초록 ▼

The present invention relates to apparatus and method for re-circulating high viscosity liquids. The apparatus comprises a recirculating probe coupled to a fluid storage and dispensing vessel by a connector, and the recirculating probe comprises: (a) a dip tube defining an output flow path; (b) an o

The present invention relates to apparatus and method for re-circulating high viscosity liquids. The apparatus comprises a recirculating probe coupled to a fluid storage and dispensing vessel by a connector, and the recirculating probe comprises: (a) a dip tube defining an output flow path; (b) an output port; (c) a recirculating port; and (d) a return flow path. The output flow path and the return flow path preferably have substantially equal cross-sectional areas, which reduce or eliminate the unbalance between the discharge pressure in the output line and that in the re-circulation line, and prevent premature wearing-out of the dispensing/recirculating pump. The output flow path and the return flow path can also be concentric to each other, which not only maximizes the effective flow area for both output and return flow paths within the limited cross-sectional area of the opening of the fluid vessel, but also avoids liquid turbulence and/or formation of air bubbles caused by free-fall drip introduction of the re-circulated liquid that is commonly observed in conventional recirculating probe designs.

대표청구항 ▼

What is claimed is: 1. An apparatus for dispensing a liquid from a fluid storage and dispensing vessel to a liquid dispensing system, including a recirculating probe and a connector for coupling said recirculating probe to an opening of the fluid storage and dispensing vessel, said recirculating pr

What is claimed is: 1. An apparatus for dispensing a liquid from a fluid storage and dispensing vessel to a liquid dispensing system, including a recirculating probe and a connector for coupling said recirculating probe to an opening of the fluid storage and dispensing vessel, said recirculating probe comprising: a dip tube defining an output flow path, wherein said dip tube has a first end and a second end, and wherein the first end of the dip tube extends into said storage and dispensing vessel through the opening; an output port coupled to the second end of the dip tube, wherein the liquid from said fluid storage and dispensing vessel flows through the output flow path of the dip tube and the output port to the liquid dispensing system, wherein the outflow path of the dip tube and the output port has an essentially constant width dimension along the length of the path thereby allowing for essentially consistent flow velocity and pressure; a recirculating port, constructed and arranged to receive re-circulated liquid from said liquid dispensing system; and a return flow path coupled to the recirculating port for flowing the re-circulated liquid downwardly along the dip tube and back into the fluid storage and dispensing vessel, wherein the outflow path is adjacent to the return flow path and extends from the first end of the dip tube to the output port, wherein said return flow path has a cross-sectional area that is substantially equal to the cross-sectional area of said output flow path. 2. The apparatus of claim 1, wherein the return flow path and the output flow path are concentric, being separated by the dip tube. 3. The apparatus of claim 2, wherein the dip tube has an inner diameter within a range of from about 0.889 cm to about 1.143 cm, and an outer diameter within a range of from about 1.143 cm to about 1. 397 cm, and wherein the return flow path has an outer diameter within a range of from about 1.524 cm to about 1.651 cm. 4. The apparatus of claim 1, constructed and arranged to dispense a liquid that has a viscosity of at least 50 centipoises. 5. The apparatus of claim 1, constructed and arranged to dispense a liquid that has a viscosity of at least 100 centipoises. 6. The apparatus of claim 1, constructed and arranged to dispense a liquid that has a viscosity of at least 1000 centipoises. 7. The apparatus of claim 1, further comprising a pressure assist port that is coupled to an external pressure source for introducing pressurized gas into the fluid storage and dispensing vessel, to facilitate flow of the liquid from said fluid storage and dispensing vessel to the liquid dispensing system. 8. The apparatus of claim 7, further comprising a pressure relief valve for reducing overpressure within the fluid storage and dispensing vessel. 9. The apparatus of claim 7, wherein the liquid is stored within a liner disposed in said fluid storage and dispensing vessel, wherein a space is present between an outer surface of the liner and an inner wall of said fluid storage and dispensing vessel, and wherein pressurized gas is introduced to said space through the pressure assist port, for pressurizing the liquid stored within said liner without directly contacting said liquid. 10. The apparatus of claim 9, wherein the liner comprises at least one fluoropolymer. 11. The apparatus of claim 9, wherein the liner is fabricated of a material comprising at least one of, perfluoroalkoxy resin (PFA), PTFE, Nylon, Polyethylene, ECTFE, Poly/nylon, polyethylene, PFA/PTFE, and combinations thereof. 12. The apparatus of claim 1, wherein the return flow path is bounded by a vertically aligned outer wall of the dip tube, so that when the re-circulated liquid flows from the recirculating port into the return flow path, said re-circulated liquid comes into contact with the vertically aligned outer wall of the dip tube and is directed by said dip tube to flow vertically downwardly along the outer wall surface into the fluid storage and dispensing vessel. 13. The apparatus of claim 1, wherein the output port is detachably coupled with the dip tube of the recirculating probe. 14. The apparatus of claim 1, wherein the recirculating port is detachably coupled with the return flow path of the recirculating probe. 15. The apparatus of claim 1, wherein the recirculating probe is sealingly coupled to the opening of the fluid storage and dispensing vessel by a first O-ring seal. 16. The apparatus of claim 15, wherein the output port is sealingly coupled to the second end of the dip tube by a secondary/backup O-ring seal. 17. The apparatus of claim 1, wherein the output port is coupled to the second end of the dip tube by an integral locking collar. 18. The apparatus of claim 1, wherein the liquid dispensing system dispenses liquid to a downstream semiconductor processing system. 19. An apparatus for dispensing a liquid from a fluid storage and dispensing vessel to a liquid dispensing system, comprising a recirculating probe and a connector for coupling said recirculating probe to an opening of the fluid storage and dispensing vessel, said recirculating probe comprising: a dip tube having a vertically aligned inner and outer wall defining an output flow path, wherein said dip tube has a first end and a second end, and wherein the first end of the dip tube extends into said storage and dispensing vessel through the opening, wherein the outflow path of the dip tube and the output port has an essentially constant width dimension along the length of the path thereby allowing for essentially consistent flow velocity and reduced agitation of the liquid; an output port coupled to the second end of the dip tube, wherein the liquid from said fluid storage and dispensing vessel flows through the output flow path of the dip tube and the output port to the liquid dispensing system; a recirculating port, constructed and arranged to receive recirculated liquid from said liquid dispensing system; and a vertically aligned return flow path coupled to the recirculating port and defined by the outer wall of the dip tube for flowing the re-circulated liquid vertically downward along the outer wall and back into the fluid storage and dispensing vessel, wherein the outflow path is adjacent to the return flow path and extends from the first end of the dip tube and above the return flow path to the output port, wherein said output flow path and said return flow path are concentric, being separated by the dip tube. 20. The apparatus of claim 19, wherein the return flow path is bounded by the outer wall of the dip tube, so that when the re-circulated liquid flows from the recirculating port into the return flow path, said re-circulated liquid comes into contact with the outer wall of the dip tube and is directed by said dip tube to flow vertically downwardly into the fluid storage and dispensing vessel.