초록 ▼

Disclosed is a nozzle for injecting sublimable solid particles, which is capable of minimizing consumption of the carrier gas and also maximizing cleaning efficiency. The nozzle comprises a base block having a space in which carrier gas is supplied through a gas supplying pipe; a sub-block having a

Disclosed is a nozzle for injecting sublimable solid particles, which is capable of minimizing consumption of the carrier gas and also maximizing cleaning efficiency. The nozzle comprises a base block having a space in which carrier gas is supplied through a gas supplying pipe; a sub-block having a space in which cleaning medium decompressed by a regulator is supplied through a cleaning medium supplying pipe; a first venturi block having a venturi path for adiabatically expanding the carrier gas supplied from the space of the base block, and a cleaning medium injection path communicating the venturi path and the space of the sub-block and the carrier gas passed through the venturi path; and a second venturi block having a venturi path for adiabatically expanding the mixed gas of the carrier gas and the cleaning medium.

대표청구항 ▼

What is claimed is: 1. A nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface, comprising: a base block having a space in which carrier gas is supplied through a gas supplying pipe; a sub-block having a space in which cleaning medium decompressed by a regulator is

What is claimed is: 1. A nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface, comprising: a base block having a space in which carrier gas is supplied through a gas supplying pipe; a sub-block having a space in which cleaning medium decompressed by a regulator is supplied through a cleaning medium supplying pipe; a first venturi block having a venturi path for adiabatically expanding the carrier gas supplied from the space of the base block, and a cleaning medium injection path is adjacent to a throttle portion so as to connect the throttle portion of the venturi path with the space of the sub-block to mix the cleaning medium of the sub-block and the carrier gas passed through the venturi path; a second venturi block having a venturi path for adiabatically expanding the mixed gas of the carrier gas and the cleaning medium, wherein the venturi path of the first venturi block has an acute angle with respect to the cleaning medium injection path, and wherein the first and second venturi blocks respectively have a plurality of venturi paths disposed in parallel, and the sub-block has the same number of cleaning injection paths as the number of venturi paths. 2. The nozzle of claim 1, further comprising an intermediate block having a path, which is disposed between the first and second venturi blocks, for promoting the mixture of the carrier gas and the cleaning medium in the mixed gas moving from the path of the first venturi block to the path of the second venturi block and thus inducing growth of snow particles. 3. The nozzle of claim 1, wherein the venturi path of the first venturi block has an angle of 15 to 60째 with respect to the cleaning medium injection path. 4. The nozzle of claim 1, wherein the carrier gas supplying pipe has a slit at an end thereof so that the carrier gas is injected at a desired angle range when supplied to the space of the base block. 5. The nozzle of claim 4, wherein the carrier gas injected through the slit has an angle of 116째. 6. The nozze of claim 1, wherein the cleaning medium supplied to the first venturi path has a pressure of 10 to 50 psi, and the carrier supplied to the space of the base block has a pressure of 60 to 100 psi. 7. The nozzle of claim 1,wherein the cleaning medium is CO 2 + or Ar+. 8. The nozzle of claim 1, wherein the carrier gas is N2 gas or clean dry air.