초록 ▼

A gas reclaiming equipment capable of separating SF6 gas from a mixed gas efficiently and shortening reclaiming work under reduced pressure. A gas separation equipment is provided between a gas insulated equipment and a gas liquefaction system. The gas separation equipment separates nitrogen gas fro

A gas reclaiming equipment capable of separating SF6 gas from a mixed gas efficiently and shortening reclaiming work under reduced pressure. A gas separation equipment is provided between a gas insulated equipment and a gas liquefaction system. The gas separation equipment separates nitrogen gas from the mixed gas, and concentrates SF6 gas. Only SF6 gas is sent into the gas liquefaction system. The gas separation equipment uses pressure swing adsorption using an adsorbent with selective adsorption. Moreover, a buffer tank for storing mixed gas is provided between the gas separation equipment and the gas insulated equipment. The buffer tank and the gas liquefaction system are connected by a reflux-line. The reflux-line refluxes the gas in a gas phase in the gas liquefaction system to the buffer tank. Furthermore, the gas separation equipment is connected to a storage tank. The storage tank accumulates the nitrogen gas separated with the gas separation equipment. The adsorbent to adsorb SF6 gas is enclosed in the storage tank for exhaust gas. To absorb decomposed gas, the filter has an adsorbent of the chemisorption type. The adsorbent has of a metal hydrate.

대표청구항 ▼

1. A gas reclaiming equipment for reclaiming SF6 gas, comprising:a first filter for removing a decomposed gas and a foreign particulate substance from a mixed gas containing SF6 gas which is sent from a gas insulated equipment;a gas separation equipment configured to separate said SF6 gas from said

