Method and apparatus for dielectric filling of flip chip on interposer assembly
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-023/12
H01L-023/52
H01L-023/45
출원번호
US-0150902
(2002-05-17)
우선권정보
SG-200201301-9 (2002-03-04)
발명자
/ 주소
Lee, Teck Kheng
출원인 / 주소
Micron Technology, Inc.
대리인 / 주소
TraskBritt
인용정보
피인용 횟수 :
31인용 특허 :
146
초록▼
A method and apparatus for increasing the integrated circuit density in a flip chip semiconductor device assembly and decreasing the time for dielectrically filling such assembly using less dielectric material. The semiconductor device assembly includes a conductively bumped semiconductor die and an
A method and apparatus for increasing the integrated circuit density in a flip chip semiconductor device assembly and decreasing the time for dielectrically filling such assembly using less dielectric material. The semiconductor device assembly includes a conductively bumped semiconductor die and an interposer substrate having multiple recesses formed therein. The semiconductor die is mounted to the interposer substrate with the bumps disposed in the multiple recesses so that the die face is directly adjacent a surface of the interposer substrate. One or more openings may be provided in an opposing lower surface of the interposer substrate or a periphery thereof which extends to the multiple recesses and the conductive bumps disposed therein. Dielectric filler material may then be provided through the one or more openings to the recesses.
대표청구항▼
1. A flip chip semiconductor device assembly comprising:at least one semiconductor die having an active surface and a back surface, the active surface having a plurality of conductive bumps thereon; an interposer substrate having a first surface and a second surface, the interposer substrate includi
1. A flip chip semiconductor device assembly comprising:at least one semiconductor die having an active surface and a back surface, the active surface having a plurality of conductive bumps thereon; an interposer substrate having a first surface and a second surface, the interposer substrate including a dielectric member having a plurality of recesses extending thereinto from the first surface, each recess of the plurality exposing at least a portion of a conductive element at a bottom thereof, the interposer substrate mounted to the at least one semiconductor die with the plurality of conductive bumps substantially received in the plurality of recesses, the plurality of recesses sized so that a gap is left surrounding at least a portion of at least some of the plurality of conductive bumps in the plurality of recesses, the interposer substrate including at least one opening extending therethrough, the at least one opening being in communication with the gaps; and a dielectric filler material extending from the at least one opening into the gaps. 2. The assembly of claim 1, wherein the at least one opening comprises a plurality of passages extending to the plurality of recesses.3. The assembly of claim 2, wherein the plurality of passages comprises one or more passages extending to each of at least some of the plurality of recesses.4. The assembly of claim 1, wherein the at least one opening comprises a plurality of openings, each extending to a bottom portion of one of the plurality of recesses.5. The assembly of claim 1, wherein the at least one opening is formed through the second surface of the interposer substrate.6. The assembly of claim 1, wherein the at least one opening comprises a channel formed in the first surface of the interposer substrate and extending from one portion of a periphery of the interposer substrate to at least an interior portion thereof.7. The assembly of claim 6, wherein a sidewall of the channel extends beside at least some of the plurality of recesses and opens into the at least some recesses in the interposer substrate.8. The assembly of claim 6, wherein the channel comprises a channel opening provided at the periphery of the interposer substrate, the channel opening configured to receive the dielectric filler material in nonsolid form.9. The assembly of claim 6, wherein the channel comprises a portion of the active surface of the at least one semiconductor die as a top wall of the channel.10. The assembly of claim 1, wherein the active surface of the at least one semiconductor die lies adjacent the first surface of the interposer substrate.11. The assembly of claim 1, wherein the first surface of the interposer substrate comprises an adhesive element attaching the first surface of the interposer substrate to the active surface of the at least one semiconductor die.12. The assembly of claim 1, wherein the plurality of recesses comprises a recess configuration which is substantially a mirror image of a bond pad configuration on the active surface of the at least one semiconductor die.13. The assembly of claim 12, wherein the recess configuration comprises at least one of a center row recess configuration, an I-shaped recess configuration, and a peripheral recess configuration.14. The assembly of claim 1, further comprising an encapsulation material formed over the at least one semiconductor die to at least partially encapsulate the at least one