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특허 상세정보

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Radiation-heated fluidized-bed reactor

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01J-008/18   
미국특허분류(USC) 422/139; 422/146; 422/198; 165/177
출원번호 US-0677347 (2000-10-02)
우선권정보 DE-199 48 395(1999-10-06)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Collard &
인용정보 피인용 횟수 : 44  인용 특허 : 4
초록
▼

A radiation-heated fluidized-bed reactor and a process for producing high-purity polycrystalline silicon by using this reactor are provided. In this reactor, a heater device (14) is a radiation source for thermal radiation which is arranged outside the inner reactor tube and as a cylinder around the heater zone, without being in direct contact with the inner reactor tube. The inner reactor tube is designed in such a manner that it uses thermal radiation to heat the silicon particles in the heating zone to a temperature which is such that the reaction tem...

대표
청구항
▼

What is claimed is: 1. A fluidized-bed reactor (1) comprising: a) a pressure-supporting enclosure (2); b) an inner reactor tube (3) within said enclosure ( 2) and made from a material which exhibits high transmission for thermal radiation; c) an inlet (4) at a top of said enclosure (2) for silicon particles (5); d) an inlet device (6) for supplying a reaction gas (7) which contains a silicon compound in gas or vapor form, the inlet device (6) being of tubular design and dividing the fluidized bed into zones consisting of a heating zone (17) and a separa...

이 특허에 인용된 특허 (4)

  1. Kim Hee Y. (Daejeon KRX) Song Yong M. (Daejeon KRX) Jeon Jong Y. (Daejeon KRX) Kwon Dae H. (Daejeon KRX) Lee Kang M. (Daejeon KRX) Lee Jae S. (Daejeon KRX) Park Dong S. (Daejeon KRX). Fluidized bed reactor heated by microwaves. USP1995015382412.
  2. Yoon Poong (Seoul KRX) Song Yongmok (Chungnam KRX). Fluidized bed reactor with microwave heating system for preparing high-purity polycrystalline silicon. USP1988114786477.
  3. Doelling Michael K. (New City NY). Microwave assisted fluidized bed processor. USP1990114967486.
  4. Lord Stephen M. ; Milligan Robert J.. Silicon deposition reactor apparatus. USP1998095810934.

