[특허]Fluid sealing system for a crystal puller

MEMC Electronics Materials, Inc.

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특허 상세정보

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내보내기 페이스북 공유 트위터 공유 카카오톡 공유

Fluid sealing system for a crystal puller

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	C30B-015/20
미국특허분류(USC)	117/208; 117/014; 117/015; 117/215; 117/217
출원번호	US-0465528 (2003-06-19)
발명자 / 주소	Cherko, Carl F. Cook, Robert D.
출원인 / 주소	MEMC Electronics Materials, Inc.
인용정보	피인용 횟수 : 2 인용 특허 : 15

초록
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A fluid sealing system is provided for use in a crystal puller for growing a monocrystalline ingot. The crystal puller has a housing, a fluid flow path contained in the housing, and a fluid passage through a wall of the housing for passage of fluid. The fluid sealing system includes a fluid connector head adapted for connection to the fluid passage and to the fluid flow path to establish fluid communication between the fluid flow path and the outside of the housing. The head has a port adapted for fluid communication with the fluid passage through the wall of the housing. First and second seals around the port are adapted for sealing engagement with the head. A space is defined generally between the first and second seals, and a leak detector is arranged to monitor the space for detecting fluid leakage past at least one of the seals.

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1. A fluid sealing system for use in a crystal puller for growing a monocrystalline ingot from molten semiconductor source material, the crystal puller having a housing enclosing a crystal growth chamber, a crucible contained in the growth chamber for holding the molten semiconductor source material, a heater in thermal communication with the crucible for heating the crucible, a pulling mechanism positioned above the crucible for pulling the ingot from the molten source material held by the crucible, a fluid flow path contained in the housing, and a fluid passage through a wall of the housing for passage of fluid between outside the housing and the fluid flow path, the fluid sealing system comprising:a fluid connector head adapted for connection to the fluid passage and to the fluid flow path to establish fluid communication between the fluid flow path and the outside of the housing, the head having a port adapted for fluid communication with the fluid passage through the wall of the housing, a first seal around the port and adapted for sealing engagement with the head, a second seal around the port and adapted for sealing engagement with the head, a space defined generally between the first and second seals, and a leak detector arranged to monitor the space for detecting fluid leakage past at least one of the first and second seals. 2. A fluid sealing system as set forth in claim 1 wherein the space is disposed such that any fluid leakage from the first or second seals passes through the space, and wherein the leak detector extends from the space.3. A fluid sealing system as set forth in claim 2 wherein the leak detector includes a vent passage extending from the space between the seals through the housing wall such that any fluid leakage from at least one of the first and second seals is detectable from outside the housing.4. A fluid sealing system as set forth in claim 3 wherein the fluid flow path is adapted for receiving a liquid, and wherein liquid leaking past the first seal passes through the space and through the vent passage to an opening disposed such that the liquid is visible from outside the housing.5. A fluid sealing system as set forth in claim 1 wherein the housing is adapted to be maintained at a predetermined pressure and wherein the second seal is arranged relative to the port and the first seal to promote maintenance of the predetermined pressure within the housing when the fluid connector head is connected to the fluid passage.6. A fluid sealing system as set forth in claim 5 wherein the predetermined pressure is less than atmospheric pressure, and wherein the leak detector includes a sensor within the housing for sensing fluid leakage drawn into the housing past the second seal.7. A fluid sealing system as set forth in claim 1 wherein a central axis of the first seal is substantially coincident with a central axis of the second seal.8. A fluid sealing system as set forth in claim 7 wherein the first and second seals are substantially coplanar.9. A fluid sealing system as set forth in claim 8 wherein the first and second seals are O-ring seals.10. A fluid sealing system as set forth in claim 1 in combination with the fluid flow path, and wherein the fluid flow path extends through a heat exchanger.11. A fluid sealing system as set forth in claim 10 further comprising a second fluid connector head having a second port adapted for fluid communication with the fluid flow path and a second fluid passage through the wall of the housing, first and second seals around the port and adapted for sealing engagement with the head, a space defined