초록 ▼

a cooling apparatus 110 comprises a primary refrigerant circulating circuit which allows a primary refrigerant CW 1 whose temperature is adjusted by a heat exchanger 138 to circulate through an electrode to adjust a temperature of the electrode, a secondary refrigerant circulating circuit which supp

a cooling apparatus 110 comprises a primary refrigerant circulating circuit which allows a primary refrigerant CW 1 whose temperature is adjusted by a heat exchanger 138 to circulate through an electrode to adjust a temperature of the electrode, a secondary refrigerant circulating circuit which supplies a secondary refrigerant CW2 to the heat exchanger to adjust the temperature of the primary refrigerant, and a freezing circuit 140 which has a first heat exchanger 141 interposed in the secondary refrigerant circulating circuit and which adjust a temperature of the secondary refrigerant by a tertiary refrigerant. The temperature of the primary refrigerant is adjusted by the secondary refrigerant without adjusting the temperature using the freezing circuit. When a temperature of the primary refrigerant is set higher than that of the secondary refrigerant, the temperature of the primary refrigerant can be adjusted only by the secondary refrigerant. Only when the temperature of the primary refrigerant is set lower than that of the secondary refrigerant, the temperature of the secondary refrigerant is adjusted by the freezing circuit and thus, it is possible to save energy.

대표청구항 ▼

What is claimed is: 1. A cooling apparatus comprising: a primary refrigerant circulating circuit which allows a primary refrigerant whose temperature is adjusted by a heat exchanger to circulate into an electrode and adjusts a temperature of said electrode, and which has a first check valve for all

What is claimed is: 1. A cooling apparatus comprising: a primary refrigerant circulating circuit which allows a primary refrigerant whose temperature is adjusted by a heat exchanger to circulate into an electrode and adjusts a temperature of said electrode, and which has a first check valve for allowing said primary refrigerant to flow into said electrode, a second check valve allowing said primary refrigerant to flow out from said electrode, and a purge valve capable of bringing said primary refrigerant into communication with a purge gas path, a secondary refrigerant circulating circuit which supplies a secondary refrigerant to said heat exchanger to adjust a temperature of said primary refrigerant, and a freezing circuit through which a tertiary refrigerant circulates said heat exchanger being interposed in said secondary refrigerant circulating circuit, said freezing circuit adjusting a temperature of said secondary refrigerant by said tertiary refrigerant, a temperature detector for detecting temperatures of said primary refrigerant and said secondary refrigerant, and a control system for actuating, only when necessary, said freezing circuit in accordance with a detected temperature value of at least one of said primary refrigerant and said secondary refrigerant, wherein the freezing circuit is configured to not operate when the cooling apparatus is in an energy-saving mode. 2. A cooling apparatus according to claim 1, wherein said control system is configured to actuate said freezing circuit when a temperature of said primary refrigerant is set lower than the detected temperature value of said secondary refrigerant. 3. A cooling apparatus according to claim 1, wherein said control system is configured to detect an upstream temperature of said electrode of said primary refrigerant circulating circuit, and adjust a flow rate of said secondary refrigerant which circulates in the secondary refrigerant circulating circuit in accordance with the detected temperature value. 4. A plasma processing apparatus having a cooling apparatus according to claim 1. 5. A plasma processing apparatus having a cooling apparatus according to claim 2. 6. A plasma processing apparatus having a cooling apparatus according to claim 3. 7. A cooling apparatus according to claim 1, wherein a second control system is configured to prevent the freezing circuit from operating when the cooling apparatus is the energy-saving mode. 8. A plasma processing apparatus having a cooling apparatus according to claim 7. 9. A cooling apparatus comprising: a primary refrigerant circulating circuit which allows a primary refrigerant whose temperature is adjusted by a heat exchanger to circulate into an electrode and adjusts a temperature of said electrode, and which has a first check valve for allowing said primary refrigerant to flow into said electrode, a second check valve allowing said primary refrigerant to flow out from said electrode, and a purge valve capable of bringing said primary refrigerant into communication with a purge gas path, a secondary refrigerant circulating circuit which supplies a secondary refrigerant to said heat exchanger to adjust a temperature of said primary refrigerant, and a freezing circuit through which a tertiary refrigerant circulates said heat exchanger being interposed in said secondary refrigerant circulating circuit, said freezing circuit adjusting a temperature of said secondary refrigerant by said tertiary refrigerant, a temperature detector for detecting temperatures of said primary refrigerant and said secondary refrigerant, and a control system for actuating, only when necessary, said freezing circuit in accordance with a detected temperature value of at least one of said primary refrigerant and said secondary refrigerant, wherein a second control system is configured to prevent the freezing circuit from operating when the cooling apparatus is an energy-saving mode. 10. A cooling apparatus according to claim 9, wherein said control system is configured to actuate said freezing circuit when a temperature of said primary refrigerant is set lower than the detected temperature value of said secondary refrigerant. 11. A cooling apparatus according to claim 9, wherein said control system is configured to detect an upstream temperature of said electrode of said primary refrigerant circulating circuit, and adjust a flow rate of said secondary refrigerant which circulates in the secondary refrigerant circulating circuit in accordance with the detected temperature value. 12. A plasma processing apparatus having a cooling apparatus according to claim 9. 13. A plasma processing apparatus having a cooling apparatus according to claim 10. 14. A plasma processing apparatus having a cooling apparatus according to claim 11.