초록 ▼

A method for removing oxygen from ammonia at low temperature is described. In one embodiment, oxygen contaminated ammonia is contacted with a getter material that includes iron and manganese that sorbs oxygen to yield ammonia that is substantially oxygen free. In one embodiment, the process of conta

A method for removing oxygen from ammonia at low temperature is described. In one embodiment, oxygen contaminated ammonia is contacted with a getter material that includes iron and manganese that sorbs oxygen to yield ammonia that is substantially oxygen free. In one embodiment, the process of contacting ammonia with the getter material takes place at about 25째 C. In another embodiment the weight ratio between iron and manganese is about 7:1. In another embodiment, the getter material is dispersed on an inert support of specific surface greater than 100 m2/g. In one embodiment, impure ammonia is contacted with getter material including iron and manganese that sorbs oxygen and with a drying agent that absorbs water to yield deoxygenated anhydrous ammonia. In yet another embodiment, an apparatus consisting of a gas inlet, gas purification chamber and gas outlet that deoxygenates ammonia when charged with getter material that includes iron and manganese is described. In one embodiment, getter material and drying agent are mixed together inside the gas purification chamber. In another aspect a method for producing semiconductor devices with high purity ammonia is described.

대표청구항 ▼

The invention claimed is: 1. A method for removing oxygen contaminants from ammonia contaminated with oxygen, said method comprising the steps of contacting the oxygen contaminated ammonia with an oxygen removing material consisting essentially of at least partially-reduced oxides of iron and manga

The invention claimed is: 1. A method for removing oxygen contaminants from ammonia contaminated with oxygen, said method comprising the steps of contacting the oxygen contaminated ammonia with an oxygen removing material consisting essentially of at least partially-reduced oxides of iron and manganese to sorb said oxygen contaminants from said contaminated ammonia. 2. The method as recited in claim 1, further comprising providing a zeolite material in contact with said oxygen removing material. 3. The method as recited in claim 1, further comprising thermally reducing hydroxides of iron and manganese to produce oxides of iron and manganese at about 400 degrees C. 4. The method as recited in claim 1, further comprising treating iron and manganese acetates, chlorides or nitrates to produce said hydroxides of iron and manganese. 5. The method of claim 1, wherein the oxygen-removing material includes the iron and the manganese at a weight ratio of between about 10:1 and about 1:2. 6. The method of claim 1, wherein said sorbing oxygen contaminants from said contaminated ammonia removes more than about 99% of oxygen from said contaminated ammonia. 7. A method for removing oxygen from ammonia comprising the steps of: thermally reducing hydroxides of iron and manganese to produce oxides of iron and manganese; reducing said oxides of iron and manganese to produce an ammonia purification material, such that said purification material includes at least partially-reduced oxides of iron and manganese; removing oxygen from an oxygen-contaminated ammonia stream with said purification material of iron and manganese, by contacting ammonia with said purification material, said removing step performed at less than 50 C and greater than 20 C. 8. The method as recited in claim 7, wherein said iron and manganese oxides are dispersed on zeolites. 9. The method as recited in claim 7, where said thermally reducing step takes place at about 400 degrees C. 10. The method as recited in claim 7, further comprising treating of iron and manganese acetates, chlorides or nitrates to produce said hydroxides of iron and manganese. 11. A method comprising: providing a getter material comprising iron and manganese; flowing a gaseous stream comprising ammonia contaminated with oxygen over the getter material; gettering at least some of the oxygen from the stream of ammonia with the getter material, without substantially gettering the ammonia. 12. The method of claim 11, further comprising: producing oxides of iron and manganese; and at least partially reducing the oxides of iron and manganese. 13. The method of claim 11, further comprising creating the getter material, wherein said producing oxides of iron and manganese includes thermally reducing hydroxides of iron and manganese at about 400 degrees C. 14. The method of claim 11, further comprising providing zeolites in contact with said getter material. 15. The method of claim 11, further comprising treating iron and manganese acetates, chlorides or nitrates to produce hydroxides of iron and manganese. 16. The method of claim 11, wherein after gettering oxygen from the stream of gaseous ammonia, there is less than about 1 ppm of oxygen in said ammonia gas. 17. The method of claim 11, wherein after gettering oxygen from the stream of gaseous ammonia, there is less than about 1 ppb of oxygen in said ammonia gas. 18. The method of claim 11, wherein said gettering oxygen from the stream of gaseous ammonia removes more, than about 99% of oxygen from said ammonia gas. 19. The method of claim 11, wherein the getter material has an operational temperature of at least between about-20 and 50 degrees C. 20. The method of claim 11, further comprising flowing the stream of gaseous ammonia over a dryer material.