1. A gas reclaiming equipment for reclaiming SF6 gas, comprising:a first filter for removing a decomposed gas and a foreign particulate substance from a mixed gas containing SF6 gas which is sent from a gas insulated equipment;a gas separation equipment configured to separate said SF6 gas from said mixed gas to obtain a SF6 concentrated mixed gas;a gas liquefaction system for reclaiming said SF6 concentrated mixed gas, wherein said gas liquefaction system liquefies said SF6 gas of said SF6 concentrated mixed gas by pressurizing said SF6 concentrated mixed gas, wherein said gas separation equipment is provided between said gas insulated equipment and said gas liquefaction system;a pump for sending said SF6 concentrated mixed gas from said gas insulated equipment to said gas liquefaction system;a first storage tank for accumulating an SF6 liquid obtained by said gas liquefaction system; anda second storage tank storing a specified gas separated by said gas separation equipment, said second storage tank including an adsorbent to adsorb said SF6 gas.2. The gas reclaiming equipment according to claim 1, wherein said filter has an adsorbent of a chemisorption type which absorbs said decomposed gas.3. A gas processing system, comprising:the gas reclaiming equipment according to claim 1; anda gas insulated equipment providing the mixed gas to the gas reclaiming equipment, wherein said gas insulated equipment has an adsorbent having Zeolites with approximately 5 Å pore size and 10 Å pore size, and having a ratio of said Zeolites wherein the 5 Å pore size is more than 80 wt % and said Zeolites with 10 Å pore size is less than 20 wt %.4. The gas reclaiming equipment of claim 1, further comprising:a buffer tank for storing said mixed gas, said buffer tank provided between said gas insulated equipment and said gas separation equipment.5. The gas reclaiming equipment according to claim 4, wherein said buffer tank has an adsorbent comprising Zeolites with 5 Å pore size and 10 Å pore size.6. The gas reclaiming equipment according to claim 4, wherein said buffer tank stores said mixed gas when said mixed gas is reclaimed under reduced pressure.7. The gas reclaiming equipment according to claim 4, wherein said gas separation equipment includes pressure swing adsorption including an adsorbent with selective adsorption.8. The gas reclaiming equipment according to claim 4, wherein said gas separation equipment has a second filter with a permeable membrane.9. The gas reclaiming equipment according to claim 4, wherein said gas separation equipment has plural separating units to separate said SF6 gas from said mixed gas.10. The gas reclaiming equipment according to claim 4, wherein said filter has an adsorbent to adsorb said decomposed gas.11. The gas reclaiming equipment according to claim 4, wherein said gas separation equipment includes an adsorbent having Zeolites with approximately 5 Å pore size and 10 Å pore size, and wherein a ratio of said Zeolites with 5 Å pore size is more than 80 wt % and said Zeolites with 10 Å pore size is less than 20 wt %.12. A method of reclaiming insulating gas from a mixed gas of a gas insulated equipment comprising:flowing the mixed gas though a filter to remove decomposed gas and foreign particulate substances;separating said insulating gas from said mixed gas in a gas separating unit to obtain concentrated insulating mixed gas and sending said concentrated insulating mixed gas to a gas liquefaction system;pressurizing the concentrated insulating mixed gas to produce a liquid;accumulating the liquid in a first storage tank;storing a specified gas separated in said separating step in a second storage tank, said second storage tank including an adsorbent to adsorb SF6 gas; andreturning gas in the gas phase from the gas liquefaction system to an upstream side of the gas liquefaction system.13. The method of claim 12, further comprising chemisorbing decomposed gas in said filter.14. The method of claim 12, wherein said gas separation unit includes an adsorbent having Zeolites with approximately 5 Å pore size and 10 Å pore size, and wherein a ratio of said Zeolites with 5 Å size is more than 80 wt % and said Zeolites with 10 Å pore size is less than 20 wt %.15. A method of reclaiming insulating gas from a mixed gas of a gas insulated equipment comprising:flowing the mixed gas though a filter to remove decomposed gas and foreign particulate substances;flowing said mixed gas through a gas separating unit to obtain concentrated insulating mixed gas and a specified gas and sending said concentrated insulating mixed gas to a gas liquefaction system;pressurizing an SF6 gas of the concentrated insulating mixed gas; andstoring said specified gas in a storage tank wherein said storage tank includes an adsorbent to adsorb decomposed gas.16. A method of reclaiming insulating gas from a mixed gas of a gas insulated equipment comprising:flowing the mixed gas though a filter to remove decomposed gas and foreign particulate substances;flowing said mixed gas through a gas separating unit to obtain concentrated insulating mixed gas and a specified gas and sending said concentrated insulating mixed gas to a gas liquefaction system;pressurizing an SF6 gas of the concentrated insulating mixed gas; andstoring said specified gas in a storage tank, wherein said storage tank includes an adsorbent to adsorb SF6 gas.17. The method of claim 12, further comprising flowing the mixed gas through a buffer tank.18. The method of claim 17, wherein said buffer tank includes an adsorbent having Zeolites with approximately 5 Å pore size and 10 Å pore size, and wherein a ratio of said Zeolites with 5 Å pore size is more than 80 wt % and said Zeolites with 10 Å pore size is less than 20 wt %.19. The gas reclaiming equipment according to claim 1, further comprising a line for returning a specified gas in the gas phase in said gas liquefaction system to an upstream side of said gas liquefaction system.20. The gas reclaiming equipment according to claim 4, further comprising a line for returning a specified gas in the gas phase in said gas liquefaction system to an upstream side of said gas liquefaction system.21. The gas reclaiming equipment according to claim 4, wherein said gas separation equipment includes an adsorbent having Zeolites with approximately 5 Å pore size.22. A gas reclaiming equipment, for reclaiming SF6 gas, comprising:a first filter for removing a decomposed gas and a foreign particulate substance from a mixed gas containing SF6 gas which is sent from a gas insulated equipment;a gas separation equipment that is configured to separate said SF6 gas from said mixed gas to obtain a SF6 concentrated mixed gas;a gas liquefaction system for reclaiming said SF6 concentrated mixed gas, wherein said gas liquefaction system liquefies said SF6 gas of said SF6 concentrated mixed gas by pressurizing said SF6 concentrated mixed gas, wherein said gas separation equipment is provided between said gas insulated equipment and said gas liquefaction system;a pump for sending said SF6 concentrated mixed gas from said gas insulated equipment to said gas liquefaction system; anda storage tank for accumulating an SF6 liquid obtained by said gas liquefaction system,wherein said gas separation equipment includes an adsorbent having Zeolites with approximately 5 Å pore size and 10 Å pore size, and wherein a ratio of said Zeolites with 5 Å pore size is more than 80 wt % and said Zeolites with 10 Å pore size is less than 20 wt %.23. The gas reclaiming equipment according to claim 1, wherein said second storage tank has a cylindrical shape.