Methods for making and using self-constrained low temperature glass-ceramic unfired tape for microelectronics
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B32B-031/26
C04B-037/04
출원번호
US-0778627
(2004-02-13)
발명자
/ 주소
Lautzenhiser, Frans P.
Amaya, Edmar M.
Hochheimer, J. Thomas
출원인 / 주소
Heraeus Incorporated
대리인 / 주소
Akin Gump Strauss Hauer &
인용정보
피인용 횟수 :
1인용 특허 :
40
초록▼
A monolithic self-constrained green body tape for use in low temperature ceramic co-firing is provided. The tape contains at least two layers: one low temperature ceramic layer containing particles of a glass, a ceramic, and an organic binder, and a self-constraining layer containing a refractory ce
A monolithic self-constrained green body tape for use in low temperature ceramic co-firing is provided. The tape contains at least two layers: one low temperature ceramic layer containing particles of a glass, a ceramic, and an organic binder, and a self-constraining layer containing a refractory ceramic and a wetting agent for the glass in the first layer. When the tape is fired at a sintering temperature of the low temperature ceramic layer, densification occurs in the z (thickness) direction, but essentially no shrinkage (less than about 1%) occurs in the x-y planes. A method for forming a multilayer green body tape using simultaneous wet on wet ceramic slurry deposition is also provided. A dense, monolithic, low temperature, co-fired, self-constrained, multicomponent structure is also provided. The structure contains at least two multilayer ceramic substrates having electronic circuit components mounted thereon or therein. Each multilayer ceramic substrate contains at least two layers with one being a self-constraining layer.
대표청구항▼
1. In a method for producing a monolithic structure for a multilayer electronic circuit or hydraulic module which method comprises steps of providing green body ceramic tapes each having an x-y plane, applying electronic circuit components to the tapes, stacking the tapes in a z-direction, laminatin
1. In a method for producing a monolithic structure for a multilayer electronic circuit or hydraulic module which method comprises steps of providing green body ceramic tapes each having an x-y plane, applying electronic circuit components to the tapes, stacking the tapes in a z-direction, laminating the stacked tapes, heating the laminate of stacked tapes to remove organic binder from the tapes, and co-firing the binderless laminate to produce the monolithic structure with shrinkage substantially only in the z-direction and substantially no shrinkage in the x-y planes, the improvement comprising: the step of providing the green body ceramic tapes comprises providing at least one tape comprising: (a) a first low temperature ceramic layer comprising particles of a first ceramic, a first glass and a first organic binder; and (b) a self-constraining layer comprising particles of a refractory ceramic, a wetting agent for the first glass, and a second organic binder, wherein the wetting agent comprises at least one selected from the group consisting of a silica, an alkali metal oxide, and a silicate, and the step of co-firing is carried out without application of an external constraint.2. The method according to claim 1, wherein the refractory ceramic comprises at least one selected from the group consisting of an inorganic oxide, a metal silicate, a metal carbide, a metal bromide, a metal nitride, and a mineral.3. The method according to claim 2, wherein the inorganic oxide comprises at least one selected from the group consisting of alumina, zirconia, titania, anorthite, mullite, perovskite, and silica.4. The method according to claim 1, wherein the wetting agent comprises lithium metasilicate.5. The method according to claim 1, wherein the self-constraining layer further comprises at least one glass.6. The method according to claim 1, wherein the first low temperature ceramic layer further comprises a nucleating agent.7. The method according to claim 6, wherein the nucleating agent comprises at least one elected from the group consisting of titania, zirconia, anorthite, molybdenum oxide, tungsten oxide, and magnesium cobalt spinel.8. The method according to claim 1, wherein the first ceramic and the refractory ceramic comprise the same material.9. The method according to claim 1, wherein shrinkage in the x-y planes is less than about 1%.10. The method according to claim 1, wherein shrinkage in the x-y planes is not more than about 0.2%.
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이 특허에 인용된 특허 (40)
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Haertling Carol (Santa Ana CA) Shapiro Andrew A. (Orange CA) Goodman Charles A. (Garden Grove CA) Pond Ramona G. (Downey CA) Washburn Robert D. (Malibu CA) McClanahan Robert F. (Valencia CA) Gonzalez, Low-temperature-cofired-ceramic (LTCC) tape structures including cofired ferromagnetic elements, drop-in components and.
Fasano Benjamin V. ; Goldmann Lewis S. ; Indyk Richard F. ; Kamath Sundar M. ; Langenthal Scott I. ; Reddy Srinivasa S., Method and materials for increasing the strength of crystalline ceramic.
Flaitz Philip L. (Hopewell Junction NY) Flanagan Arlyne M. (Staatsburg NY) Harvilchuck Joseph M. (Billings NY) Herron Lester W. (Hopewell Junction NY) Knickerbocker John U. (Hopewell Junction NY) Nuf, Method and means for co-sintering ceramic/metal MLC substrates.
Fasano Benjamin V. ; Indyk Richard F. ; Kamath Sundar M. ; Langenthal Scott I. ; Reddy Srinivasa S., Method for producing ceramic surfaces with easily removable contact sheets.
Mikeska Kurt R. (Wilmington DE) Schaefer Daniel T. (Newark DE) Jensen Richard H. (Wilmington DE), Method for reducing shrinkage during firing of green ceramic bodies.
Bezama Raschid J. ; Cohn Michael A. ; Fasano Benjamin V. ; Johnson Gregory M. ; Rita Robert A. ; Vallabhaneni Rao V. ; Wier-Cavalieri Nancy A., Pastes for improved substrate dimensional control.
Dubetsky Derry J. (Wappingers Falls NY) Herron Lester W. (Hopewell Junction NY) Master Raj N. (Wappingers Falls NY), Process for flattening glass-ceramic substrates.
Arnold Anthony F. (Poughkeepsie NY) Schmeckenbecher Arnold F. (Poughkeepsie NY), Process for forming a high density metallurgy system on a substrate and structure thereof.
Lautzenhiser, Frans P.; Amaya, Edmar M.; Hochheimer, J. Thomas, Self-constrained low temperature glass-ceramic unfired tape for microelectronics and methods for making and using the same.
Fathy Aly Eid ; Geller Bernard Dov ; Perlow Stewart Mark ; Rosen Arye ; Johnson Henry Charles, Switch structure for antennas formed on multilayer ceramic substrates.
Wang, Carl Baasun; Hang, Kenneth Warren; Needes, Christopher Roderick Stewart, Tape composition and process for internally constrained sintering of low temperature co-fired ceramic.
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