Semiconductor integrated circuit and fabrication method thereof
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-029/15
H01L-029/04
H01L-031/036
출원번호
US-0657137
(2003-09-09)
우선권정보
JP-0165272 (1996-06-04)
발명자
/ 주소
Ohtani, Hisashi
출원인 / 주소
Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소
Fish &
인용정보
피인용 횟수 :
13인용 특허 :
62
초록▼
A semiconductor integrated circuit having a high withstand voltage TFT and a TFT which is capable of operating at high speed in a circuit of thin film transistors (TFT) and methods for fabricating such circuit will be provided. A gate insulating film of the TFT required to operate at high speed (e.g
A semiconductor integrated circuit having a high withstand voltage TFT and a TFT which is capable of operating at high speed in a circuit of thin film transistors (TFT) and methods for fabricating such circuit will be provided. A gate insulating film of the TFT required to operate at high speed (e.g., TFT used for a logic circuit) is relatively thinned less than a gate insulating film of the TFT which is required to have high withstand voltage (e.g., TFT used for switching high voltage signals).
대표청구항▼
1. A display system comprising:a CPU formed over a substrate; a memory connected to the CPU; an X-Y branch connected to the CPU; a column driver connected to the X-Y branch; a row driver connected to the X-Y branch; and an active matrix circuit connected to the column driver and the row driver, wher
1. A display system comprising:a CPU formed over a substrate; a memory connected to the CPU; an X-Y branch connected to the CPU; a column driver connected to the X-Y branch; a row driver connected to the X-Y branch; and an active matrix circuit connected to the column driver and the row driver, wherein the CPU comprises a first semiconductor layer, a first gate insulating film on the first semiconductor layer, and a first gate electrode on the first gate insulating film, wherein the active matrix circuit comprises a second semiconductor layer different from the first semiconductor layer, a second gate insulating film on the second semiconductor layer, and a second gate electrode formed on the second gate insulating film, wherein a thickness of the first gate insulating film is smaller than that of the second gate insulating film. 2. A display system according to claim 1, wherein the display system is selected from the group consisting of a liquid crystal display system, a electroluminescence display system and an electrochromic display system.3. A display system according to claim 1, wherein the display system is incorporated into an electronic equipment selected from the group consisting or a camera, a portable personal computer, a projector and a car navigation system.4. A display system comprising:a CPU formed over a substrate; a memory connected to the CPU; an X-Y branch connected to the CPU; a column driver connected to the X-Y branch; a row driver connected to the X-Y branch; and an active matrix circuit connected to the column driver and the row driver, wherein the CPU comprises a first semiconductor layer, a first gate insulating film on the first semiconductor layer, and a first gate electrode on the first gate insulating film, wherein the active matrix circuit comprises a second semiconductor layer different from the first semiconductor layer, a second gate insulating film on the second semiconductor layer, and a second gate electrode formed on the second gate insulating film, wherein a thickness of the first gate insulating film is 80% or less of that of the second gate insulating film. 5. A display system according to claim 4, wherein the display system is selected from the group consisting of a liquid crystal display system, a electroluminescence display system and an electrochromic display system.6. A display system according to claim 4, wherein the display system is incorporated into an electronic equipment selected from the group consisting of a camera, a portable personal computer, a projector and a car navigation system.7. A display system comprising:a CPU formed over a substrate; a memory connected to the CPU; an X-Y branch connected to the CPU; a column driver connected to the X-Y branch; a low driver connected to the X-Y branch; and an active matrix circuit connected to the column driver and the low driver, wherein the CPU comprises a first semiconductor layer, a first gate insulating film on the first semiconductor layer, and a first gate electrode on the first gate insulating film, wherein the active matrix circuit comprises a second semiconductor layer, a second gate insulating film on the second semiconductor layer, and the second gate electrode formed on the second gate insulating film, wherein a width of the first gate electrode is smaller than that of the second gate electrode. 8. A display system according to claim 7, wherein the display system is selected from the group consisting of a liquid crystal display system, a electroluminescence display system and, a electrochromic display system.9. A display system according to claim 7, wherein the display system is incorporated into an electronic equipment selected from the group consisting of a camera, a portable personal computer, a projector and a car navigation system.10. A display system comprising:a CPU formed over a substrate; a memory connected to the CPU; an X-Y branch connected to the CPU; a column driver connected to the X-Y branch; a row driver connected to the X-Y branch; and an active matrix circuit connected to the column driver and the row driver, wherein the CPU comprises a first semiconductor layer, a first gate insulating film on the first semiconductor layer, and a first gate electrode on the first gate insulating film, wherein the active matrix circuit comprises a second semiconductor layer different from the first semiconductor layer, a second gate insulating film on the second semiconductor layer, and a second gate electrode formed on the second gate insulating film, wherein a width of the first gate electrode is 80% or less of that of the second gate electrode. 