Drained water recovery system and method for operating the same
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G05D-027/02
G05D-021/02
C02F-001/00
출원번호
US-0604127
(2003-06-27)
발명자
/ 주소
Huang, Cheng-Chung
Sung, Kun-Sen
출원인 / 주소
Powerchip Semiconductor Corp.
대리인 / 주소
Jiang Chyun IP Office
인용정보
피인용 횟수 :
1인용 특허 :
5
초록▼
A drained water recovery system of a process device and recovering method thereof is provided. The recovering method includes using a conductivity meter to measure the conductivity of the drained water so that the drained water with different degrees of conductivity are channeled to different pipeli
A drained water recovery system of a process device and recovering method thereof is provided. The recovering method includes using a conductivity meter to measure the conductivity of the drained water so that the drained water with different degrees of conductivity are channeled to different pipelines. Furthermore, another conductivity meter and a total organic carbon analyzer together with an interim tank liquid level controller sorts out the recovered water. Thereafter, according to the properties of the recovered water, the drained water is re-used to improve recycling efficiency.
대표청구항▼
1. A drained water recovery system, comprising:a processing station with at least a water outlet; a first three-way valve connected to the water outlet; a first conductivity analyzer set up on a first pipeline between the processing station and the first three-way valve; a first controller electrica
1. A drained water recovery system, comprising:a processing station with at least a water outlet; a first three-way valve connected to the water outlet; a first conductivity analyzer set up on a first pipeline between the processing station and the first three-way valve; a first controller electrically connected to the first three-way valve and the first conductivity analyzer such that the first three-way valve is activated according to a control signal from the first conductivity analyzer; a first recovery tank connected to a first drained water outlet of the first three-way valve; a buffer tank connected to the first recovery tank; a first interim tank connected to the buffer tank; a first raw water tank and a second raw water tank which are both connected to the interim tank; a first valve set up along a second pipeline between the interim tank and the first raw water tank; a second valve set up along a third pipeline between the interim tank and the second raw water tank; a first pump and a second pump set up along the second pipeline and the third pipeline; and a total organic carbon analyzer connected to the buffer tank and electrically connected to the first valve and the second valve for controlling the opening and closing of the first and the second valve. 2. The drained water recovery system of claim 1, wherein the system further comprises a second recovery tank connected to a second drained water outlet of the first three-way valve.3. The drained water recovery system of claim 1, wherein the system further comprises a third valve set up along a fifth pipeline between the buffer tank and the interim tank.4. The drained water recovery system of claim 3, wherein the system further comprises a second conductivity analyzer connected to the buffer tank and electrically connected to the third valve for controlling the opening and closing of the third valve.5. The drained water recovery system of claim 1, wherein the system further comprises a liquid level measuring device set up inside the interim tank for measuring the liquid level inside the interim tank.6. A method for recovering drained water of a processing station, comprising the steps of:draining water from the processing station; measuring the conductivity of the drained water using a conductivity analyzer; channeling the drained water to a recovery tank by controlling a three-way valve according to the measured conductivity; channeling the drained water from the recovery tank into a buffer tank; channeling the drained water from the buffer tank into an interim tank; and analyzing the drained water inside the buffer tank using a total organic carbon analyzer and re-directing the drained water inside the interim tank into a first raw water tank or a second raw water tank. 7. The method of claim 6, wherein the step of analyzing the drained water inside the buffer tank using the total organic carbon analyzer and re-directing the drained water inside the interim tank into the first raw water tank or the second raw water tank further comprising the steps of:(a) performing a first total organic carbon value analysis on the drained water inside the buffer tank to determine whether the total organic carbon value of the drained water is lower than a standard value; (b) determining whether the liquid level inside the interim tank is at a first high liquid level when the total organic carbon value of the first total organic carbon value analysis is lower than the standard value; (c) switching on a first pump, opening a first valve and switching off a second valve to channel the drained water into the first raw water tank when the liquid level inside the interim tank is at the first high liquid level; (d) performing a second total organic carbon value analysis on the drained water inside the buffer tank to determine whether the total organic carbon value of the second total organic carbon value analysis is lower than the standard value; (e) determining whether the liquid level inside the interim tank is at a second high liquid level when the total organic carbon value of the second total organic carbon value analysis is lower than the standard value, wherein the second high liquid level is higher than the first high liquid level; (f) switching on a second pump to speed up the channeling of drained water to the first raw water tank when the liquid level inside the interim tank is at the second high liquid level; (g) determining whether the liquid level inside the interim tank is at a middle level when the total organic carbon value of the first total organic carbon value analysis is higher than the standard value in step (a); (h) switching on the first and the second pump, opening the second valve and switching off the first valve to channel the drained water into the second raw water tank when the liquid level inside the interim tank is at the middle level; (i) performing a third total organic carbon analysis of the drained water inside the buffer tank to determine whether the total organic carbon value of the third total organic carbon analysis is lower than the standard value; (j) determining whether the liquid level inside the interim tank is at a low liquid level when the total organic carbon value of the third total organic carbon analysis is lower than the standard vale; and (k) switching off the first and the second pump when the liquid level inside the interim tank is lower than the low liquid level. 