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A fluid storage and dispensing apparatus, including a fluid storage and dispensing vessel having an interior volume, in which the interior volume contains a physical adsorbent sorptively retaining a fluid thereon and from which the fluid is desorbable for dispensing from the vessel, and a dispensing

A fluid storage and dispensing apparatus, including a fluid storage and dispensing vessel having an interior volume, in which the interior volume contains a physical adsorbent sorptively retaining a fluid thereon and from which the fluid is desorbable for dispensing from the vessel, and a dispensing assembly coupled to the vessel for dispensing desorbed fluid from the vessel. The physical adsorbent includes a monolithic carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of the adsorbent including slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity including micropores of diameter <2 nanometers; and (c) having been formed by pyrolysis and optional activation, at temperature(s) below 1000° C., and having a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter.

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1. A carbon monolith prepared by a method comprising: molding a pyrolyzable material into a monolithic shape; and pyrolyzing the pyrolyzable material under pyrolysis conditions thereby producing a carbon monolith that is characterized by at least one of the following characteristics:(a) a fill densi

1. A carbon monolith prepared by a method comprising: molding a pyrolyzable material into a monolithic shape; and pyrolyzing the pyrolyzable material under pyrolysis conditions thereby producing a carbon monolith that is characterized by at least one of the following characteristics:(a) a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 grams arsine per liter of carbon monolith; (b) at least 30% of overall porosity of said carbon monolith comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter <2 nanometers; and (c) a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter, wherein said pyrolysis conditions comprise a temperature below 1000° C. 2. The carbon monolith of claim 1, having a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 grams arsine per liter of carbon monolith.3. The carbon monolith of claim 1, wherein at least 30% of overall porosity of said carbon monolith comprises slit-shaped pores having a size in a range of from about 0.3 about 0.72 nanometer, and at least 20% of the overall porosity comprises micropores of diameter <2 nanometers.4. The carbon monolith of claim 1, wherein said pyrolysis conditions comprise a temperature below 1000° C., and said carbon monolith has a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter.5. The carbon monolith of claim 1, having a form that is selected from the group consisting of blocks, bricks, and boules.6. The carbon monolith of claim 1, wherein said method further comprises an activating step.7. The carbon monolith of claim 6, wherein said activating step comprises exposure of the monolith to a non-oxidizing elevated temperature environment, followed by exposure of the monolith to an oxidizing environment.8. The carbon monolith of claim 7, wherein said non-oxidizing environment comprises nitrogen.9. The carbon monolith of claim 7, wherein said oxidizing environment comprises carbon dioxide.10. The carbon monolith of claim 7, wherein said oxidizing environment comprises steam.11. The carbon monolith of claim 7, wherein the monolith is cooled in a non-oxidizing environment after said exposure to said oxidizing environment.12. The carbon monolith of claim 1, disposed in a gas storage and dispensing vessel.13. The carbon monolith of claim 12, disposed in said gas storage and dispensing vessel by a process that comprises charging the vessel with a fluid for which the monolith has sorptive affinity, adsorbing the fluid thereon; sealing the vessel to enclose the monolith holding adsorbed fluid thereon in an interior volume of the vessel; and coupling the vessel to a dispensing assembly for dispensing desorbed fluid from the vessel.14. The carbon monolith of claim 13, conforming in size and shape to the interior volume of the vessel.15. The carbon monolith of claim 13, occupying at least 60% of the interior volume of the vessel.16. The carbon monolith of claim 13, occupying from about 75% to about 95% of the interior volume of the vessel.17. The carbon monolith of claim 13, comprising a multiplicity of discrete articles.18. The carbon monolith of claim 17, wherein each of said discrete articles has a length that is between 0.3 and 1.0 times the height of the intereior volume of the vessel, and a cross-sectional area that is between 0.1 and 0.5 times the cross-sectional area of the interior volume of the vessel.19. The carbon monolith of claim 17, wherein each of said discrete articles has a rectangular parallelepiped shape.20. The carbon monolith of claim 17, wherein each of said discrete articles is laterally and/or longitudinally abutted in surface contact with adjacent