11. A display system according to claim 10, wherein the display system is selected from the group consisting of a liquid crystal display system, a electroluminescence display system and an electrochromic display system.12. A display system according to claim 10, wherein the display system is incorporated into an electronic equipment selected from the group consisting of a camera, a portable personal computer, a projector and a car navigation system.13. A display system comprising:a CPU formed over a substrate; a memory connected to the CPU; an X-Y branch connected to the CPU; a column driver connected to the X-Y branch; a row driver connected to the X-Y branch; and an active matrix circuit connected to the column driver and the row driver, wherein the memory comprises a first semiconductor layer, a first gate insulating film on the first semiconductor layer, and a first gate electrode on the first gate insulating film, wherein the active matrix circuit comprises a second semiconductor layer different from the first semiconductor layer, a second gate insulating film on the second semiconductor layer, and a second gate electrode formed on the second gate insulating film, wherein a thickness of the first gate insulating turn is smaller than that of the second gate insulating film. 14. A display system according to claim 13, wherein the display system is selected from the group consisting of a liquid crystal display system, a electroluminescence display system and an electrochromic display system.15. A display system according to claim 13, wherein the display system is incorporated into an electronic equipment selected from the group consisting of a camera, a portable personal computer, a projector and a car navigation system.16. A display system comprising:a CPU formed over a substrate; a memory connected to the CPU; an X-Y branch connected to the CPU; a column driver connected to the X-Y branch; a row driver connected to the X-Y branch; and an active matrix circuit connected to the column driver and the row driver, wherein the memory comprises a first semiconductor layer, a first gate insulating film on the first semiconductor layer, and a first gate electrode on the first gate insulating film, wherein the active matrix circuit comprises a second semiconductor layer different from the first semiconductor layer, a second gate insulating film on the second semiconductor layer, and a second gate electrode formed on the second gate insulating film, wherein a thickness of the first gate insulating film is 80% or less of that of the second gate insulating film. 17. A display system according to claim 16, wherein the display system is selected from the group consisting of a liquid crystal display system, a electroluminescence display system an electrochromic display system.18. A display system according to claim 16, wherein the display system is incorporated into an electronic equipment selected from the group consisting of a camera, a portable personal computer, a projector and car navigation system.19. A display system comprising:a CPU formed over a substrate; a memory connected to the CPU; an X-Y branch connected to the CPU; a column driver connected to the X-Y branch; a row driver connected to the X-Y branch; and an active matrix circuit connected to the column driver and the row driver, wherein the memory comprises a first semiconductor layer, a first gate insulating film on the first semiconductor layer, and a first gate electrode on the first gate insulating film, wherein the active matrix circuit comprises a second semiconductor layer different from the first semiconductor layer, a second gate insulating film on the second semiconductor layer, and a second gate electrode formed on the second gate insulating film, wherein a width of the first gate electrode is smaller than that of the second gate electrode. 20. A display system according to claim 19, wherein the display system is selected from the group consisting of a liquid crystal display system, a electroluminescence display system and an electrochromic display system.21. A display system according to claim 19, wherein the display system is incorporated into an electronic equipment selected from the group consisting of a camera, a portable personal computer, a projector and a car navigation system.22. A display system comprising:a CPU formed over a substrate; a memory connected to the CPU; an X-Y branch connected to the CPU; a column driver connected to the X-Y branch; a low driver connected to the X-Y branch; and an active matrix circuit connected to the column driver and the low driver, wherein the memory comprises a first semiconductor layer, a first gate insulating film on the first semiconductor layer, and a first gate electrode on the first gate insulating film, wherein the active matrix circuit comprises a second semiconductor layer, a second gate insulating film on the second semiconductor layer, and the second gate electrode formed on the second gate insulating film, wherein a width of the first gate electrode is 80% or less of that of the second gate electrode. 23. A display system according to claim 22, wherein the display system is selected front the group consisting of a liquid crystal display system, a electroluminescence display system and an electrochromic display system.24. A display system according to claim 22, wherein the display system is incorporated into an electronic equipment selected from the group consisting of a camera, a portable personal computer, a projector and a car navigation system.25. A display system according to claim 1, wherein the first semiconductor layer and the second semiconductor layer are formed from a common semiconductor layer.26. A display system according to claim 4, wherein the first semiconductor layer and the second semiconductor layer are formed from a common semiconductor layer.27. A display system according to claim 7, wherein the first semiconductor layer and the second semiconductor layer are formed from a common semiconductor layer.28. A display system according to claim 10, wherein the first semiconductor layer and the second semiconductor layer are formed from a common semiconductor layer.29. A display system according to claim 13, wherein the first semiconductor layer and the second semiconductor layer are formed from a common semiconductor layer.30. A display system according to claim 16, wherein the first semiconductor layer and the second semiconductor layer are formed from a common semiconductor layer.31. A display system according to claim 19, wherein the first semiconductor layer and the second semiconductor layer are formed from a common semiconductor layer.32. A display system according to claim 22, wherein the first semiconductor layer and the second semiconductor layer are formed from a common semiconductor layer.
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