8. The method of claim 7, wherein in step (d), the following steps are carried out when the total organic carbon value of the second total organic carbon analysis is higher than the standard value:(l) determining whether the liquid level inside the interim tank is at the middle level; (m) switching on the first and the second pump, opening the second valve and closing the first valve to channel the drained water into the second raw water tank when the liquid level inside the interim tank is at the middle level; (n) performing a fourth total organic carbon analysis on the drained water inside the buffer tank to determine whether the total organic carbon value of the fourth total organic carbon analysis is lower than the standard value; (o) determining whether the liquid level inside the interim tank is at the low liquid level when the total organic carbon value of the fourth total organic carbon analysis is lower than the standard value; and (p) switching off the first pump and the second pump when the liquid level inside the interim tank is at the low liquid level. 9. The method of claim 8, wherein in step (n), the following steps are carried out when the total organic carbon value of the fourth total organic carbon analysis is higher than the standard value:determining whether the liquid level inside the interim tank is at the low liquid level; and switching off the first pump and the second pump when the liquid level inside the interim tank is at the low liquid level. 10. The method of claim 8, wherein in step (o), the following steps are carried out when the liquid level inside the interim tank is higher than the low liquid level:running the first pump and the second pump for a period of time; and switching off the first pump and the second pump. 11. The method of claim 7, wherein in step (f), the following steps are carried out when the liquid level inside the interim tank is lower than the second high liquid level:determining whether the liquid level inside the interim tank is at the middle liquid level; and switching off the first pump when the liquid level inside the interim tank is at the middle liquid level. 12. The method of claim 7, wherein in step (i), the following steps are carried out when the total organic carbon value of the third total organic carbon analysis is higher than the standard value:determining whether the liquid level inside the interim tank is at the low liquid level; and switching off the first pump and the second pump when the liquid level inside the interim tank is lower than the low liquid level. 13. The method of claim 7, wherein in step (j), the following steps are carried out when the liquid level inside the interim tank is higher than the low liquid level:running the first pump and the second pump for a period of time; and switching off the first pump and the second pump. 14. The recovery method of claim 7, wherein after step (f), further comprising the steps of:performing a fifth total organic carbon analysis on the drained water inside the buffer tank and determining whether the total organic carbon value is lower than the standard value, determining whether the liquid level inside the interim tank is at the first high liquid level when the total organic carbon value of the fifth total organic carbon analysis is lower than the preset standard value; and determining whether the liquid level inside the interim tank is at the middle liquid level when the total organic carbon value of the fifth total organic carbon analysis is not lower than the preset standard value; and determining whether the liquid level inside the interim tank is at the first high liquid level; carrying out the operation in step (c) when the liquid level inside the interim tank is at the first high liquid level; and carrying out the operation in step (f) when the liquid level inside the interim tank is not at the first high liquid level. 15. A method of recovering drained water from a processing station, comprising the steps of:(a) draining water from the processing station; (b) channeling the drained water to one of a plurality of recovery tanks according to the conductivity of the drained water; (c) channeling the drained water inside one of the plurality of recovery tanks into a buffer tank; (d) channeling the drained water inside the buffer tank into an interim tank; (e) performing a first total organic carbon analysis on the drained water inside the buffer tank to determine whether the total organic carbon value of the first total organic carbon analysis is lower than a standard value; (f) determining whether the liquid level inside the interim tank is at a middle liquid level when the total organic carbon value of the first total organic carbon analysis is higher than the standard value; (g) switching on a first pump and a second pump, opening a first valve and closing a first valve to channel the drained water into a second raw water tank when the liquid level inside the interim tank is at the middle liquid level; (h) performing a second total organic carbon analysis on the drained water inside the buffer tank to determine whether the total organic carbon value of the second total organic carbon analysis is lower than the standard value; (i) determining whether the liquid level inside the interim tank is at a low liquid level when the total organic carbon value of the second total organic carbon analysis is lower than the standard value; and (j) switching off the first pump and the second pump when the liquid level inside the interim tank is at the low liquid level. 16. The method of claim 15, wherein in step (e), the following steps are carried out when the total organic carbon value of the first total organic carbon analysis is lower than the standard value:(k) determining whether the liquid level inside the interim tank is at a first high liquid level; (l) switching on a first pump, opening a first valve and closing a second valve so that the drained water is channeled into a first raw water tank; (m) performing a third total organic carbon analysis on the drained water inside the buffer tank to determine whether the total organic carbon value of the third total organic carbon analysis is lower than the standard value; (n) determining whether the liquid level inside the interim tank is at a second high liquid level when the total organic carbon value of the third total organic carbon analysis is lower than the standard value, wherein the second high liquid level is higher than the first high liquid level; and (o) switching on the second pump to speed up the channeling of drained water into the first raw water tank when the liquid level inside the interim tank is at the second high liquid level. 17. The method of claim 16, wherein in step (n), the following steps are carried out when the liquid level inside the interim tank is lower than the second high liquid level:determining whether the liquid level inside the interim tank is at the middle liquid level; and switching off the first pump when the liquid level inside the interim tank is at the middle liquid level. 18. The method of claim 15, wherein in step (h), the following steps are carried out when the total organic carbon value of the second total organic carbon analysis is higher than the standard value:determining whether the liquid level inside the interim tank is at the low liquid level; and switching off the first pump and the second pump when the liquid level inside the interim tank is lower than the low liquid level. 19. The method of claim 15, wherein in step (i), the following steps are carried out when the liquid level inside the interim tank is higher than the low liquid level:running the first pump and the second pump for a period of time; and switching off the first pump and the second pump.
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