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Hybrid cascade model-based predictive control system

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G05G-023/00
출원번호 US-0619383 (2003-07-14)
발명자 / 주소
  • Zhenduo,Liu
  • Huussen,Frank
출원인 / 주소
  • ASM International N.V.
대리인 / 주소
    Knobbe, Martens, Olson &
인용정보 피인용 횟수 : 13  인용 특허 : 23

초록

A hybrid cascade Model-Based Predictive control (MBPC) and conventional control system for thermal processing equipment of semiconductor substrates, and more in particular for vertical thermal reactors is described. In one embodiment, the conventional control system is based on a PID controller. In

대표청구항

What is claimed is: 1. A temperature control system for a thermal reactor having a process chamber, the control system comprising: a first control loop comprising a conventional controller and using a spike temperature sensor signal as input for the conventional controller, which provides an output

이 특허에 인용된 특허 (23)

  1. Arcara, Samuel A., Filter arrangement for elimination of unwanted bias in a model reference process control system.
  2. Giacobbe, Frederick W.; Pizzo, Michael G., Low temperature heat transfer methods.
  3. Pfeiffer Bernd-Markus,DEX, Method and device for controlling a self-regulating, delayed process.
  4. Gevelber Michael A. ; Toledo-Quinones Manuel, Method for closed loop control of chemical vapor deposition process.
  5. Bernd-Markus Pfeiffer DE, Method for controlling a time-lagged process with compensation, and a controlling device for carrying out said method.
  6. Stoddard Kevin ; Hugues Jean Benoit ; Tsakalis Konstantinos, Model based temperature controller for semiconductor thermal processors.
  7. Wassick John M. ; McCroskey Patrick S. ; McDonough John J. ; Steckler David K., Model predictive controller.
  8. Henk de Waard JP; James J. Donald ; Zhimin Lu ; Robin M. de Keyser BE, Model-based predictive control of thermal processing.
  9. de Waard Henk,JPX ; Donald James J. ; Lu Zhimin ; de Keyser Robin M.,BEX, Model-based predictive control of thermal processing.
  10. Rutledge Robert W. (Bartlesville OK), Process control.
  11. Johnson William Harold (Fortescue NJ) Meckley Frederick William (Wilmington DE) Morton Breydon Gregory (Sicklerville NJ), Proportional with variable bias batch reactor temperature control system.
  12. Brekke Dale J. (Plymouth MN) Fleischer Fred L. (Petersburg TN), Radiant wall oven with temperature control.
  13. Moslehi Mehrdad M. (Dallas TX), Real-time multi-zone semiconductor wafer temperature and process uniformity control system.
  14. Sergei V. Ulyanov IT, Self-organizing control system.
  15. Hideto Yamaguchi JP; Kazuo Tanaka JP; Kenzo Urabe JP, Semiconductor producing apparatus and temperature control method therefor.
  16. Mustafa Abbas ; John E. Seem ; Bernard Philippe Nicolas Clement FR, System and method for controlling air quality in a room.
  17. Harris Holton E. (Westport CT), System and method of temperature control for plastics extruder.
  18. Ohmori Kazunori (Fuchu JPX) Kawai Kensuke (Higashi-Murayama JPX), System for determining abnormal plant operation based on whiteness indexes.
  19. Frank J. Przybylski, Systems and methods for limiting integral calculation components in PID controllers.
  20. Stoddard Kevin ; McHugh Paul R. ; Tsakalis Konstantinos, Temperature control system for a thermal reactor.
  21. Saquib, Suhail S.; Vetterling, William T., Thermal response correction system.
  22. Rake Heinrich (Aachen DEX) Hoffmann Ulrich (Aachen DEX) Mller Ulrich (Aachen DEX) Breddermann Rudolf (Aachen DEX) Blumbach Rainer (Wrselen DEX), Time-discrete adaptive switching on-off controller.
  23. Wojsznis Wilhelm K. (Round Rock TX), Variable horizon predictor for controlling dead time dominant processes, multivariable interactive processes, and proces.

이 특허를 인용한 특허 (13)

  1. Shearer, Jon D.; Aeshliman, Carl R., Aircraft heating system.
  2. MacArthur, Ward; Hallihole, Sriram; Srinivasan, Ranganathan; Gundappa, Madhukar Madhavamurthy; Vartak, Mandar Subhash; Pandurangan, Gobinath; Vittal, S. Chandrakanth; Liu, Lucy Ning; Dave, Sanjay Kantilal; Das, Avijit; Sreekantan, Sreesathya Sathyabhama; Yohannan, Roshan; Jain, Rajni, Dynamic model generation for implementing hybrid linear/non-linear controller.
  3. Sims, Jay R.; Ling, Richard, Feedback control system and method that selectively utilizes observer estimates.
  4. Takenaga, Yuichi; Wang, Wenling, Heat treatment system, heat treatment method, and non-transitory computer-readable recording medium.
  5. Van Donkelaar,Edwin Teunis; Van Den Biggelaar,Petrus Marinus Christianus Maria, Lithographic motion control system and method.
  6. Sayyar-Rodsari, Bijan, Model Predictive control system and method for reduction of steady state error.
  7. Sayyar-Rodsari, Bijan, Model predictive control system and method for reduction of steady state error.
  8. Middlebrooks,Scott A., Observability in metrology measurements.
  9. Vermillion, Christopher R.; Sun, Jing; Butts, Ken R., Optimization-based modular control system.
  10. Coughran, Mark; McMillan, Gregory K., Rapid process model identification and generation.
  11. Hsieh, Ming-Chih, Temperature control circuit.
  12. Hsieh, Ming-Chih, Temperature control circuit.
  13. Okada, Yoshiyuki; Yoshida, Tomohiko; Ota, Takafumi; Matsumura, Yuuhei, Temperature regulating apparatus, exposure system, and device manufacturing method.
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