이 특허를 인용한 특허 피인용횟수: 44

  1. Sansegundo-Sanchez, Javier; Benavides-Rel, Xavier; Vales-Canle, Manuel; Tomas-Martinez, Maria. Cooled gas distribution plate, thermal bridge breaking system, and related methods. USP2014118875728.
  2. Kambe, Nobuyuki; Chiruvolu, Shivkumar. Dispersions of blends of silicon nanoparticles and silica nanoparticles. USP2016099448331.
  3. Kambe, Nobuyuki; Chiruvol, Shivkumar. Dispersions of silicon nanoparticles. USP2015129199435.
  4. Kambe, Nobuyuki. Dispersions of submicron doped silicon particles. USP2015119175174.
  5. Kambe, Nobuyuki; Chiruvolu, Shivkumar. Dispersions of submicron doped silicon particles. USP2013058435477.
  6. Weidhaus, Dieter; Crössmann, Ivo; Schreieder, Franz. Dust-free and pore-free, high-purity granulated polysilicon. USP2010057708828.
  7. Osborne, E. Wayne; Spangler, Michael V.; Allen, Levi C.; Geertsen, Robert J.; Ege, Paul E.; Stupin, Walter J.; Zeininger, Gerald. Fluid bed reactor. USP2015059023425.
  8. Osborne, E. Wayne; Spangler, Michael V.; Allen, Levi C.; Geertsen, Robert J.; Ege, Paul E.; Stupin, Walter J.; Zeininger, Gerald. Fluid bed reactor. USP2011128075692.
  9. Jiang, Wenwu; Jiang, Hongfu; Jiang, Limin; Wang, Xiaojun. Fluidized bed reactor and a process using same to produce high purity granular polysilicon. USP20180910081003.
  10. Jiang, Wenwu; Jiang, Hongfu; Wu, Feng; Zhong, Zhenwu; Chen, Wenlong. Fluidized bed reactor and a process using same to produce high purity granular polysilicon. USP2017119815041.
  11. Sanchez, Javier San Segundo; Barona, Jose Luis Montesinos; Conejero, Evaristo Ayuso; Canle, Manuel Vicente Vales; Rel, Xavier Benavides; Garcia, Pedro-Tomas Lujan; Martinez, Maria Tomas. Fluidized bed reactor for production of high purity silicon. USP2012058168123.
  12. Sanchez, Javier San Segundo; Barona, Jose Luis Montesinos; Conejero, Evaristo Ayuso; Canle, Manuel Vicente Vales; Rel, Xavier Benavides; Garcia, Pedro-Tomas Lujan; Martinez, Maria Tomas. Fluidized bed reactor for production of high purity silicon. USP2012048158093.
  13. Kulkarni, Milind S.; Gupta, Puneet; Devulapalli, Balaji; Ibrahim, Jameel; Revankar, Vithal; Foli, Kwasi. Fluidized bed reactor systems. USP2014128906313.
  14. Erk, Henry F.. Fluidized bed reactor systems and distributors for use in same. USP2014098828324.
  15. Kim, Hee Young; Yoon, Kyung Koo; Park, Yong Ki; Choi, Won Choon. High-pressure fluidized bed reactor for preparing granular polycrystalline silicon. USP2011077972562.
  16. Kim, Hee Young; Yoon, Kyung Koo; Park, Yong Ki; Choi, Won Choon. High-pressure fluidized bed reactor for preparing granular polycrystalline silicon. USP2012028114352.
  17. Miller, Matthew J.; Spangler, Michael V.; Zeininger, Gerald A.; Onstot, William J.; Stupin, Walter J.. Joint design for segmented silicon carbide liner in a fluidized bed reactor. USP2016099446367.
  18. Kim, Hee Young; Yoon, Kyung Koo; Park, Yong Ki; Choi, Won Choon. Method and apparatus for preparation of granular polysilicon. USP2014068747757.
  19. Kim, Hee Young; Yoon, Kyung Koo; Park, Yong Ki; Choi, Won Choon. Method and apparatus for preparation of granular polysilicon. USP2017099764960.
  20. Kim, Hee Young; Yoon, Kyung Koo; Park, Yong Ki; Choi, Won Choon. Method and apparatus for preparation of granular polysilicon. USP2014098821827.
  21. Fuchs, Paul; Weidhaus, Dieter. Method and apparatus for the contamination-free heating of gases. USP2015038975563.
  22. Miller, Matthew J.; Spangler, Michael V.. Method and apparatus to reduce contamination of particles in a fluidized bed reactor. USP2015129212421.
  23. Froehlich, Robert; Mixon, David. Methods and system for cooling a reaction effluent gas. USP2012088235305.
  24. Kulkarni, Milind S.; Gupta, Puneet; Devulapalli, Balaji; Ibrahim, Jameel; Revankar, Vithal; Foli, Kwasi. Methods for introducing a first gas and a second gas into a reaction chamber. USP2014058728574.
  25. Kulkarni, Milind S.; Gupta, Puneet; Devulapalli, Balaji; Ibrahim, Jameel; Revankar, Vithal; Foli, Kwasi. Methods for producing polycrystalline silicon that reduce the deposition of silicon on reactor walls. USP2013038404206.
  26. Bi, Xiangxin; Kambe, Nobuyuki; Gardner, James T.; Mosso, Ronald J.; Chiruvolu, Shivkumar; Kumar, Sujeet; McGovern, William E.. Methods for synthesizing submicron doped silicon particles. USP2013108568684.
  27. Yilmaz, Sefa; Miller, Matthew J.; Spangler, Michael V.; Wemp, Barry; Julsrud, Stein. Non-contaminating bonding material for segmented silicon carbide liner in a fluidized bed reactor. USP2017059662628.
  28. Li, Weidong; Soeda, Masaya; Pengra-Leung, Gina Elizabeth; Chiruvolu, Shivkumar. Printable inks with silicon/germanium based nanoparticles with high viscosity alcohol solvents. USP2016109475695.
  29. Miller, Matthew; Spangler, Michael V.; Wemp, Barry; Osborne, E. Wayne. Probe assembly for a fluid bed reactor. USP2017039587993.
  30. Weidhaus, Dieter; Hauswirth, Rainer; Hertlein, Harald. Process for the continuous production of polycrystalline high-purity silicon granules. USP2014058722141.
  31. Bhusarapu, Satish; Gupta, Puneet; Huang, Yue. Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor. USP2015089114996.
  32. Bhusarapu, Satish; Gupta, Puneet; Huang, Yue. Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor. USP2015089114997.
  33. Bhusarapu, Satish; Huang, Yue; Gupta, Puneet. Production of polycrystalline silicon in substantially closed-loop systems. USP2013058449848.
  34. Bhusarapu, Satish; Huang, Yue; Gupta, Puneet. Production of polycrystalline silicon in substantially closed-loop systems. USP2016079394180.
  35. Weckesser, Dirk. Reactor and process for preparing granular polysilicon. USP20190410258951.
  36. Chu, Xi. Reactor for producing high-purity granular silicon. USP2017099751066.
  37. Froehlich, Robert; Fieselmann, Ben; Mixon, David; Tsuo, York. Reactor with silicide-coated metal surfaces. USP2013048425855.
  38. Osborne, E. Wayne; Miller, Matthew J.; Spangler, Michael V.; Zeininger, Gerald A.; Onstot, William J.; Stupin, Walter J.. Segmented silicon carbide liner. USP2016019238211.
  39. Kambe, Nobuyuki. Silicon nanoparticle dispersions. USP2015049000083.
  40. Kambe, Nobuyuki. Silicon nanoparticle dispersions. USP2014018623951.
  41. Chiruvolu, Shivkumar; Altman, Igor; Frey, Bernard M.; Li, Weidong; Liu, Guojun; Lynch, Robert B.; Pengra-Leung, Gina Elizabeth; Srinivasan, Uma. Silicon/germanium nanoparticle inks, laser pyrolysis reactors for the synthesis of nanoparticles and associated methods. USP2014118895962.
  42. Chiruvolu, Shivkumar; Altman, Igor; Frey, Bernard M.; Li, Weidong; Liu, Guojun; Lynch, Robert B.; Pengra-Leung, Gina Elizabeth; Srinivasan, Uma. Silicon/germanium nanoparticles and inks having low metal contamination. USP2015049006720.
  43. Hieslmair, Henry; Chiruvolu, Shivkumar; Du, Hui. Silicon/germanium oxide particle inks and processes for forming solar cell components and for forming optical components. USP2013038399878.
  44. Hieslmair, Henry; Dioumaev, Vladimir K.; Chiruvolu, Shivkumar; Du, Hui. Silicon/germanium particle inks, doped particles, printing and processes for semiconductor applications. USP2014018632702.

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