초록 ▼

A method and associated algorithm for controlling and optimizing the temperature of a device under test (DUT) through calculation of a moving setpoint which varies from the user-specified DUT core temperature. The method generally comprises (i) calculating a system operating range based on limits im

A method and associated algorithm for controlling and optimizing the temperature of a device under test (DUT) through calculation of a moving setpoint which varies from the user-specified DUT core temperature. The method generally comprises (i) calculating a system operating range based on limits imposed by the DUT, associated temperature control system, and thermal conditioning equipment; (ii) determining the allowable operating range for the DUT based on permissible DUT stress and DUT core temperature; and (iii) calculating a control setpoint based on DUT and conditioning system temperature data, one or more pre-selected setup factors, and the system and DUT operating ranges. In another aspect of the invention, variable temperature differential limits are imposed on the CSP as a function of DUT core temperature in order to mitigate thermal shock to the DUT. Methods and apparatus for latent temperature control are also disclosed.

대표청구항 ▼

What is claimed is: 1. Temperature control apparatus, comprising: a conditioning device adapted to generate a range of temperatures; a first temperature probe adapted to generate first signals related to the temperature of a DUT; a second temperature probe adapted to generate second signals related

What is claimed is: 1. Temperature control apparatus, comprising: a conditioning device adapted to generate a range of temperatures; a first temperature probe adapted to generate first signals related to the temperature of a DUT; a second temperature probe adapted to generate second signals related to the temperature of at least a portion of said conditioning device; a controller, operatively coupled to said conditioning device and said probes and having an algorithm associated therewith, said algorithm being adapted to control the temperature of said conditioning device based at least in part on said first and second signals; wherein said controller is further adapted to control the temperature of said conditioning device by: (i) establishing a first temperature for said conditioning device; (ii) identifying at least one change in said DUT thereafter; (iii) identifying at least one stabilization event in said DUT thereafter; and (iv) adjusting the temperature of said conditioning device based at least in part on said first and second signals and said acts of identifying. 2. The temperature control apparatus of claim 1, wherein said adjusting the temperature of said conditioning device further comprises maintaining for at least a period of time a target temperature of said conditioning device. 3. The temperature control apparatus of claim 1, wherein at least one of said acts of identifying comprises identifying a change or event based on a parameter other than temperature. 4. The temperature control apparatus of claim 3, wherein said parameter comprises DUT electrical conductivity. 5. The temperature control apparatus of claim 3, wherein said parameter comprises DUT capacitance. 6. The temperature control apparatus of claim 3, wherein said parameter comprises DUT frequency response. 7. The temperature control apparatus of claim 3, wherein said parameter comprises a mechanical property associated with said DUT. 8. Temperature control apparatus, comprising: a conditioning device adapted to generate a range of temperatures; a first temperature probe adapted to determine the temperature of a first object; a second temperature probe adapted to determine the temperature of at least a portion of said conditioning device; a controller having an algorithm associated therewith, said algorithm being adapted to control the temperature of said conditioning device based at least in part on said temperatures of said first object and said at least said portion of said conditioning device; wherein said controller is further adapted to control the temperature of said conditioning device by: (i) achieving a first temperature for said conditioning device; (ii) identifying at least one change in said first object thereafter; (iii) identifying at least one stabilization event in said first object thereafter; and (iv) adjusting the temperature of said conditioning device based at least in part on said temperatures of said first object and said at least said portion of said conditioning device and said acts of identifying. 9. Temperature control apparatus, comprising: a conditioning device having means to generate a range of temperatures; a first temperature probe with means for generating first signals related to the temperature of a DUT; a second temperature probe with means for generating second signals related to the temperature of at least a portion of said conditioning device; a controller, operatively coupled to said conditioning device and said probes and having an algorithm associated therewith, said algorithm having means for controlling the temperature of said conditioning device based at least in part on said first and second signals; wherein said controller is further adapted to control the temperature of said conditioning device by: (i) establishing a first temperature for said conditioning device; (ii) identifying at least one change in said DUT thereafter; (iii) identifying at least one stabilization event in said DUT thereafter; and (iv) adjusting the temperature of said conditioning device based at least in part on said first and second signals and said acts of identifying. 10. The temperature control apparatus of claim 8, wherein said adjusting the temperature of said conditioning device further comprises maintaining for at least a period of time a target temperature of said conditioning device. 11. The temperature control apparatus of claim 8, wherein at least one of said acts of identifying comprises identifying a change or event based on a parameter other than temperature. 12. The temperature control apparatus of claim 11, wherein said parameter comprises the electrical conductivity of said first object. 13. The temperature control apparatus of claim 11, wherein said parameter comprises capacitance of said first object. 14. The temperature control apparatus of claim 11, wherein said parameter comprises frequency response of said first object. 15. The temperature control apparatus of claim 11, wherein said parameter comprises a mechanical property associated with said first object. 16. The temperature control apparatus of claim 9, wherein said adjusting the temperature of said conditioning device further comprises maintaining for at least a period of time a target temperature of said conditioning device. 17. The temperature control apparatus of claim 9, wherein at least one of said acts of identifying comprises identifying a change or event based on a parameter other than temperature. 18. The temperature control apparatus of claim 17, wherein said parameter comprises DUT electrical conductivity. 19. The temperature control apparatus of claim 17, wherein said parameter comprises DUT capacitance. 20. The temperature control apparatus of claim 17, wherein said parameter comprises DUT frequency response. 21. The temperature control apparatus of claim 17, wherein said parameter comprises a mechanical property associated with said DUT. 22. Temperature control apparatus, comprising: a conditioning device adapted to generate a range of temperatures; a first temperature sensor adapted to generate first signals related to the temperature of an object; a second temperature sensor adapted to generate second signals related to the temperature of at least a portion of said conditioning device; a controller, operatively coupled to said conditioning device and being adapted to control the temperature of said conditioning device based at least in part on said first and second signals; wherein said controller is further adapted to control the temperature of said conditioning device by: establishing a first temperature for said conditioning device; identifying at least one change in said object thereafter; identifying at least one stabilization event in said object thereafter; and adjusting the temperature of said conditioning device based at least in part on said first and second signals and said acts of identifying. 23. The temperature control apparatus of claim 22, wherein said adjusting the temperature of said conditioning device further comprises maintaining for at least a period of time a target temperature of said conditioning device. 24. The temperature control apparatus of claim 22, wherein at least one of said acts of identifying comprises identifying a change or event based on a parameter other than temperature. 25. The temperature control apparatus of claim 24, wherein said parameter comprises object electrical conductivity. 26. The temperature control apparatus of claim 24, wherein said parameter comprises object capacitance. 27. The temperature control apparatus of claim 24, wherein said parameter comprises object frequency response. 28. The temperature control apparatus of claim 24, wherein said parameter comprises a mechanical property associated with said object.