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특허 상세정보

Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) F04D-019/04    F04D-019/00   
미국특허분류(USC) 415/001; 415/009; 415/062; 415/066; 415/068; 415/090; 415/143; 415/229; 417/205; 417/244; 417/423.4; 417/423.12
출원번호 US-0737570 (2003-12-16)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    McAndrews, Held &
인용정보 피인용 횟수 : 0  인용 특허 : 39
초록

An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within the chamber. The turbofan employs large diameter rotor blades operating at high linear blade velocity to impart an ultra-high pumping speed to a fluid. The second stage turbomolecular pump is fluidly connected downstream from the first stage turbofan. In operation, the first stage turbofan op...

대표
청구항

What is claimed is: 1. A vacuum pump evacuation system comprising: (a) a first stage comprising a turbofan comprising: (1) a fluid-containing housing having a fluid stream inlet and a fluid stream outlet; (2) a shaft rotatably mounted within said housing, said shaft having a longitudinal axis; (3) a plurality of fixed stator blades extending from said housing toward the longitudinal axis of said shaft, said stator blades longitudinally spaced between said turbofan fluid stream inlet and said turbofan fluid stream outlet; (4) a plurality of rotor blades ...

이 특허에 인용된 특허 (39)

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