$\require{mediawiki-texvc}$
  • 검색어에 아래의 연산자를 사용하시면 더 정확한 검색결과를 얻을 수 있습니다.
  • 검색연산자
검색연산자 기능 검색시 예
() 우선순위가 가장 높은 연산자 예1) (나노 (기계 | machine))
공백 두 개의 검색어(식)을 모두 포함하고 있는 문서 검색 예1) (나노 기계)
예2) 나노 장영실
| 두 개의 검색어(식) 중 하나 이상 포함하고 있는 문서 검색 예1) (줄기세포 | 면역)
예2) 줄기세포 | 장영실
! NOT 이후에 있는 검색어가 포함된 문서는 제외 예1) (황금 !백금)
예2) !image
* 검색어의 *란에 0개 이상의 임의의 문자가 포함된 문서 검색 예) semi*
"" 따옴표 내의 구문과 완전히 일치하는 문서만 검색 예) "Transform and Quantization"

특허 상세정보

Chemical mix and delivery systems and methods thereof

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B67D-005/08   
미국특허분류(USC) 222/053; 222/056; 222/129; 222/145.5; 222/145.6
출원번호 US-0436349 (2003-05-12)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 12  인용 특허 : 45
초록

The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of sup...

대표
청구항

What is claimed: 1. A chemical delivery system, comprising: a main reservoir in fluid communication with one or more inlet fill valves, an inlet pressure valve, and a main reservoir outlet valve; a buffer reservoir in fluid communication with a buffer reservoir inlet valve and a buffer outlet valve; a line connecting the main reservoir outlet valve to the buffer reservoir inlet valve; a load cell for monitoring the weight of a chemical in the buffer reservoir and generating analog signals that are converted to digital signals indicative of the weight of...

이 특허에 인용된 특허 (45)

  1. Vanell James F. ; Ward Steven D. ; Mullins James M.. Apparatus and method for dynamically mixing slurry for chemical mechanical polishing. USP1998055750440.
  2. Naoki Hiraoka JP; Takeshi Hiraide JP. Apparatus and method for supplying chemicals. USP2002106457852.
  3. Hayashi Shizuo (Suzuka JPX). Apparatus for controlling a pressure-type furnace for pouring molten ores. USP1984054445670.
  4. Kondo, Kaoru; Tsuda, Naoki; Takasaki, Norihiro; Bandou, Yoshifumi; Hino, Masumi; Miyata, Kenyou. Apparatus for producing polishing solution and apparatus for feeding the same. USP2004036709313.
  5. Magnasco Enrico (Rapallo ITX) Viale Giorgio (Chiavari ITX 4). Apparatus for the selection, metering and delivery of liquids, in particular treatment liquids for industrial laundry wa. USP1985064524801.
  6. Bsmiller Erich (Lohhof DEX). Arrangement for the thermal spraying of metal and ceramic powders. USP1982084346818.
  7. Hayashi Shizuo (Suzuka JPX). Automatic pouring furnace. USP1988034730755.
  8. Birtcher Charles Michael ; Steidl Thomas Andrew ; Martinez Martin Castaneda ; Hamidi Jamshid Jay. Chemical delivery system with ultrasonic fluid sensors. USP2001076264064.
  9. David Soberanis ; Randy Forshey. Chemical delivery systems and methods of delivery. USP2002016340098.
  10. Soberanis David ; Forshey Randy. Chemical delivery systems and methods of delivery. USP2000086098843.
  11. Soberanis David ; Forshey Randy. Chemical delivery systems and methods of delivery. USP2001086269975.
  12. Soberunie, David; Forshey, Randy. Chemical delivery systems and methods of delivery. USP2004016675987.
  13. Carroll ; Jr. John D. (182 Pleasant St. Paxton MA 01612). Chemical distribution system. USP1979014132242.
  14. Qian Zide ; Qian Benyu. Closed isobaric dispenser for carbonated liquid. USP1998105826748.
  15. Osterheld, Thomas H.; Bonner, Benjamin A.; Richter, Michael W.. Closed loop control over delivery of liquid material to semiconductor processing tool. USP2004126834777.
  16. Osterheld, Thomas H.; Bonner, Benjamin A.; Richter, Michael W.. Closed loop control over delivery of liquid material to semiconductor processing tool. USP2003056561381.
  17. Higuchi Noboru (Kanagawa JPX) Matsui Keizo (Kanagawa JPX) Kobayashi Chuzo (Kanagawa JPX) Ohnishi Hiroshi (Kanagawa JPX) Yamaguchi Shigeru (Kanagawa JPX). Controlling method and a measuring mixer for liquids and powders. USP1989054830508.
  18. Esclar Dominique,FRX ; Leitman Franck,FRX ; Gaubert Michel,FRX. Device for storing a liquid or pasty product and for dispensing a given quantity of the product. USP1998085788119.
  19. O\Dougherty Kevin T. (Minneapolis MN). Empty drum detecting apparatus. USP1994035293893.
  20. Terri J. Brownfield ; Jonathan D. Halderman. Inline flux measurement system. USP2002066399902.
  21. Stotelmyer L. Scott (Manhattan Beach CA) Fulkerson Don K. (Valencia CA). Integrated storage and transfer system and method for spacecraft propulsion systems. USP1996015479959.
  22. Weinberg Richard S. (Palo Alto CA) Thomas James W. (Los Altos CA). Liquid auto-level apparatus and method. USP1997125700401.
  23. DiRegolo Joseph A. (San Leandro CA). Liquid chemical dispensing system. USP1986074601409.
  24. Burch Daniel E. (Lewisville TX). Liquid dispensing system. USP1994055316181.
  25. Harty Edmond P. (Causeway IEX) Harty ; Jr. Edmond P. (Causeway IEX) O\Callaghan Edmond (Kilworth IEX). Meter and a method for measuring quantity of a flowing liquid. USP1997055632411.
  26. Studenberg Fred J. (West Melbourne FL). Method and apparatus for detecting signals on digital data systems. USP1992025086435.
  27. Diem Winfried,DEX. Method and apparatus for gravimetric dosing and mixing of at least two components. USP1998055753868.
  28. Lethen Robert (Simmerath ; Lammersdorf DT) Ostler Fritz (Simmerath ; Lammersdorf DT) Heimerich Heinz (Roetgen DT) Kienert Manfred (Simmerath ; Lammersdorf DT). Method and arrangement for dispensing quantities of molten metal by pneumatic pressure. USP1976123998365.
  29. Mizokawa Takumi (Kobe JPX) Suzuki Fumitaka (Kobe JPX). Method for measuring integrated weight of particulate feed material. USP1984124488837.
  30. Olsen Gregory A. ; Smith Carey R. ; Pratt Wayne. Methods and apparatus for measuring and dispensing processing solutions to a CMP machine. USP1999015857893.
  31. DeGennaro Michael. Mouthwash dispensing device. USP1998025713492.
  32. Skye David A. (Harpenden GB3) Pummell Leslie J. H. (Rickmansworth GB3). Photographic processing apparatus. USP1994105357306.
  33. Murphy James J. (Austin TX) Farkas Janos (Austin TX) Markert Lucia C. (Austin TX) Jairath Rahul (Austin TX). Point of use slurry dispensing system. USP1995125478435.
  34. Kamikubo Noritaka,JPX ; Satoh Yuji,JPX. Polishing liquid supply apparatus. USP2001076257965.
  35. Nomoto, Hiroki; Murata, Kenichiro; Kishimoto, Mitsuharu. Powder and granular material supply system for closed system. USP2003026523721.
  36. Moldavsky Boris. Precision dispensing process control. USP2000056061608.
  37. Florian Gerhard (Holzkirchen DEX). Process and device for removing gas bubbles from a viscous liquid to be dispensed. USP1996125584416.
  38. Bernosky Eugene W. (Hollister CA) Geatz J. Tobin (Durham NC) Ferrie ; Jr. Edward T. (Gilroy CA) Roberson ; Jr. Glenn A. (Hollister CA). Process for precise volumetrio diluting/mixing of chemicals. USP1996025490611.
  39. Beech Walter Lee. Quick-charge and-discharge dispensing system for liquid indirectly weighed in a dispenser. USP1998025713486.
  40. Juhola Bruce M. (Atherton CA) Raphael Ian P. (Los Gatos CA). System and method for dispensing liquid from storage containers. USP1997065636762.
  41. Raphael Ian P. (Campbell CA). System and method for dispensing liquid from storage containers. USP1995015383574.
  42. Jones Oliver D. (Santa Cruz CA) Stephens Donald E. (Westlake Village CA). System and method for texturing magnetic data storage disks. USP1996025490809.
  43. Marjo Erik (Manly AUX). System for mixing liquids. USP1996095558435.
  44. Reighard Michael A. ; Byers John P. ; Zakrajsek Rick ; Babiarz Alec J. ; Lewis Alan R. ; Suriawidjaja Floriana. Viscous material dispensing system and method with feedback control. USP2001016173864.
  45. Ricciardi Ronald J. (Woodcliff Lake NJ) Ferrara Angelo (Patterson NJ) Hartmann Joseph L. (West Caldwell NJ) Lauterbach Gary R. (Sunnyvale CA). Weigh feeding apparatus. USP198604RE32101.

