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Cutting thin layer(s) from semiconductor material(s) 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/301
  • H01L-021/46
출원번호 US-0268776 (2002-10-11)
우선권정보 FR-0005549 (2000-04-14)
발명자 / 주소
  • Roche, Michel
출원인 / 주소
  • S.O.I. Tec Silicon on Insulator Technologies S.A.
대리인 / 주소
    Winston &
인용정보 피인용 횟수 : 41  인용 특허 : 5

초록

A method of cutting at least one thin layer from a substrate or ingot forming element for an electronic or optoelectronic or optical component or sensor. This method includes the steps of forming a weakened zone in the substrate or ingot forming element, wherein the weakened zone has a thickness tha

대표청구항

1. A method of cutting at least one thin layer from a substrate or ingot forming element for an electronic, optoelectronic or optical component or sensor, the method comprising:forming a weakened zone in the substrate or ingot forming element, the weakened zone having a thickness that corresponds to

이 특허에 인용된 특허 (5)

  1. Henley Francois J. ; Cheung Nathan W., Controlled cleaning process.
  2. Benea Paolo,ITX ; Mancosu Federico,ITX, Method and apparatus for cleaning vulcanization molds for elastomer material articles.
  3. Benea Paolo,ITX ; Mancosu Federico,ITX, Method and apparatus for cleaning vulcanization molds for elastomer material articles.
  4. Aspar Bernard,FRX ; Bruel Michel,FRX ; Poumeyrol Thierry,FRX, Method of producing a thin layer of semiconductor material.
  5. Bruel Michel (Veurey FRX), Process for the production of thin semiconductor material films.

이 특허를 인용한 특허 (41)

  1. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu; Atsumi, Kazuhiro; Muramatsu, Kenichi, Laser beam machining method.
  2. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu; Atsumi, Kazuhiro; Muramatsu, Kenichi, Laser beam machining method.
  3. Fukumitsu, Kenshi; Fukuyo, Fumitsugu; Uchiyama, Naoki, Laser processing method.
  4. Fukuyo, Fumitsugu; Fukumitsu, Kenshi, Laser processing method.
  5. Fukuyo, Fumitsugu; Fukumitsu, Kenshi, Laser processing method.
  6. Fukuyo, Fumitsugu; Fukumitsu, Kenshi, Laser processing method.
  7. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu, Laser processing method and laser processing apparatus.
  8. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu, Laser processing method and laser processing apparatus.
  9. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu, Laser processing method and laser processing apparatus.
  10. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu, Laser processing method and laser processing apparatus.
  11. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu, Laser processing method and laser processing apparatus.
  12. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu, Laser processing method and laser processing apparatus.
  13. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Sugiura, Ryuji, Method for cutting semiconductor substrate.
  14. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Method for dicing substrate.
  15. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu, Method of cutting a substrate and method of manufacturing a semiconductor device.
  16. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu, Method of cutting a substrate, method of cutting a wafer-like object, and method of manufacturing a semiconductor device.
  17. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu, Method of cutting a substrate, method of processing a wafer-like object, and method of manufacturing a semiconductor device.
  18. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu, Method of cutting a wafer-like object and semiconductor chip.
  19. Fukuyo, Fumitsugu; Fukumitsu, Kenshi, Method of cutting an object to be processed.
  20. Fukuyo, Fumitsugu; Fukumitsu, Kenshi, Method of cutting an object to be processed.
  21. Fukuyo, Fumitsugu; Fukumitsu, Kenshi, Method of cutting object to be processed.
  22. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Sugiura, Ryuji, Method of cutting semiconductor substrate.
  23. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Sugiura, Ryuji, Method of cutting semiconductor substrate.
  24. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Sugiura, Ryuji, Method of cutting semiconductor substrate via modified region formation and subsequent sheet expansion.
  25. Shreter, Yury Georgievich; Rebane, Yury Toomasovich; Mironov, Aleksey Vladimirovich, Method of laser separation of the epitaxial film or the epitaxial film layer from the growth substrate of the epitaxial semiconductor structure (variations).
  26. Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki; Wakuda, Toshimitsu, Method of manufacturing a semiconductor device formed using a substrate cutting method.
  27. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Semiconductor chip manufacturing method.
  28. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  29. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  30. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  31. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  32. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  33. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  34. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  35. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  36. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  37. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  38. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  39. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  40. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
  41. Fujii, Yoshimaro; Fukuyo, Fumitsugu; Fukumitsu, Kenshi; Uchiyama, Naoki, Substrate dividing method.
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