discrete articles in the interior volume of the vessel.21. The carbon monolith of claim 17, wherein each of said discrete articles has a solid cylinder form.22. The carbon monolith of claim 17, wherein each of said discrete articles has a length to cross-sectional dimension ratio, L/D, that is from about 2 to about 20, where L is the length or major axis dimension of the article, and D is the transverse or minor axis dimension.23. The carbon monolith of claim 17, wherein each of said discrete articles has a length to cross-sectional dimension ratio, L/D, that is from about 4 to about 15, where L is the length or major axis dimension of the article, and D is the transverse or minor axis dimension.24. The carbon monolith of claim 13, comprising less than 75 discrete monolithic articles.25. The carbon monolith of claim 13, comprising less than 20 discrete monolithic articles.26. The carbon monolith of claim 13, comprising less than 8 discrete monolithic articles.27. The carbon monolith of claim 13, comprising less than 4 discrete monolithic articles.28. The carbon monolith of claim 12, wherein said pyrolyzable material is pyrolyzed in situ in the gas storage and dispensing vessel.29. The carbon monolith of claim 1, wherein said pyrolyzable material comprises an organic resin.30. The carbon monolith of claim 1, wherein said pyrolyzable material comprises a material selected from the group consisting of polyvinylidene chloride, phenol-formaldehyde resins, polyfurfuryl alcohol, coconut shells, peanut shells, peach pits, olive stones, polyacrylonitrile, and polyacrylamide.31. The carbon monolith of claim 1, wherein said pyrolyzable material is pyrolyzed in situ in a gas storage and dispensing vessel.32. The carbon monolith of claim 1, wherein said pyrolyzable material comprises PVDC resin.33. The carbon monolith of claim 1, further comprising a doping agent.34. The carbon monolith of claim 33, wherein said doping agent comprises at least one agent selected from the group consisting of boric acid, sodium tetraborate, sodium silicate, and disodium hydrogen phosphate.35. The carbon monolith of claim 1, wherein said method further comprises disposing said monolith in a gas storage and dispensing vessel; charging to the vessel a fluid for which said monolith has sorptive affinity, to adsorb the fluid thereon; sealing the vessel to enclose said monolith holding adsorbed fluid thereon in an interior volume of the vessel; and coupling the vessel to a dispensing assembly for dispensing desorbed fluid from the vessel.36. The carbon monolith of claim 35, wherein the fluid comprises a gas having utility in semiconductor manufacturing.37. The carbon monolith of claim 35, wherein the fluid comprises a gas selected from the group consisting of hydrides, halides and organometallic gaseous reagents.38. The carbon monolith of claim 35, wherein the fluid comprises a gas selected from the group consisting of silane, germane, arsine, phosphine, phosgene, diborane, germane, ammonia, stibine, hydrogen sulfide, hydrogen selenide, hydrogen telluride, nitrous oxide, hydrogen cyanide, ethylene oxide, deuterated hydrides, halide (chlorine, bromine, fluorine, and iodine) compounds, and organometallic compounds.39. The carbon monolith of claim 35, wherein the fluid has a pressure in said interior volume not exceeding about 2500 torr.40. The carbon monolith of claim 35, wherein the fluid has a pressure in said interior volume not exceeding about 2000 torr.41. The carbon monolith of claim 35, wherein the fluid has a pressure in said interior volume in a range of from about 20 to about 1800 torr.42. The carbon monolith of claim 35, wherein the fluid has a pressure in said interior volume in a range of from about 20 to about 1200 torr.43. The carbon monolith of claim 35, wherein the fluid has a subatmospheric pressure in said interior volume.44. The carbon monolith of claim 35, wherein the fluid has a pressure in said interior volume in a range of from about 20 to about 750 torr.45. The carbon monolith of claim 35, wherein the vessel comprises a material of construction selected from the group consisting of metals, glasses, ceramics, vitreous materials, polymers, and composite materials.46. The carbon monolith of claim 35, wherein the vessel comprises a metal material of construction.47. The carbon monolith of claim 46, wherein said metal is selected from the group consisting of steel, stainless steel, aluminum, copper, brass, bronze, and alloys thereof.48. The carbon monolith of claim 35, wherein the monolith has at least 20% of its porosity in pores with a diameter of less than 2 nanometers.49. The carbon monolith of claim 35, wherein the fluid comprises boron trifluoride.50. The carbon monolith of claim 35, wherein the vessel has a rectangular parallelepiped shape.51. The carbon monolith of claim 35, wherein the vessel has an elongate shape with a square cross-section.52. The carbon monolith of claim 35, wherein the vessel has a cylindrical shape.53. The carbon monolith of claim 35, wherein the vessel is of a vertically upstanding configuration.