semiconductor die.15. The assembly of claim 1, wherein the second surface of the interposer substrate includes conductive balls on at least some of the conductive elements to electrically interconnect to external circuitry.16. The assembly of claim 1, wherein the dielectric filler material comprises a resin.17. The assembly of claim 16, wherein the dielectric filler material comprises at least one of a thermoset resin and a thermoplastic resin.18. The assembly of claim 1, wherein the interposer substrate comprises a flexible dielectric tape.19. The assembly of claim 1, wherein the interposer substrate comprises at least one of a polymer material, BT, FR4 laminate, FR5 laminate and ceramic.20. A semiconductor assembly comprising:a wafer including a plurality of unsingulated semiconductor dice, each of the semiconductor dice having an active surface and a back surface, the active surface of each of the dice having a plurality of conductive bumps thereon; a wafer scale interposer substrate member comprising a dielectric member and including multiple unsingulated interposer substrates, each arranged and dimensioned to correspond with one of the plurality of semiconductor dice, each of the interposer substrates having a first surface, a second surface, and a plurality of recesses extending thereinto from the first surface, each recess exposing at least a portion of a conductive element at a bottom thereof, the wafer scale interposer substrate member mounted to the wafer with the conductive bumps on each of the semiconductor dice substantially received in the plurality of recesses in the interposer substrates, the plurality of recesses sized so that a gap is left adjacent a portion of at least some of the conductive bumps in the plurality of recesses, each of the interposer substrates including at least one opening in the dielectric member thereof in communication with at least some of the gaps surrounding the at least some conductive bumps in the plurality of recesses; and a dielectric filler material extending from the at least one opening into the at least some of the gaps. 21. The assembly of claim 20, wherein the at least one opening comprises a plurality of passages extending to the plurality of recesses.22. The assembly of claim 21, wherein the plurality of passages comprises one or more passages extending to one of the plurality of recesses.23. The assembly of claim 20, wherein the at least one opening comprises a plurality of openings in each of the interposer substrates, each of the plurality of openings extending to a bottom portion of one of the plurality of recesses.24. The assembly of claim 20, wherein the at least one opening is formed in the second surface of each of the interposer substrates.25. The assembly of claim 20, wherein the at least one opening comprises at least one channel formed in the first surface of each of the interposer substrates and extends from a periphery of the wafer scale interposer substrate member to at least an interior portion thereof.26. The assembly of claim 25, wherein a sidewall of the at least one channel extends beside at least some of the plurality of recesses and opens into the at least some recesses.27. The assembly of claim 25, wherein the at least one channel comprises at least one channel opening provided at a periphery of the wafer scale interposer substrate member, the at least one channel opening configured to receive the dielectric filler material in nonsolid form.28. The assembly of claim 25, wherein the at least one channel comprises a portion of an active surface of the wafer as a top wall of the at least one channel.29. The assembly of claim 20, wherein an active surface of the wafer lies adjacent the first surface of the wafer scale interposer substrate member.30. The assembly of claim 20, wherein the first surface of the wafer scale interposer substrate member comprises at least one adhesive element on each of the unsingulated semiconductor dice attaching the first surface of the wafer scale interposer substrate member to an active surface of the semiconductor dice.31. The assembly of claim 20, wherein the plurality of recesses in each of the interposer substrates comprises a recess configuration which is substantially a mirror image of a bond pad configuration on the active surface of each of the semiconductor dice.32. The assembly of claim 31, wherein the recess configuration comprises at least one of a center row recess configuration, an I-shaped recess configuration, and a peripheral recess configuration.33. The assembly of claim 20, further comprising an encapsulation material formed over a back surface of the semiconductor dice.34. The assembly of claim 20, wherein the second surfaces of the interposer substrates include conductive pads with conductive balls attached thereto.35. The assembly of claim 20, wherein the dielectric filler material comprises a resin.36. The assembly of claim 20, wherein the dielectric filler material comprises at least one of a thermoset resin and a thermoplastic resin.37. The assembly of claim 20, wherein the wafer scale interposer substrate member comprises a flexible dielectric tape.38. The assembly of claim 20, wherein the wafer scale