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Method and apparatus for the preparation of clean gases

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01D-053/04   
미국특허분류(USC) 095/117; 095/052; 095/143; 095/237; 096/057; 096/074; 096/134; 096/135; 096/153; 055/385.2; 055/482.1; 055/485
출원번호 US-0079252 (2005-03-15)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Oblon, Spivak, McClelland, Maier &
인용정보 피인용 횟수 : 1  인용 특허 : 27
초록
▼

A method and apparatus for preventing contamination of a substrate or a substrate surface, and particularly relates to prevention of contamination of raw materials, semi-finished products, base materials of products and substrate surface in a high-tech industry such as an in the production of semiconductors and liquid crystals. A gas coming into contact with a base material or substrate is purified by dust removing apparatus and adsorption and/or absorption apparatus so that the concentration of fine particles in the gas is below class 1,000 and a non-me...

대표
청구항
▼

The invention claimed is: 1. A method for cleaning a substrate placed in a housing, which comprises the following steps: passing a gas supplied to the housing through an absorber and/or absorber for decreasing concentrations of non-methane hydrocarbons therein; passing the treated gas through a dust removing means to remove fine particles contained in the gas; and introducing the gas into the housing in which the substrate is placed. 2. The method of claim 1, wherein the absorber and/or absorber, and the dust removing means remove fine particles in t...

이 특허에 인용된 특허 (27)

  1. Purtschert Werner (Winterthur CHX). Adsorber for cleaning gases. USP1988084762536.
  2. Bingham Larry A. (Mission Viejo CA). Adsorption process. USP1977014000990.
  3. Rhodes James A. (42 East Gay St. ; Suite 1300 Columbus OH 43215). Air control system providing healthful enclosed environment. USP1991085042997.
  4. Schoenberger Stephen B. (Northbrook IL) Reavis Robert M. (Kansasville WI). Apparatus for filtering air and for creating a positive/negative pressure. USP1995035399319.
  5. Satoh Kazuo (Nishi-Okitama JPX) Ogawa Yohji (Nishi-Okitama JPX) Okano Hirofumi (Nishi-Okitama JPX) Suzuki Kiyomi (Higashi-Okitama JPX). Apparatus for preventing clouding of a semiconductor wafer. USP1991085039321.
  6. Cornwell James H. (Raleigh NC). Apparatus for treating indoor air. USP1993065221520.
  7. Weichselgartner Heinrich (Munich DEX). Arrangement for cleaning gaseous atmospheres from a plurality of separate, contained working spaces. USP1988054741882.
  8. Ho Chi Pai (Cary NC) Petty Robert H. (Sanford NC). Filter apparatus. USP1992015080699.
  9. von Blcher Hasso (Parkstrasse 10 D-4006 Erkrath DEX) de Ruiter Ernest (Hhenstrasse 57a D-5090 Leverkusen 3 DEX). Filter sheet material for passenger cabins in motor vehicles. USP1994095350443.
  10. Grennan Robert (Rockford IL) Rice John (Rockford IL) Squier Steven (Rockford IL). Fully integrated inert gas and oxidizer replenishment system. USP1991125069692.
  11. Everett Robert W. (Louisville KY). Indoor gun firing range enclosure having a ventilation system. USP1979084164901.
  12. Spiegel Ronald J. (Chapel Hill NC) Sederquist Richard A. (Newington CT) Trocciola John C. (Glastonbury CT) Healy Herbert C. (Hebron CT) Lesieur Roger R. (Enfield CT) Sandelli Gregory J. (Newington CT. Landfill gas treatment system. USP1995095451249.
  13. Karbachsch Massoud (Gottingen DEX) Kaul Wilfried (Weinsheim DEX) Strohm Gerhard (Oestrich-Winkel DEX). Membrane filtering device for micro and ultra filtration of fluids by the crossflow method. USP1991075034125.
  14. Garrett Michael E. (Woking GB2). Membrane plant: automatic control of. USP1995115470379.
  15. Suzuki Masanori (Tokyo JPX). Method and apparatus for eliminating electric charges in a clean room. USP1994035296018.
  16. Fujii Toshiaki,JPX ; Suzuki Tsukuru,JPX ; Suzuki Hidetomo,JPX ; Sakamoto Kazuhiko,JPX. Method and apparatus for the preparation of clean gases. USP1999075922105.
  17. Fujii, Toshiaki; Suzuki, Tsukuru; Suzuki, Hidetomo; Sakamoto, Kazuhiko. Method and apparatus for the preparation of clean gases. USP2004056733570.
  18. Fujii, Toshiaki; Suzuki, Tsukuru; Suzuki, Hidetomo; Sakamoto, Kazuhiko. Method and apparatus for the preparation of clean gases. USP2005066911064.
  19. Toshiaki Fujii JP; Tsukuru Suzuki JP; Hidetomo Suzuki JP; Kazuhiko Sakamoto JP. Method and apparatus for the preparation of clean gases. USP2002016340381.
  20. Cantoni Maria C. (Rome ITX). Multiple filter unit. USP1986124629479.
  21. Soga Setsuo (Tokyo JPX) Watabe Katsuji (Fujimi JPX). Ozone removing device for image forming equipment. USP1992075128110.
  22. Prasad Ravi (East Amherst NY) Haas Oscar W. (North Tonawanda NY). Prevention of membrane degradation. USP1989114881953.
  23. Crozel Didier (Paris FRX). Process for introducing a filling gas into an enclosure and installation for employing same. USP1997105676736.
  24. Sugo Takanobu,JPX ; Okamoto Jiro,JPX ; Fujiwara Kunio,JPX ; Sekiguchi Hideaki,JPX ; Fujii Toshiaki,JPX. Process for producing gas adsorbent. USP1998045743940.
  25. Andrews David K. (Cheltenham GB2) Benson Trevor P. (Evesham GB2) Smart Michael W. (Churchdown GB2). Pure-air generator. USP1987044655049.
  26. Doughty David T. (Coraopolis PA) Hayden Richard A. (Pittsburgh PA) Cobes ; III John W. (Harmony PA) Matviya Thomas M. (Pittsburgh PA). Purification of air in enclosed spaces. USP1997125700436.
  27. Matthews William G. (Hartsdale NY) Shaw Herbert C. (Mobile AL). Selective adsorption of NOx from gas streams. USP1979054153429.

이 특허를 인용한 특허 피인용횟수: 1

  1. Yabu, Tomohiro; Okubo, Eisaku. Humidity control system. USP2011017874174.

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