초록 ▼

According to the present invention, there is provided an insulator capacitance analyzer for analyzing C-V characteristics of a first MIS structure having unknown capacitance, which includes: a capacitance structure having known capacitance and configured so as to be serially connectable to the first

According to the present invention, there is provided an insulator capacitance analyzer for analyzing C-V characteristics of a first MIS structure having unknown capacitance, which includes: a capacitance structure having known capacitance and configured so as to be serially connectable to the first MIS structure; and a measuring section for measuring synthesis capacitance of the serially-connected first MIS structure and capacitance structure.

대표청구항 ▼

1. An insulator capacitance analyzer for analyzing C-V characteristics of a first MIS structure having unknown capacitance, comprising:a capacitance structure having known capacitance and configured so as to be serially connectable to the first MIS structure; a measuring section for measuring synthe

1. An insulator capacitance analyzer for analyzing C-V characteristics of a first MIS structure having unknown capacitance, comprising:a capacitance structure having known capacitance and configured so as to be serially connectable to the first MIS structure; a measuring section for measuring synthesis capacitance of the serially-connected first MIS structure and capacitance structure; a plurality of capacitance structures each having known capacitance and configured so as to be serially connectable to the first MIS structure; and a switch for selecting one of the plurality of capacitance structures as the capacitance structure. 2. An insulator capacitance analyzer for analyzing C-V characteristics of a first MIS (Metal/Insulator/Semiconductor) structure, comprising:a capacitance structure having a known capacitance and serially connected to the first MIS structure; a measuring section for measuring a synthesis capacitance of the serially-connected first MIS structure and the capacitance structure; and a plurality of capacitance structures each having known capacitance and configured so as to be serially connectable to the first MIS structure; and a switch for selecting one of the plurality of capacitance structures as the capacitance structure.