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특허 상세정보

Hydrogen gettering system

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) H01L-021/44    H01L-021/48    H01L-021/50    H01L-023/20    H01L-023/26   
미국특허분류(USC) 438/115; 438/116; 257/682; 257/E23.137
출원번호 US-0642661 (2003-08-19)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 7  인용 특허 : 16
초록

A method, system and materials for use in hydrogen gettering in conjunction with microelectronic and microwave components that are generally hermetically sealed in an enclosure typically referred to as a “package”. Gettering materials that can be used include titanium with or without a hydrogen permeable coating or covering, alloys of zirconium-vanadium iron and zeolites and several ways to apply these materials to the package. In addition, the hydrogen permeable material can be used over a vent from the interior of the package to the exterior wherein hy...

대표
청구항

1. A method of making a package containing a substantially hydrogen-free interior which comprises the steps of:(a) providing a hermetically sealed package having a hollow interior region;(b) providing a hydrogen degradable semiconductor device material within said hollow interior;(c) forming a hydrogen permeable layer onto a surface of said package;(d) then forming a vent through said package from said hollow interior region to the exterior of said package through said layer to form a hydrogen permeable layer over said vent.2. The method of claim 1 where...

이 특허에 인용된 특허 (16)

  1. Dittrich Hans (Karlsruhe DEX) Frey Hartmut (Esslingen DEX). Apparatus for separating gaseous hydrogen isotopes. USP1985074528003.
  2. Klatt Karl-Heinz (Julich DEX) Wenzl Helmut (Julich DEX) Chakrakorty Amiya K. (Erftstadt DEX). Arrangement for the removal of hydrogen. USP1988074755359.
  3. Harrah Larry A. (Albuquerque NM) Mead Keith E. (Peralta NM) Smith Henry M. (Overland Park KS granted to U.S. Department of Energy under the provisions of 42 U.S.C. 2182). Combination moisture and hydrogen getter. USP1983094405487.
  4. Ebato Kazuo (Yokohama JPX) Osumi Yasuaki (Atsugi JPX) Tamura Keiji (Kawasaki JPX) Yoshida Hiroshi (Ichikawa JPX). Hydrogen absorbing zirconium alloy. USP1987044661415.
  5. Smith Henry M. ; Schicker James R.. Hydrogen and moisture getter and absorber for sealed devices. USP1999035888925.
  6. Hurst Derek P. (Loughborough GB2). Hydrogen getter and method of manufacture. USP1989054827188.
  7. Dean Tran ; Jerry T. Fang. Hydrogen gettering structure including silver-doped palladium layer to increase hydrogen gettering of module component and semiconductor device module having such structure, and methods of fabricatio. USP2002076423575.
  8. Stupian Gary W. (Hermosa Beach CA) Leung Martin S. (Redondo Beach CA). Hydrogen out venting electronic package. USP1996025491361.
  9. Stupian Gary W. (Hermosa Beach CA) Leung Martin S. (Redondo Beach CA). Hydrogen out venting electronic package. USP1996085543364.
  10. Labaton Isaac J. (5/9 HaTenna Givat Ze\ev ; Jerusalem ILX) Harats Yehuda (53 Hizkiyahu Hamelech Jerusalem ILX). Hydrogen pump. USP1989124886048.
  11. Hill Eugene F. (11517 Bianca Ave. Granada Hills CA 91344). Hydrogen separation using coated titanium alloys. USP1984084468235.
  12. Ramer O. Glenn ; Rosser Robin W.. In situ reactive layers for protection of ferroelectric integrated circuits. USP1998065760433.
  13. Buxbaum Robert E. (East Lansing MI) Hsu Peter C. (Overland Park KS). Method for plating palladium. USP1992095149420.
  14. Shores A. Andrew (Venice CA). Moisture getting composition for hermetic microelectronic devices. USP1997015591379.
  15. Catt Martin L. (Richardson TX) Fowler Gray E. (McKinney TX) Purinton Donald L. (Plano TX) Stiborek Leon (Dallas TX). Screen printed of mask printed microwave absorbing material on module lids to suppress EMI. USP1994065324887.
  16. Kitabatake Akihiro (Nara JPX) Kamata Akihiro (Nara JPX) Nishikawa Kazuhiro (Itami JPX) Fujiyama Mamoru (Nara JPX) Kawamoto Ikuo (Bankok THX). Vacuum-insulated, double-walled metal structure and method for its production. USP1991034997124.