlet port for communication with an outlet of a fluid source for flowing fluid from the fluid source; and a valve device positioned downstream from the fluid source comprising a valve member and a valve seat member, wherein the valve device is adapted for movement between a sealing position that blocks fluid flow through the inlet port and an open position that permits fluid flow through the inlet port and valve device, wherein the valve member has a first end and a second end, wherein the first end is positioned in the inlet port, wherein the valve seat member has an abutting first end having a bore therethrough for acceptance of an extension attached to at least a section of the second end of the valve member, and wherein the extension at the second end of the valve member is fabricated of a fluid permeable material for transference of the fluid from the fluid source through the inlet port, the permeable extension of the valve member and the outflow bore of the valve seat member to the downstream processing tool when the valve device is in an open position. 12. The permeable fluid valve assembly according to claim 11, wherein the fluid source is a pressurized tank.13. The permeable fluid valve assembly according to claim 11, wherein the valve member is an elongated structure comprising a first end extension having a reduced cross-section relative to the inlet port to provide sufficient area for passing fluid through the inlet port around the valve member to pass through the permeable section of the valve seat member.14. The permeable fluid valve assembly according to claim 13, wherein the valve seat member further comprises a bore through the section fabricated of the fluid permeable material in the valve seat member for receiving a pin extension attached to the second end of the valve member, wherein the pin sealingly fits within the bore to allow movement in the bore but substantially reduces fluid passage through the bore from the fluid source.15. The permeable fluid valve assembly according to claim 14, further comprising a chamber surrounding a diaphragm that defines an interior volume isolated from pressure conditions upstream of the valve element and engaged with the pin of the valve member to control the movement of the valve member in a manner that retains the valve member in the sealing position until a pressure differential between the interior volume of the diaphragm and the interior of the chamber moves the valve member to the open position.16. The permeable fluid valve assembly according to claim 15, further comprising resilient means positioned near the first end of the valve member and holding the valve member in the sealing position.17. The permeable fluid valve assembly according to claim 14, wherein the pin extension has a reduced cross-section tip to provide sufficient space in the outflow bore for filling of the fluid source when the valve member is moved to the fully open position.18. A method for discharging fluid from a fluid source container to a downstream processing tool while reducing uncontrolled discharge of fluid from the container, the method comprising:connecting an outlet port of a fluid source container to an inlet port of a valve assembly device comprising a valve member and a valve seat member, wherein the valve device is adapted for movement between a sealing position that blocks fluid flow through the inlet port and an open position that permits fluid flow through the inlet port and valve device, wherein the valve member has a first end and a second end, wherein the first end is positioned in the inlet port, and wherein the valve seat member has an abutting first end having a outflow bore therethrough for acceptance of an extension attached to at least a section of the second end of the valve member, and wherein the extension at the second end of the valve member is fabricated of a fluid permeable material for transference of the fluid from the fluid source container through the inlet port, through the permeable extension of the valve member and the outflow bore of the valve seat member to the downstream processing tool when the valve device is in an open position; and flowing fluid from the fluid source container through the inlet port, permeable valve member extension, outflow port to a downstream processing tool. 19. A permeable valve assembly for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool, said permeable valve assembly comprising a valve poppet movingly engageable with a valve seating member, and a fluid permeable insert positioned between the valve poppet and the valve seating member,wherein the fluid permeable insert is isolated from flowing fluid when the valve poppet is sealingly engaged with the valve seating member thereby preventing fluid flow through the valve assembly, wherein the fluid permeable insert provides a diffusional path for transfer of all flowing fluid from the higher pressure fluid source when the valve poppet is not sealingly engaged with the valve seating member, and wherein the fluid permeable insert comprises a vapor/gas-permeable and liquid-impermeable material and can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.
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이 특허에 인용된 특허 (8)
Hughes Allan B. (Wilmington DE) Dear Terrence A. (Elkton MD), Control valve.
Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds.
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