interposer substrate member comprises at least one of a polymer material, BT, FR4 laminate, FR5 laminate and ceramic.39. A method of assembling a flip chip semiconductor device assembly comprising:providing a semiconductor die having an active surface and a back surface, the active surface having a plurality of conductive bumps thereon; providing an interposer substrate having a first surface and a second surface, the interposer substrate having a dielectric member including a plurality of recesses extending thereinto from the first surface and exposing at least a portion of a conductive element at bottoms of the recesses, the interposer substrate including at least one opening in the dielectric member extending therethrough; mounting the interposer substrate to the semiconductor die with the plurality of conductive bumps substantially received in the plurality of recesses, the plurality of recesses sized so that a gap is left adjacent a portion of at least some of the conductive bumps in at least some of the plurality of recesses, the at least one opening formed in the interposer substrate extending to the gaps adjacent the at least some conductive bumps in the at least some recesses; and introducing a dielectric filler material in flowable form into the at least one opening in sufficient quantity to extend to at least some of the gaps. 40. The method of claim 39, wherein the providing the interposer substrate comprises forming the at least one opening in the second surface in the interposer substrate to include one or more passages extending to a lower portion of at least some of the plurality of recesses.41. The method of claim 39, wherein the providing the interposer substrate comprises forming the at least one opening in the second surface in the interposer substrate as a plurality of openings, each of the plurality of openings corresponding to one of the plurality of recesses and extending thereto.42. The method of claim 40, wherein the introducing comprises applying the dielectric filler material to the at least one opening in the interposer substrate to flow into the at least one opening and through the one or more passages to fill the gaps adjacent the plurality of recesses.43. The method of claim 41, wherein the introducing comprises applying the dielectric filler material to the plurality of openings in the interposer substrate to flow into each of the plurality of openings and through the one or more passages to substantially fill the gaps.44. The method of claim 42, wherein the applying the dielectric filler material comprises dispensing the dielectric filler material under pressure.45. The method of claim 43, wherein the applying the dielectric filler material comprises dispensing the dielectric filler material under pressure.46. The method of claim 39, wherein the providing the interposer substrate including at least one opening comprises forming a channel in the first surface of the interposer substrate.47. The method of claim 46, wherein the forming comprises extending the channel from a periphery of the interposer substrate to at least an interior portion of the interposer substrate.48. The method of claim 47, wherein the extending the channel comprises extending the channel beside at least some of the plurality of recesses so that each of the at least some of the plurality of recesses opens into a portion of the channel.49. The method of claim 48, wherein the introducing comprises introducing the dielectric filler material into the channel to flow therethrough and into the gaps.50. The method of claim 49, wherein the introducing the dielectric filler material comprises dispensing the dielectric filler material under pressure.51. The method of claim 39, wherein the mounting comprises conductively bonding each of the conductive bumps on the semiconductor die to the conductive element at the bottoms of the plurality of recesses.52. The method of claim 51, wherein the bonding comprises bonding by at least one of reflowing, curing, ultrasonic bonding and thermal compression bonding.53. The method of claim 39, further comprising disposing a nonsolid conductive material on the conductive bumps prior to the mounting.54. The method of claim 53, further comprising bonding each of the conductive bumps having the nonsolid conductive material thereon to the conductive element at the bottom of one of the plurality of recesses of the interposer substrate.55. The method of claim 39, further comprising disposing a nonsolid conductive material in each of the plurality of recesses.56. The method of claim 55, wherein the disposing the nonsolid conductive material comprises:providing a stencil having a pattern of apertures therethrough corresponding to a pattern of the plurality of recesses; positioning the stencil over the interposer substrate so that the pattern of apertures corresponds with said the pattern of the plurality of recesses; and spreading the nonsolid conductive material over the stencil with a spread member to dispose the nonsolid conductive material in each of the plurality of recesses. 