between the first and second seals, and a leak detector arranged to monitor the space for detecting fluid leakage past at least one of the first and second seals.12. A fluid sealing system as set forth in claim 1 wherein the seals are held by the fluid connector head.13. A crystal puller for growing a monocrystalline ingot from molten semiconductor source material, the crystal puller comprising:a housing enclosing a crystal growth chamber and having a wall; a crucible supported in the chamber for containing the molten semiconductor source material; a heater in thermal communication with the crucible for heating the crucible to a temperature sufficient to melt the semiconductor source material held by the crucible; a pulling mechanism positioned above the crucible for pulling the ingot from the molten source material held by the crucible; a heat exchanger disposed above the molten source material and interposed between the ingot and the crucible as the ingot is pulled from the molten source material, the heat exchanger being exposed to heat radiated from the ingot for increasing the rate at which the ingot is cooled and thereby increasing an axial temperature gradient of the ingot as the ingot is pulled from the molten source material, the heat exchanger including a fluid flow path; a fluid passage through the wall of the housing for passage of fluid between outside the housing and the fluid flow path; a sealing system for inhibiting fluid leakage from the fluid flow path and for inhibiting fluid leakage into the housing, the sealing system including a fluid connector head adapted for connection to the fluid passage and to the fluid flow path to establish fluid communication between the fluid flow path and the outside of the housing, the head having a port adapted for fluid communication with the fluid passage through the wall of the housing, a first seal around the port and adapted for sealing engagement with the head, a second seal around the port and adapted for sealing engagement with the head, a space being defined generally between the first and second seals, and a leak detector arranged to monitor the space for detecting fluid leakage past at least one of the first and second seals. 14. A crystal puller as set forth in claim 13 wherein the space is disposed such that any fluid leakage from the first and second seals passes through the space, and wherein the leak detector extends from the space.15. A crystal puller as set forth in claim 14 wherein the leak detector includes a vent passage extending from the space between the seals through the housing wall such that any fluid leakage from at least one of the first and second seals is detectable from outside the housing.16. A crystal puller as set forth in claim 15 wherein the cooling fluid is a liquid, and wherein liquid leaking past the first seal passes through the space and through the vent passage to an opening disposed such that the liquid is visible from outside the housing.17. A crystal puller as set forth in claim 13 wherein the housing is adapted to be maintained at a predetermined pressure and wherein the second seal is arranged relative to the port and the first seal to promote maintenance of the predetermined pressure within the housing when the fluid connector head is connected to the fluid passage.18. A crystal puller as set forth in claim 17 wherein the predetermined pressure is less than atmospheric pressure, and wherein the leak detector includes a sensor within the housing for sensing fluid leakage drawn into the housing past the second seal.19. A crystal puller as set forth in claim 13 wherein a central axis of the first seal is substantially coincident with a central axis of the second seal.20. A crystal puller as set forth in claim 19 wherein the first and second seals are substantially coplanar.21. A crystal puller as set forth in claim 20 wherein the first and second seals are O-ring seals.22. A crystal puller as set forth in claim 13 further comprising a second fluid connector head having a second port adapted for fluid communication with the fluid flow path and a second fluid passage in the wall of the housing, first and second seals around the port and adapted for sealing engagement with the head, a space defined between the first and second seals, and a leak detector adapted to sense fluid leakage past at least one of the first and second seals.23. A crystal puller as set forth in claim 22 wherein the first and second fluid connector heads are secured to the housing such that respective first and second seals sealingly engage the housing.

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특허 상세정보

Fluid sealing system for a crystal puller

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이 특허에 인용된 특허 (15)

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특허 상세정보

Fluid sealing system for a crystal puller

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이 특허에 인용된 특허 (15)

이 특허를 인용한 특허 (2)

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IPC 상세정보(version : 201201)

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