이 특허를 인용한 특허 피인용횟수: 12

  1. Udagawa, Seiichiro. Chemical liquid apparatus and deaerating method. USP2009097594801.
  2. Yajima, Takeo. Chemical liquid supply apparatus and a chemical liquid supply method. USP2010057708880.
  3. Freeman, William. Controlled liquid injection and blending apparatus. USP2012078210826.
  4. Lurcott, Steven M.; Hughes, John E. Q.; Wrschka, Peter; Baum, Thomas H.; Ware, Donald D.; Zou, Peng. Fluid processing systems and methods. USP2015059038855.
  5. Lurcott, Steven M.; Hughes, John E. Q.; Wrschka, Peter; Baum, Thomas H.; Ware, Donald D.; Zou, Peng. Fluid processing systems and methods. USP2017039586188.
  6. Kelekar, Rajesh; Verma, Gaurav; Weiner, Kurt. Maintaining flow rate of a fluid. USP2011108037894.
  7. Kelekar, Rajesh; Verma, Gaurav; Weiner, Kurt. Measuring volume of a liquid dispensed into a vessel. USP2012078220502.
  8. Sasa, Takashi; Ishimaru, Daisuke. Processing liquid supplying apparatus, processing liquid supplying method and storage medium. USP2017109778571.
  9. Byers, Gary Allen; Derecskei, Bela; Bayer, Benjamin Patrick. Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture. USP2017099770804.
  10. Kandiyeli, David; Graves, Todd; Yang, Rhey. System and method for delivering chemicals. USP2012028113236.
  11. Kandiyeli, David; Graves, Todd; Yang, Rhey. System and method for processing high purity materials. USP2010097799115.
  12. Kandiyeli, David; Graves, Todd; Yang, Rhey. System and method for processing high purity materials. USP2012118308845.