57. The method of claim 56, further comprising inserting each of the conductive bumps on the semiconductor die in one of the plurality of recesses in contact with the nonsolid conductive material therein.58. The method of claim 57, further comprising bonding each of the conductive bumps to a conductive element in one of the recesses using the nonsolid conductive material.59. The method of claim 39, further comprising forming an encapsulation layer over the back surface of the semiconductor die with an encapsulation material.60. The method of claim 59, wherein the forming the encapsulation layer comprises depositing the encapsulation layer by at least one of spin-coating and glob-top covering.61. The method of claim 59, further comprising fully encapsulating the semiconductor die by dispensing encapsulation material about a periphery of the semiconductor die.62. The method of claim 39, further comprising partially encapsulating the semiconductor die by dispensing encapsulation material about a periphery of the semiconductor die.63. A method of assembling a flip chip semiconductor device assembly comprising:providing a semiconductor die having an active surface and a back surface, the active surface having a plurality of conductive bumps thereon; providing an interposer substrate having a first surface and a second surface, the interposer substrate including a plurality of recesses extending from the first surface thereinto and at least one opening formed in the interposer substrate extending therethrough, the at least one opening extending to at least one of the plurality of recesses; mounting the active surface of the semiconductor die to the first surface of the interposer substrate so that the conductive bumps are disposed in the plurality of recesses and leave a gap adjacent a portion of at least some of the conductive bumps within at least some of the plurality of recesses; and introducing a flowable material through the at least one opening sufficient to extend to and at least partially fill at least some of the gaps. 64. A method of applying a material to a flip chip semiconductor device assembly, the method comprising:providing a semiconductor die having an active surface with a plurality of conductive bumps formed thereon and an interposer substrate having a first surface and a second surface, a plurality of recesses formed therein extending from the first surface and at least one opening formed in the interposer substrate extending therethrough, the at least one opening extending to at least some of the plurality of recesses, the active surface of the semiconductor die being mounted adjacent to the first surface of the interposer substrate so that the conductive bumps of the semiconductor die are disposed in the plurality of recesses of the interposer substrate and leave a gap adjacent a portion of at least some of the bumps in the plurality of recesses; and introducing a flowable material through the at least one opening sufficient to extend to and at least partially fill at least some of the gaps. 65. The method of claim 64, wherein the providing the interposer substrate comprises forming the at least one opening in the second surface of the interposer substrate to include one or more passages extending to a lower portion of at least one of the plurality of recesses.66. The method of claim 65, wherein the providing the interposer substrate comprises forming the at least one opening in the second surface of the interposer substrate as a plurality of openings, each of the plurality of openings corresponding to at least one of the plurality of recesses and extending thereto.67. The method of claim 65, wherein the introducing comprises applying the flowable material to the at least one opening in the interposer substrate to flow into the at least one opening and through the one or more passages to at least partially fill at least one of the gaps.68. The method of claim 66, wherein the introducing comprises applying the flowable material to the plurality of openings in the interposer substrate to flow into each of the plurality of openings and through the one or more passages to fill at least some of the gaps.69. The method of claim 67, wherein the applying the flowable material comprises dispensing the flowable material under pressure.70. The method of claim 68, wherein the applying the flowable material comprises dispensing the flowable material under pressure.71. The method of claim 64, wherein the providing the interposer substrate with at least one opening comprises forming a channel in the first surface of the interposer substrate.72. The method of claim 71, wherein the forming comprises extending the channel from a periphery of the interposer substrate to at least an interior portion of the interposer substrate.73. The method of claim 72, wherein the extending the channel comprises aligning the channel beside at least some of the plurality of recesses so that each of the at least some recesses opens into a portion of the channel.74. The method of claim 73, wherein the introducing comprises introducing the flowable material into the channel to flow therethrough and into each of the gaps.75. The method of claim 74, wherein the applying the flowable material comprises dispensing the flowable material under pressure.
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