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Impedance matching device provided with reactance-impedance table

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01R-027/00
  • H03H-007/38
출원번호 US-0355979 (2003-01-30)
우선권정보 JP-0248824 (2002-08-28); JP-0158980 (2002-05-31); JP-0031774 (2002-02-08)
발명자 / 주소
  • Nishimori, Yasuhiro
  • Omae, Shuji
  • Mito, Masakatsu
  • Ishida, Yuji
  • Itadani, Koji
출원인 / 주소
  • Daihen Corporation
대리인 / 주소
    Hamre, Schumann, Mueller &
인용정보 피인용 횟수 : 124  인용 특허 : 12

초록

An impedance matching device is provided, for which the electric characteristics at an output terminal are accurately analyzed. The matching device is provided with an input detector for detecting RF voltage and current at the input terminal, and an output detector for detecting RF voltage outputted

대표청구항

1. An impedance matching device comprising:an input terminal connect to a high frequency power source; an output terminal connected to a load; a reactance circuit including at least one variable reactor, the circuit arranged between the input terminal and the output terminal; an input detector that

이 특허에 인용된 특허 (12)

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